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    • 8. 发明授权
    • Method of manufacturing wire grid polarizer
    • 制造线栅偏振器的方法
    • US09268075B1
    • 2016-02-23
    • US14678506
    • 2015-04-03
    • Samsung Display Co. Ltd.
    • Dae Ho YoonSeung Won ParkMoon Gyu LeeTae Woo KimLei Xie
    • G02B5/30G02B5/18
    • G02B5/3058G02B5/1809G02B5/30G02B5/3075G03F7/0002
    • Provided is a method of manufacturing a wire gird polarizer. The method includes sequentially stacking a conductive wire layer and a first neutral layer, forming guide patterns, reducing widths of the guide patterns and patterning the first neutral layer, forming a second neutral layer, applying a first block copolymer, arranging the first block copolymer as a first monomer block and a second monomer block, removing one of the first monomer block and the second monomer block, removing the second neutral layer exposed, removing the remaining monomer block and the guide patterns, applying a second block copolymer, arranging the second block copolymer as a third monomer block and a fourth monomer block, removing one of the third monomer block and the fourth monomer block, and patterning the conductive wire layer to thereby form conductive wire patterns.
    • 提供一种制造线状偏振器的方法。 该方法包括顺序堆叠导线层和第一中性层,形成引导图案,减小引导图案的宽度和图案化第一中性层,形成第二中性层,施加第一嵌段共聚物,将第一嵌段共聚物设置为 第一单体嵌段和第二单体嵌段,除去第一单体嵌段和第二单体嵌段之一,除去暴露的第二中性层,除去剩余的单体嵌段和引导图案,施加第二嵌段共聚物,将第二嵌段 共聚物作为第三单体嵌段和第四单体嵌段,除去第三单体嵌段和第四单体嵌段之一,并对导线层进行图案化从而形成导线图案。
    • 10. 发明授权
    • Polarizer and method of fabricating the same
    • 偏振器及其制造方法
    • US09594200B2
    • 2017-03-14
    • US14667588
    • 2015-03-24
    • SAMSUNG DISPLAY CO., LTD.
    • Seung Won ParkTae Woo KimDae Ho YoonMoon Gyu Lee
    • G02B5/30G03F7/00
    • G02B5/3058G03F7/0002G03F7/0007G03F7/0035
    • A method of fabricating a polarizer, the method including, forming a base substrate by sequentially forming a metal layer, a guide layer, a hard mask layer, a sacrificial layer, and a first photoresist layer on a light-transmitting substrate in a panel area and an alignment key area which are spatially separated from each other, forming a first photoresist layer pattern for forming an alignment key pattern in the alignment key area by patterning the first photoresist layer, forming a sacrificial layer pattern in the alignment key area utilizing the first photoresist layer pattern as a mask, and forming a second photoresist layer on a top surface of the sacrificial layer pattern of the alignment key area before removing the sacrificial layer of an aperture area of the panel area.
    • 一种偏振片的制造方法,其特征在于,在面板区域的透光性基板上依次形成金属层,导向层,硬掩模层,牺牲层,第一光致抗蚀剂层,形成基板 以及在空间上彼此分离的对准键区域,通过对所述第一光致抗蚀剂层进行构图来形成用于在所述对准键区域中形成对准键图案的第一光致抗蚀剂层图案,利用所述第一光刻胶层在所述对准键区域中形成牺牲层图案 光致抗蚀剂层图案作为掩模,并且在去除面板区域的孔区域的牺牲层之前,在对准键区域的牺牲层图案的顶表面上形成第二光致抗蚀剂层。