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1. 发明申请

US20140186595A1 METHOD OF FABRICATING DISPLAY DEVICE USING MASKLESS EXPOSURE APPARATUS AND DISPLAY DEVICE 有权
标题翻译：使用MASKLESS曝光装置和显示装置制造显示装置的方法
公开(公告)号：US20140186595A1
公开(公告)日：2014-07-03
申请号：US13861039
申请日：2013-04-11
申请人： SAMSUNG DISPLAY CO., LTD
发明人： SANG HYUN YUN , CHA-DONG KIM , JUNG-IN PARK , JAE HYUK CHANG , HI KUK LEE
IPC分类号： G03F7/20 , G03F7/00
CPC分类号： G03F7/2022 , G02F1/133512 , G02F1/13394 , G03F7/0007 , G03F7/203 , G03F7/70475 , Y10T428/24851
摘要： The present invention relates to a method of fabricating a display device using a maskless exposure apparatus, and the display device, and more particularly, to a method of fabricating a display device by using a maskless exposure apparatus, which is capable of preventing a stain from being viewed, and the display device. An exemplary embodiment of the present invention provides a method of fabricating a display device, including: forming a first exposure region on a substrate by performing exposure while scanning the substrate with a first exposure head irradiating an exposure beam according to pattern information of a first pattern in a scanning direction; and forming a second exposure region adjacent to the first exposure region on the substrate by performing exposure while scanning the substrate with a second exposure head irradiating an exposure beam according to the pattern information of the first pattern in the scanning direction; in which an exposure boundary region between the first exposure region and the second exposure region is extended in the scanning direction, and the exposure boundary region overlaps a light blocking region.
摘要翻译：本发明涉及使用无掩模曝光装置和显示装置制造显示装置的方法，更具体地说，涉及一种使用无掩模曝光装置制造显示装置的方法，该无掩模曝光装置能够防止被观看，以及显示装置。本发明的一个示例性实施例提供了一种制造显示装置的方法，包括：通过在用基于第一图案的图案信息的照射曝光光束的第一曝光头扫描基板的同时进行曝光来在基板上形成第一曝光区域在扫描方向; 以及根据所述第一图案在所述扫描方向上的图案信息，利用照射曝光光束的第二曝光头对所述基板进行曝光，同时在所述基板上形成与所述第一曝光区域相邻的第二曝光区域; 其中第一曝光区域和第二曝光区域之间的曝光边界区域在扫描方向上延伸，并且曝光边界区域与遮光区域重叠。

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