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1. 发明申请

US20160094197A1 PIEZOELECTRIC VIBRATION PIECE AND PIEZOELECTRIC VIBRATOR 有权
标题翻译：压电振动片和压电振动器
公开(公告)号：US20160094197A1
公开(公告)日：2016-03-31
申请号：US14833499
申请日：2015-08-24
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H03H9/21 , H01L41/053
CPC分类号： H03H9/21 , H01L41/053 , H03H9/1021
摘要： A piezoelectric vibration piece includes: a base portion; a pair of vibration arm portions which extends in a first (+Y) direction from the base portion, and is arranged separately in a second (X) direction intersecting with the first (+Y) direction; and a support arm portion which extends in the first (+Y) direction from the base portion. The support arm portion, includes a first arm portion formed such that a width which is a length along the second (X) direction is gradually narrowed towards a tip end portion side of the support arm portion, and a second arm portion which extends in the first (+Y) direction from the first arm portion and is formed such that the width is broadened towards the tip end portion side.
摘要翻译：压电振动片包括：基部; 一对振动臂部，其从所述基部沿第一（+ Y）方向延伸，并且与所述第一（+ Y）方向交叉的第二（X）方向分开配置; 以及从基部沿第一（+ Y）方向延伸的支撑臂部。支撑臂部包括第一臂部，其形成为使得沿着第二（X）方向的长度的宽度朝向支撑臂部的前端部侧逐渐变窄，第二臂部在第第一（+ Y）方向，并且形成为使得宽度朝向前端部侧变宽。

2. 发明申请

US20220173717A1 PIEZOELECTRIC VIBRATOR ELEMENT, PIEZOELECTRIC VIBRATOR, OSCILLATOR, AND METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR ELEMENT 有权
公开(公告)号：US20220173717A1
公开(公告)日：2022-06-02
申请号：US17534913
申请日：2021-11-24
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI , Motoki SHIBUYA , Chisato OJIMA , Tomohiro MOMOSE
IPC分类号： H03H9/19 , H03H3/04 , H03H9/05 , H03H9/10 , H03H9/13 , H03B5/32
摘要： There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.

3. 发明申请

US20160344362A1 METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR ELEMENT, PIEZOELECTRIC VIBRATOR ELEMENT, AND PIEZOELECTRIC VIBRATOR 审中-公开
标题翻译：制造压电振动元件，压电振动元件和压电振动器的方法
公开(公告)号：US20160344362A1
公开(公告)日：2016-11-24
申请号：US15156905
申请日：2016-05-17
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H03H3/04 , H03H9/17
CPC分类号： H03H3/04 , H03H9/21 , H03H2003/0428
摘要： A method of manufacturing a piezoelectric vibrator element, a piezoelectric vibrator element, and a piezoelectric vibrator, superior in vibration characteristics, high in quality, and capable of suppressing a variation in frequency after a frequency adjustment, are provided. The method includes a first frequency adjustment step of performing ion milling on a weight metal film for a frequency adjustment formed on a surface of a tip part in each of a pair of vibrating arm parts, and a second frequency adjustment step of performing ion milling on the weight metal film at a lower etch rate than in the first frequency adjustment step after the first frequency adjustment step.
摘要翻译：提供了振动特性好，质量好，能够抑制频率调整后的频率变动的压电振动元件，压电振动元件和压电振动器的制造方法。该方法包括：第一频率调整步骤，在一对振动臂部分中的每一个中在尖端部分的表面上形成的频率调整的重量金属膜上进行离子铣削;以及第二频率调节步骤，所述重量金属膜的蚀刻速率低于所述第一频率调节步骤之后的所述第一频率调节步骤中的重量。

4. 发明申请

US20160190426A1 PIEZOELECTRIC VIBRATOR AND METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR 有权
标题翻译：压电振动器及制造压电振动器的方法
公开(公告)号：US20160190426A1
公开(公告)日：2016-06-30
申请号：US14976893
申请日：2015-12-21
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/053 , H03H9/21
CPC分类号： H03H9/21 , H03H9/0509
摘要： A piezoelectric vibrator has a piezoelectric vibrating reed mounted on an upper layer base substrate through a conductive adhesive, in which the piezoelectric vibrating reed includes a first vibrating arm and a second vibrating arm extending along a first direction and arranged side by side in a second direction, a base supporting the first vibrating arm and the second vibrating arm and a first support arm and a second support arm positioned in the outer side of the first vibrating arm and the second vibrating arm in the second direction and bonded to the upper layer base substrate, in which an extrusion amount of the conductive adhesive in the inner side of the first support arm and the second support arm is smaller than an extrusion amount of the conductive adhesive in the outer side of the first support arm and the second support arm.
摘要翻译：压电振子具有通过导电粘合剂安装在上层基底基板上的压电振动片，其中压电振动片包括沿着第一方向延伸的第一振动臂和第二振动臂，并沿第二方向并排布置，支撑所述第一振动臂和所述第二振动臂的基座以及位于所述第一振动臂和所述第二振动臂的外侧的第二支撑臂和第二支撑臂，所述第二支撑臂和所述第二支撑臂接合到所述上层基底基板其中第一支撑臂和第二支撑臂的内侧中的导电粘合剂的挤出量小于第一支撑臂和第二支撑臂的外侧中的导电粘合剂的挤出量。

5. 发明申请

US20150255701A1 PIEZOELECTRIC VIBRATING PIECE AND PIEZOELECTRIC VIBRATOR 有权
标题翻译：压电振动片和压电振动器
公开(公告)号：US20150255701A1
公开(公告)日：2015-09-10
申请号：US14639775
申请日：2015-03-05
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/053
CPC分类号： H01L41/053 , H03H9/02133 , H03H9/02149 , H03H9/1021 , H03H9/13 , H03H9/21 , H03H9/215
摘要： To increase the strength of mounting at the time of mounting a piezoelectric vibrating piece on a package. In a piezoelectric vibrating piece having a pair of support arm portions which are provided with mount electrodes outside a pair of vibrating arm portions, concave portions to which a conductive adhesive used for mounting to the package can penetrate are formed in side end surfaces on the inner sides in a width direction of the respective support arm portions near the mount electrodes.
摘要翻译：为了增加将压电振动片安装在包装上时的安装强度。在具有一对支撑臂部分的压电振动片中，在一对振动臂部分之外设置有安装电极，在内侧的侧端面形成有用于安装到封装的导电性粘合剂可以穿透的凹部在安装电极附近的各个支撑臂部分的宽度方向上。

6. 发明申请

US20140077663A1 PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO TIMEPIECE 有权
标题翻译：压电振动器，振荡器，电子设备和无线电时钟
公开(公告)号：US20140077663A1
公开(公告)日：2014-03-20
申请号：US14024874
申请日：2013-09-12
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/08 , H01L41/053
CPC分类号： H01L41/08 , H01L41/053 , H03H9/1021
摘要： A piezoelectric vibrator including a package having a base member, a lid member forming a cavity with respect to the base member, and a piezoelectric vibrating piece mounted on a mount surface and housed inside the cavity, in which the piezoelectric vibrating piece has a pair of vibrating arm portions and a base portion cantilever-supporting base end portions of the pair of vibrating arm portions and being mounted on the mount surface, a concave portion for avoiding contact with respect to tip portions when the vibrating arm portions are displaced in a thickness direction is formed on the mount surface, contact portions contacted by main surfaces of the vibrating arm portions facing the mount surface, and clearance portions for avoiding contact with at least one edge-line portion of two edge-line portions where the main surface intersects with two side surfaces.
摘要翻译：一种压电振动器，包括具有基座部件的封装，相对于基座部件形成空腔的盖部件和安装在安装面上并容纳在所述空腔内的压电振动片，所述压电振动片具有一对所述振动臂部和所述一对振动臂部的基部悬臂支撑基端部安装在所述安装面上，当所述振动臂部在厚度方向上位移时，用于避免与所述尖端部接触的凹部形成在安装表面上，与振动臂部分的主表面接触的接触部分面向安装表面，以及间隙部分，用于避免与主表面与两个边缘线相交的两个边缘线部分的至少一个边缘线部分接触侧面。

7. 发明申请

US20170179366A1 PIEZOELECTRIC VIBRATOR 有权
公开(公告)号：US20170179366A1
公开(公告)日：2017-06-22
申请号：US15380251
申请日：2016-12-15
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/053 , H01L41/09 , H01L41/047
CPC分类号： H01L41/0533 , H01L41/047 , H01L41/094 , H03H9/1021 , H03H9/21
摘要： A piezoelectric vibrator element is more stably bonded to reduce the displacement with respect to an external force. The piezoelectric vibrator element is provided with a pair of vibrating arm parts extending from a base, and support arm parts extending from the base on both outer sides of the vibrating arm parts in parallel thereto. Further, the piezoelectric vibrator element is bonded on a mounting part in the package with the pair of support arm parts to thereby be fixedly held. Two or more bonding regions of each of the support arm parts are disposed in the longitudinal direction. In the longitudinal direction, the bonding region on the base side is disposed on the base side of the centroid of the piezoelectric vibrator element. Thus, the length from the bonding point to the tip of the vibrating arm part can be shortened, and the displacement at the tip of the vibrating arm part can be reduced with respect to an impact from the outside. On the other hand, in order to suppress the vibration leakage from the vibrating arm part, the bonding region located on the base side is disposed on the centroid side of a connection part between the base and the support arm part.

8. 发明申请

US20160268996A1 PIEZOELECTRIC VIBRATING PIECE AND PIEZOELECTRIC VIBRATOR 有权
标题翻译：压电振动片和压电振动器
公开(公告)号：US20160268996A1
公开(公告)日：2016-09-15
申请号：US15041558
申请日：2016-02-11
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI , Naoya ICHIMURA
IPC分类号： H03H9/21 , H01L41/053 , G04C3/12
CPC分类号： H03H9/21 , G04C3/12 , H03H9/1014
摘要： A pair of vibrating arm portions are disposed lined up in a second direction perpendicular to a first direction and are configured such that base end sides thereof in the first direction are fixed to a base portion. A pair of inclined surfaces are formed on both sides in the second direction on the base end side of the vibrating arm portion so that a width of the vibrating arm portion in the second direction is gradually widened from the distal end side to the base end side. A length of a region, having the pair of inclined surfaces formed therein, in the first direction is set to equal to or greater than 0.25 times and equal to or less than 0.5 times of a total length of the vibrating arm portion from the base end to the distal end.
摘要翻译：一对振动臂部在与第一方向垂直的第二方向上排列成排列，并且构造成使得其在第一方向上的基端侧固定到基部。在振动臂部的基端侧的第二方向的两侧形成有一对倾斜面，使得振动臂部在第二方向上的宽度从前端侧到基端侧逐渐变宽。在第一方向上形成有一对倾斜面的区域的长度被设定为等于或大于振动臂部从基端的总长度的0.25倍和等于或小于0.5倍的长度到远端。

9. 发明申请

US20140111065A1 PIEZOELECTRIC VIBRATING STRIP, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO TIMEPIECE 有权
标题翻译：压电振动条，压电振动器，振荡器，电子设备和无线电时钟
公开(公告)号：US20140111065A1
公开(公告)日：2014-04-24
申请号：US14055331
申请日：2013-10-16
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , H03H9/02157 , H03H9/1021
摘要： A piezoelectric vibrating strip includes a pair of vibrating arm portions in parallel with a central axis therebetween, and a base portion integrally cantilevering base end portions of the pair of vibrating arm portions in a length direction. Each of the pair of vibrating arm portions has a first groove portion and a second groove portion in a main face, the first groove portion being placed closer to a leading end portion in the length direction of the vibrating arm portions and having a groove width along a width direction orthogonal to the length direction and a thickness direction of the vibrating arm portion. The second groove portion is closer to the base end portion than the first groove portion and has a groove width along the width direction. The groove width ratio of the second groove portion to the first groove portion is between 0.4 and 1.0.
摘要翻译：压电振动片包括与它们之间的中心轴线平行的一对振动臂部分，以及在一对振动臂部分的长度方向上整体地悬置基部端部的基部。所述一对振动臂部中的每一个在主面上具有第一槽部和第二槽部，所述第一槽部在所述振动臂部的长度方向上靠近前端部配置，并且沿着与长度方向正交的宽度方向和振动臂部的厚度方向。第二槽部比第一槽部更靠近基端部，并且沿宽度方向具有槽宽。第二槽部与第一槽部的槽宽比为0.4〜1.0。

10. 发明申请

US20140078870A1 PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO TIMEPIECE 有权
标题翻译：压电振动片，压电振动器，振荡器，电子装置和无线电时钟
公开(公告)号：US20140078870A1
公开(公告)日：2014-03-20
申请号：US14024857
申请日：2013-09-12
申请人： SII Crystal Technology Inc.
发明人： Takashi KOBAYASHI
IPC分类号： H01L41/09 , G04R60/00
CPC分类号： H01L41/09 , G04C3/12 , G04R20/10 , G04R60/00 , H03H9/1021 , H03H9/215 , H03H2003/026
摘要： A piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus and a radio timepiece capable of reducing the size while suppressing reduction of rigidity and having excellent vibration characteristics. The piezoelectric vibrating piece includes a pair of vibrating arm portions in parallel to each other, a base portion integrally fixing base end portions of the pair of vibrating arm portions in a length direction, groove portions on main surfaces of the pair of vibrating arm portions and extending along the length direction, where each of the groove portions includes a first groove portion near a tip portion end of the vibrating arm portions and a second groove portion near the base end portion side of the vibrating arm portions with respect to the first groove portion, and the second groove portion is offset in a −X axis direction with respect to the first groove portion.
摘要翻译：压电振动片，压电振动器，振荡器，电子设备和无线电钟表，能够在抑制刚度降低并且具有优异的振动特性的同时减小尺寸。压电振动片包括彼此平行的一对振动臂部，将一对振动臂部的基端部沿长度方向整体固定的基部，一对振动臂部的主表面上的槽部，沿长度方向延伸，其中每个凹槽部分包括在振动臂部分的尖端部分附近的第一凹槽部分和相对于第一凹槽部分在振动臂部分的基端部侧附近的第二凹槽部分并且第二槽部相对于第一槽部在-X轴方向上偏移。

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