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1. 发明授权

US10421218B2 Roller-type depressing device, imprinting device, and roller-type depressing method 有权
公开(公告)号：US10421218B2
公开(公告)日：2019-09-24
申请号：US14891429
申请日：2015-06-03
申请人： SCIVAX CORPORATION
发明人： Hirosuke Kawaguchi , Yutaka Taniguchi , Yukimasa Saito , Masaki Sugiyama , Daisuke Matono , Satoru Tanaka
IPC分类号： B29C59/04 , B29C43/36 , B29C59/02 , H01L21/027 , B29C59/00 , B29L11/00
摘要： A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.

2. 发明申请

US20170072620A1 ROLLER-TYPE DEPRESSING DEVICE, IMPRINTING DEVICE, AND ROLLER-TYPE DEPRESSING METHOD 有权
标题翻译：滚筒式破碎装置，加压装置和滚筒式破碎方法
公开(公告)号：US20170072620A1
公开(公告)日：2017-03-16
申请号：US14891429
申请日：2015-06-03
申请人： SCIVAX CORPORATION
发明人： Hirosuke Kawaguchi , Yutaka Taniguchi , Yukimasa Saito , Masaki Sugiyama , Daisuke Matono
IPC分类号： B29C59/02 , B29C59/04 , B29C59/00
摘要： A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.
摘要翻译：能够抑制主辊的不均匀的弹性变形并且也能够均匀地压下物体的辊式按压装置，压印装置和辊式按压方法。滚筒式按压装置按压物体，并且包括至少具有由弹性材料形成的表面并且按压物体的主辊，相对于物体移动主辊的辊移动单元，调节压力通过主辊施加到物体上，压力接收台通过物体接收来自主辊的压力，中间辊至少具有由弹性材料具有较大弹性模量的材料形成的表面，并且支撑主体辊，以及在轴向上比主辊和中间辊更短的支撑辊，并支撑中间辊。

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