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    • 1. 发明授权
    • Display substrate and method of manufacturing the same
    • 显示基板及其制造方法
    • US09171864B2
    • 2015-10-27
    • US14249199
    • 2014-04-09
    • Samsung Display Co., LTD.
    • Xinxing LiDo-Hyun KimChan-Woo YangJeong-Ju ParkJun-Hyun ParkXun Zhu
    • H01L21/84H01L27/12
    • H01L27/1225H01L27/1259H01L27/1288
    • A display substrate includes a gate metal pattern including a gate line disposed on a base substrate and a gate electrode electrically connected with the gate line, an active pattern entirely overlapped with the gate metal pattern and comprising an oxide semiconductor and a data metal pattern disposed on the active pattern and including a data line, a source electrode electrically connected with the gate line and a drain electrode spaced apart from the source electrode. The active pattern has an overlapped region in which the active pattern is overlapped with the source electrode and the drain electrode and an exposed region in which the active pattern is not overlapped with the source electrode and the drain electrode. The thickness of the overlapping region and a thickness of the exposing region are same.
    • 显示基板包括栅极金属图案,其包括设置在基底基板上的栅极线和与栅极线电连接的栅电极,与栅极金属图案完全重叠的有源图案,并且包括氧化物半导体和数据金属图案, 所述有源图案包括数据线,与所述栅极线电连接的源电极和与所述源电极间隔开的漏电极。 有源图案具有重叠区域,其中有源图案与源电极和漏电极重叠,并且有源图案不与源电极和漏电极重叠的曝光区域。 重叠区域的厚度和曝光区域的厚度相同。