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1. 发明申请

US20200303618A1 MEMS DEVICE AND ELECTRONIC DEVICE 审中-公开
公开(公告)号：US20200303618A1
公开(公告)日：2020-09-24
申请号：US16823449
申请日：2020-03-19
申请人： SEIKO EPSON CORPORATION
发明人： Chikara KOJIMA , Eiji OSAWA , Koji OHASHI , Kanechika KIYOSE , Tomohiro SAYAMA , Hironori SUZUKI , Katsuhiro IMAI , Yasuyuki MATSUMOTO , Takahiro KAMIJO
IPC分类号： H01L41/053 , B06B1/02 , B06B1/06 , B81B7/00 , H01L41/04 , H01L41/08
摘要： An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.

2. 发明申请

US20130194353A1 LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS 有权
公开(公告)号：US20130194353A1
公开(公告)日：2013-08-01
申请号：US13755342
申请日：2013-01-31
申请人： Seiko Epson Corporation
发明人： Eiju HIRAI , Shiro YAZAKI , Koji SUMI , Motoki TAKABE , Jiro KATO , Hiroshi ITO , Toshihiro SHIMIZU , Takahiro KAMIJO , Tatsuro TORIMOTO , Chikara KOJIMA
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/045 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14258 , B41J2002/14491 , H01L41/0471 , H01L41/0805
摘要： A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.

3. 发明申请

US20220063102A1 Robot Control Device And Robot System 有权
公开(公告)号：US20220063102A1
公开(公告)日：2022-03-03
申请号：US17463616
申请日：2021-09-01
申请人： Seiko Epson Corporation
发明人： Daisuke HIGASHI , Takahiro KAMIJO , Tomonori YAMADA , Motoki ITO
IPC分类号： B25J9/16
摘要： A robot control device that controls operation of a robot including a robot arm, a driving section configured to drive the robot arm, and a driving control section configured to receive electric power supplied to the driving section and output power to the driving section based on an input control signal, the robot control device including a logical operation circuit configured to perform a logical operation about a stop signal and output an operation result and a power interruption circuit configured to interrupt, based on the operation result, the electric power supplied to the driving control section or the control signal input to the driving control section to thereby interrupt the power of the driving section.

4. 发明申请

US20160263886A1 MEMS DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS 有权
标题翻译： MEMS器件，液体喷射头和液体喷射装置
公开(公告)号：US20160263886A1
公开(公告)日：2016-09-15
申请号：US15049458
申请日：2016-02-22
申请人： SEIKO EPSON CORPORATION
发明人： Takeshi YASOSHIMA , Takahiro KAMIJO , Koji ARUGA , Masanori MIKOSHIBA
IPC分类号： B41J2/14
CPC分类号： B41J2/14 , B41J2/14233 , B41J2002/14362 , B41J2002/14491
摘要： A MEMS device includes a protective substrate on which is mounted a driving circuit that drives a piezoelectric actuator and on which is formed an interconnect pattern electrically connected to the driving circuit, and a sealing substrate that includes a first opening and that is bonded to the protective substrate using an adhesive so that part of the interconnect pattern is located between the protective substrate and the sealing substrate. The interconnect pattern includes a connection portion that extends from a bonding region where the protective substrate and the sealing substrate are bonded by the adhesive to the first opening, and that has a connection region electrically connected to the driving circuit. A groove is formed in the connection portion between the connection region and a border between the bonding region and the connection portion.
摘要翻译： MEMS器件包括保护基板，其上安装有驱动电路，驱动电路驱动压电致动器并且其上形成有电连接到驱动电路的互连图案;以及密封基板，其包括第一开口并且被结合到保护使用粘合剂使得互连图案的一部分位于保护基板和密封基板之间。互连图案包括从保护基板和密封基板通过粘合剂粘合到第一开口的接合区域延伸的连接部分，并且具有电连接到驱动电路的连接区域。在连接区域和接合区域和连接部分之间的边界处的连接部分中形成凹槽。

5. 发明申请

US20210094172A1 Mobile Robot 有权
公开(公告)号：US20210094172A1
公开(公告)日：2021-04-01
申请号：US17034317
申请日：2020-09-28
申请人： Seiko Epson Corporation
发明人： Takahiro KAMIJO
IPC分类号： B25J9/12 , B25J9/06 , B25J13/08
摘要： A mobile robot includes a vehicle having a secondary cell that outputs a first voltage, a first motor driven by the first voltage, and a first circuit that supplies electric power of the secondary cell to the first motor, a robot having a robot arm, a second motor that drives the arm by a second voltage different from the first voltage, and a second circuit that supplies the electric power of the secondary cell to the second motor and supplies regeneration power of the second motor to the secondary cell, and coupled to the vehicle, wherein the second circuit has a voltage conversion unit that mutually converts the first voltage and the second voltage.

6. 发明申请

US20180277738A1 Piezoelectric Element, Piezoelectric Device, Ultrasonic Probe And Electronic Apparatus 审中-公开
公开(公告)号：US20180277738A1
公开(公告)日：2018-09-27
申请号：US15935539
申请日：2018-03-26
申请人： Seiko Epson Corporation
发明人： Koji OHASHI , Takahiro KAMIJO , Katsuhiro IMAI , Takumi YAMAOKA , Chikara KOJIMA
IPC分类号： H01L41/047 , H01L41/053 , H01L41/187 , H01L41/09 , H01L41/29 , B06B1/02 , B06B1/06 , G01N29/24 , A61B8/12 , A61B8/06
CPC分类号： H01L41/0475 , A61B8/06 , A61B8/12 , B06B1/0215 , B06B1/0622 , B06B1/067 , B06B2201/76 , B41J2/14201 , G01N29/245 , H01L41/047 , H01L41/0477 , H01L41/0533 , H01L41/09 , H01L41/0973 , H01L41/1876 , H01L41/29
摘要： A piezoelectric element has a first electrode layer, a piezoelectric layer on the first electrode layer, a second electrode layer on the piezoelectric layer, a third electrode layer on part of the second electrode layer and including third metal, and an insulating layer covering at least a part of the piezoelectric layer not provided with the second electrode layer and having an aperture exposing a part of the second electrode layer. The second electrode layer has a first layer including first metal and a second layer including second metal on the first layer. The second layer is exposed in the aperture. A difference in standard redox potential between the second metal and the third metal is smaller than a difference in standard redox potential between the first metal and the third metal.

7. 发明申请

US20150085024A1 LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS 审中-公开
标题翻译：液体喷射头和液体喷射装置
公开(公告)号：US20150085024A1
公开(公告)日：2015-03-26
申请号：US14565942
申请日：2014-12-10
申请人： Seiko Epson Corporation
发明人： Eiju HIRAI , Shiro YAZAKI , Koji SUMI , Motoki TAKABE , Jiro KATO , Hiroshi ITO , Toshihiro SHIMIZU , Takahiro KAMIJO , Tatsuro TORIMOTO , Chikara KOJIMA
IPC分类号： B41J2/14 , H01L41/08
CPC分类号： B41J2/14233 , B41J2/045 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14258 , B41J2002/14491 , H01L41/0471 , H01L41/0805
摘要： A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.
摘要翻译：液体喷射头包括形成有与喷嘴开口连通的压力发生室的基板; 以及压电元件，其具有压电层，第一电极，其形成在所述基板的一侧的所述压电层的表面上，以对应于所述压力产生室;以及第二电极，形成在所述压电层的表面上压电层，其与形成有第一电极的一侧相对，以便在多个压力发生室上延伸，其中第二电极形成为在压力产生的纵向方向上延伸到压力发生室的外部房间。

8. 发明申请

US20150052715A1 METHODS OF MANUFACTURING PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND ULTRASONIC TRANSDUCER 有权
标题翻译：制造压电元件，液体喷射头和超声波传感器的方法
公开(公告)号：US20150052715A1
公开(公告)日：2015-02-26
申请号：US14462968
申请日：2014-08-19
申请人： SEIKO EPSON CORPORATION
发明人： Motoki TAKABE , Takahiro KAMIJO , Tatsuro TORIMOTO , Toshihiro SHIMIZU , Shiro YAZAKI
IPC分类号： B41J2/16
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , H01L41/0805 , H01L41/0973 , H01L41/332 , Y10T29/42
摘要： A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer.
摘要翻译：一种制造压电元件的方法包括：通过在压电层的一个表面上形成可氧化金属层，形成压电层的一个表面上的凹凸的第一电极，压电层和第二电极; 通过热氧化聚集金属层; 并对在压电层的一个表面上聚集的金属层进行各向同性蚀刻。

9. 发明申请

US20200168784A1 PIEZOELECTRIC DEVICE AND ELECTRONIC APPARATUS 审中-公开
公开(公告)号：US20200168784A1
公开(公告)日：2020-05-28
申请号：US16690553
申请日：2019-11-21
申请人： SEIKO EPSON CORPORATION
发明人： Chikara KOJIMA , Koji OHASHI , Hironori SUZUKI , Kanechika KIYOSE , Katsuhiro IMAI , Yasuyuki MATSUMOTO , Takahiro KAMIJO
IPC分类号： H01L41/047 , B06B1/02 , B06B1/06 , H01L41/04 , H01L41/08
摘要： A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.

10. 发明申请

US20170305156A1 LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND PIEZOELECTRIC ELEMENT 审中-公开
公开(公告)号：US20170305156A1
公开(公告)日：2017-10-26
申请号：US15643704
申请日：2017-07-07
申请人： Seiko Epson Corporation
发明人： Shiro YAZAKI , Takahiro KAMIJO , Tatsuro TORIMOTO , Motoki TAKABE
IPC分类号： B41J2/14 , H01L41/277 , H01L41/23 , H01L41/09 , H01L41/047 , H01L41/053 , B41J2/16 , H01L41/293 , H01L41/083
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14491 , H01L41/0472 , H01L41/0533 , H01L41/083 , H01L41/09 , H01L41/0973 , H01L41/23 , H01L41/277 , H01L41/293
摘要： A piezoelectric element includes a plurality of individual electrodes, a piezoelectric layer formed on each of individual electrodes, and a common electrode which is formed on the piezoelectric layer and is an electrode common to the individual electrodes. Further, a protection film covering a region, which is not covered by the common electrode on the individual electrode, is provided.

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