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    • 5. 发明申请
    • VARIABLE RESISTANCE MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
    • 可变电阻存储器件及其制造方法
    • US20150340610A1
    • 2015-11-26
    • US14607121
    • 2015-01-28
    • SAMSUNG ELECTRONICS CO., LTD.
    • SEUNG-JAE JUNGYOUN-SEON KANG
    • H01L45/00H01L27/24
    • H01L45/1293H01L27/2463H01L45/06H01L45/1233H01L45/141H01L45/1675
    • A variable resistance memory device includes first conductive lines extending in a first direction, second conductive lines over the first conductive lines, which extend in a second direction not parallel to the first direction, memory cells including a variable resistance element, each of which is formed at an intersection of the first and second conductive lines, first insulation layer patterns extending in the first direction between the memory cells, second insulation layer patterns extending in the second direction between the memory cells, first thermal barrier layer patterns extending in the first direction, which is spaced apart from the memory cells in the second direction between the first insulation layer patterns, and second thermal barrier layer patterns extending in the second direction, which is spaced apart from the memory cells in the first direction between the second insulation layer patterns.
    • 可变电阻存储器件包括沿第一方向延伸的第一导线,在第一导线上方的第二导线,其沿与第一方向不平行的第二方向延伸,存储单元包括可变电阻元件, 在第一和第二导线的交叉点处,在存储单元之间沿第一方向延伸的第一绝缘层图案,在存储单元之间沿第二方向延伸的第二绝缘层图案,沿第一方向延伸的第一热障层图案, 其在第一绝缘层图案之间的第二方向上与存储单元间隔开,并且在第二绝缘层图案之间沿第一方向与存储单元间隔开的第二方向延伸的第二热障层图案。