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1. 发明申请

US20230052149A1 Equipment For Manufacturing Light-Emitting Device and Light-Receiving Device 有权
公开(公告)号：US20230052149A1
公开(公告)日：2023-02-16
申请号：US17872498
申请日：2022-07-25
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Shunpei Yamazaki , Yasuhiro Jinbo , Tomoya Aoyama , Daiki Nakamura
IPC分类号： H01L51/56
摘要： Manufacturing equipment with which steps from processing to sealing of an organic compound film can be continuously performed is provided. The manufacturing equipment enables continuous processing of a patterning step of a light-emitting device and a light-receiving device and a step of sealing top and side surfaces of organic layers to prevent the top and side surfaces from being exposed to the air, which allows formation of the light-emitting device and the light-receiving device each of which has a minute structure, high luminous, and high reliability. This manufacturing equipment can be built in an in-line manufacturing system where apparatuses are arranged according to the order of process steps for the light-emitting device and the light-receiving device, resulting in high throughput manufacturing.

2. 发明授权

US10976872B2 Display panel, input/output device, data processing device, and method for manufacturing display panel 有权
公开(公告)号：US10976872B2
公开(公告)日：2021-04-13
申请号：US16517806
申请日：2019-07-22
申请人： SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人： Yasuhiro Jinbo , Shingo Eguchi , Hisao Ikeda , Tetsuji Ishitani , Taisuke Kamada
IPC分类号： H01L21/00 , G06F3/044 , G09G3/36
摘要： To provide a novel display panel that is highly convenient or reliable. To provide a novel input and output device that is highly convenient or reliable. To provide a novel data processing device that is highly convenient or reliable. To provide a method for manufacturing a novel display panel that is highly convenient or reliable. The display panel includes a pixel, a third conductive film electrically connected to the pixel, an insulating film including an opening portion overlapping with the third conductive film, and an electrode including a first region in contact with the third conductive film and a second region functioning as a contact point.

3. 发明授权

US10141544B2 Electroluminescent display device and manufacturing method thereof 有权
公开(公告)号：US10141544B2
公开(公告)日：2018-11-27
申请号：US15670318
申请日：2017-08-07
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Kazuki Tsuda , Kohei Yokoyama , Yasuhiro Jinbo
IPC分类号： H01L51/56 , G02F1/1368 , H01L27/12 , H01L51/52 , H01L29/66 , H01L27/32
摘要： A highly reliable display device or electronic device is provided. The display device includes a first electrode, a second electrode, a light-emitting layer between the first electrode and the second electrode, and a protective film over the second electrode. The protective film includes a first insulating film and a second insulating film over the first insulating film. The first insulating film includes one or more of aluminum oxide, hafnium oxide, and zirconium oxide, and the second insulating film includes one or more of aluminum oxide, hafnium oxide, and zirconium oxide. A composition of the first insulating film is different from a composition of the second insulating film. A water vapor transmission rate of the protective film is lower than 1×10−2 g/(m2·day).

4. 发明授权

US09909725B2 Flexible light-emitting device 有权
公开(公告)号：US09909725B2
公开(公告)日：2018-03-06
申请号：US14618131
申请日：2015-02-10
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Tomoya Aoyama , Yasuhiro Jinbo , Yoshiharu Hirakata , Shunpei Yamazaki
IPC分类号： F21V21/14 , F21L4/00 , F21S4/22 , H05B37/02 , F21V15/015 , F21W121/00 , F21Y105/00 , F21Y115/10 , F21Y115/20 , F21Y107/40
CPC分类号： F21L4/00 , F21S4/22 , F21V15/015 , F21V21/145 , F21W2121/00 , F21Y2105/00 , F21Y2107/40 , F21Y2115/10 , F21Y2115/20 , H05B37/0272
摘要： An object of this invention is to provide a highly portable light-emitting device or a highly browsable light-emitting device. The light-emitting device includes a joint portion, and a plurality of light-emitting units apart from each other with the joint portion positioned therebetween. The joint portion and the light-emitting units are flexible. The joint portion can be bent to a curvature radius smaller than a curvature radius to which the light-emitting unit can be bent. The light-emitting unit is supplied with a signal through a side not adjacent to the joint portion or is supplied with a signal by wireless communication.

5. 发明申请

US20170107606A1 Film Formation Apparatus, Method for Forming Film, Method for Forming Multilayer Film or Light-Emitting Element, and Method for Cleaning Shadow Mask 审中-公开
公开(公告)号：US20170107606A1
公开(公告)日：2017-04-20
申请号：US15395345
申请日：2016-12-30
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Yasuhiro Jinbo , Shingo Eguchi , Shunpei Yamazaki
IPC分类号： C23C14/24 , H01J37/32 , C23C14/12 , C23C14/58 , H01L51/56 , C23C14/04
CPC分类号： C23C14/24 , C23C14/042 , C23C14/12 , C23C14/562 , C23C14/568 , C23C14/5873 , H01J37/32568 , H01J37/32834 , H01J2237/332 , H01J2237/335 , H01L21/67 , H01L27/1266 , H01L51/001 , H01L51/0058 , H01L51/0072 , H01L51/50 , H01L51/56
摘要： The inventors have reached the idea of a film formation apparatus including a film formation chamber, a removal chamber, two sluice valves provided apart from each other between the film formation chamber and the removal chamber, and a shadow mask transfer mechanism. The film formation chamber includes an evaporation source, and the removal chamber includes a parallel plate plasma source and a shadow mask stage. The film formation apparatus has a film formation mode in which a shadow mask overlapped with an object is transferred by the shadow mask transfer mechanism and a film is formed on the object; and a cleaning mode in which the shadow mask is irradiated with plasma by the plasma source, the shadow mask being held between an upper electrode and a lower electrode by the shadow mask stage.

6. 发明授权

US09578718B2 Method for manufacturing light-emitting element and deposition apparatus 有权
标题翻译：发光元件和沉积设备的制造方法
公开(公告)号：US09578718B2
公开(公告)日：2017-02-21
申请号：US13870246
申请日：2013-04-25
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Kohei Yokoyama , Hisao Ikeda , Shinichi Hirasa , Yasuhiro Jinbo , Natsuko Takase
IPC分类号： H05B33/10 , C23C14/24 , C23C14/54 , C23C14/56 , H01L51/00 , H01L51/56
CPC分类号： C23C14/24 , A63F13/327 , C23C14/54 , C23C14/564 , F21S6/002 , F21Y2115/20 , H01J49/004 , H01J49/42 , H01L51/001 , H01L51/56 , H05B33/10
摘要： In order to provide a highly reliable organic EL element, a first step in which a deposition material is heated and vaporized in a deposition chamber in which the pressure is reduced and a second step in which a layer included in an EL layer is deposited in the deposition chamber are performed while exhaustion is performed and the partial pressure of water in the deposition chamber is measured with a mass spectrometer. Alternatively, the deposition chamber in the deposition apparatus includes a deposition material chamber and is connected to an exhaust mechanism. The deposition material chamber is separated from the deposition chamber by a sluice valve, includes a deposition material holding portion including a heating mechanism, and is connected to a mass spectrometer and an exhaust mechanism.
摘要翻译：为了提供高可靠性的有机EL元件，在沉积材料在压力降低的沉积室中被加热和蒸发的第一步骤和其中包含在EL层中的层沉积在第二步骤中的第二步骤在进行耗尽的同时进行沉积室，并且用质谱仪测量沉积室中的水分压。或者，沉积设备中的沉积室包括沉积材料室并连接到排气机构。沉积材料室通过闸阀与沉积室分离，包括具有加热机构的沉积材料保持部分，并连接到质谱仪和排气机构。

7. 发明授权

US09229481B2 Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：US09229481B2
公开(公告)日：2016-01-05
申请号：US14570471
申请日：2014-12-15
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Yasuhiro Jinbo
IPC分类号： H01J1/62 , G06F1/16 , H01L27/32 , H01L51/00
CPC分类号： G06F1/1652 , G06F1/1601 , G06F1/1677 , G06F1/3265 , G09F9/301 , H01L27/323 , H01L27/3244 , H01L51/0097 , H01L51/524 , H01L2251/5338 , H04M1/0268 , Y02D10/153 , Y02E10/549
摘要： A highly portable semiconductor device and the like providing improved browsability of display. Provided is a semiconductor device including a flexible display panel, a first housing supporting a first region of the display panel, a second housing supporting a second region of the display panel, and a flexible base material firmly attached to the first housing. The display panel can be deformed into an open position where the first and second regions are substantially on the same plane or into a folded position where the first and second regions overlap with each other. The second housing includes a groove portion where the flexible base material can partly slide. Part of the flexible base material is inserted into the groove portion in the open position. The part of the flexible base material which is inserted into the groove portion is at least partly withdrawn in a deformation into the folded position.
摘要翻译：高度便携的半导体装置等提供显示器的改进的可浏览性。提供了一种半导体器件，其包括柔性显示面板，支撑显示面板的第一区域的第一壳体，支撑显示面板的第二区域的第二壳体和牢固地附接到第一壳体的柔性基底材料。显示面板可以变形成打开位置，其中第一和第二区域基本上在相同的平面上或第一和第二区域彼此重叠的折叠位置。第二壳体包括其中柔性基底材料可以部分滑动的凹槽部分。柔性基材的一部分在打开位置插入凹槽部分。被插入到槽部中的柔性基材的部分至少部分地以变形的方式被退回到折叠位置。

8. 发明授权

US08951878B2 Method for manufacturing SOI substrate and semiconductor device 有权
标题翻译：制造SOI衬底和半导体器件的方法
公开(公告)号：US08951878B2
公开(公告)日：2015-02-10
申请号：US14097793
申请日：2013-12-05
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Yasuhiro Jinbo , Hironobu Shoji , Hideto Ohnuma , Shunpei Yamazaki
IPC分类号： H01L21/331 , H01L21/8222 , H01L21/84 , H01L21/265 , H01L21/762
CPC分类号： H01L21/84 , H01L21/26506 , H01L21/76254
摘要： It is an object of the present invention to provide a method for manufacturing an SOI substrate having an SOI layer that can be used in practical applications with high yield even when a flexible substrate such as a glass substrate or a plastic substrate is used. Further, it is another object of the present invention to provide a method for manufacturing a thin semiconductor device using such an SOI substrate with high yield. When a single-crystal semiconductor substrate is bonded to a flexible substrate having an insulating surface and the single-crystal semiconductor substrate is separated to manufacture an SOI substrate, one or both of bonding surfaces are activated, and then the flexible substrate having an insulating surface and the single-crystal semiconductor substrate are attached to each other.
摘要翻译：本发明的目的是提供一种制造具有SOI层的SOI衬底的方法，该SOI衬底即使在使用诸如玻璃衬底或塑料衬底的柔性衬底时，也可以在实际应用中以高产率使用。此外，本发明的另一个目的是提供一种以高产率制造使用这种SOI衬底的薄半导体器件的方法。当将单晶半导体衬底接合到具有绝缘表面的柔性衬底并且分离单晶半导体衬底以制造SOI衬底时，一个或两个键合表面被激活，然后柔性衬底具有绝缘表面并且单晶半导体衬底彼此附接。

9. 发明授权

US11600489B2 Semiconductor device and method for manufacturing the semiconductor device 有权
公开(公告)号：US11600489B2
公开(公告)日：2023-03-07
申请号：US16972413
申请日：2019-05-31
申请人： SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人： Shunpei Yamazaki , Tetsuya Kakehata , Yuji Egi , Yasuhiro Jinbo , Yujiro Sakurada
IPC分类号： H01L21/02 , H01L29/786 , H01L29/51 , H01L21/8234
摘要： A semiconductor device having favorable electrical characteristics is provided. A metal oxide is formed over a substrate by the steps of: introducing a first precursor into a chamber in which the substrate is provided; introducing a first oxidizer after the introduction of the first precursor; introducing a second precursor after the introduction of the first oxidizer; and introducing a second oxidizer after the introduction of the second precursor.

10. 发明授权

US11516927B2 Light-emitting device 有权
公开(公告)号：US11516927B2
公开(公告)日：2022-11-29
申请号：US17569631
申请日：2022-01-06
申请人： Semiconductor Energy Laboratory Co., Ltd.
发明人： Yoshiharu Hirakata , Yasuhiro Jinbo , Shunpei Yamazaki
IPC分类号： H05K5/00 , H01L51/00 , H01L51/52 , G09F9/30 , G06F1/16 , H01F1/147 , H01L27/32
摘要： A light-emitting device can be folded in such a manner that a flexible light-emitting panel is supported by a plurality of housings which are provided spaced from each other and the light-emitting panel is bent so that surfaces of adjacent housings are in contact with each other. Furthermore, in the light-emitting device, in which part or the whole of the housings have magnetism, the two adjacent housings can be fixed to each other by a magnetic force when the light-emitting device is used in a folded state.

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