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    • 2. 发明授权
    • Position-control stage with onboard linear motor
    • 带车载线性电机的位置控制级
    • US07030518B2
    • 2006-04-18
    • US10621409
    • 2003-07-18
    • Takaaki TsuboiEiji IdaYoshihiko Kanazawa
    • Takaaki TsuboiEiji IdaYoshihiko Kanazawa
    • H02K41/00
    • H02K29/10H02K3/47H02K41/03H02K2201/15
    • A position-control stage is disclosed which makes it possible to extend largely an angular movement in circular direction for position control, rendering the stage itself compact in construction, allowing to work with high precision in clean environment and further produce the stage with inexpensive cost. The position-control stage has an onboard linear motor composed of armature windings of primary side and field magnets of secondary side. The armature windings are each made in a hollow rectangle where winding turns are wound in the form of flat loop, and are circularly arranged on a disc surface of the bed along a preselected curvature in such a way lying in radial juxtaposition in circumferential direction. The field magnets are made in a flat shape and arranged underneath the turntable in such a pattern lying radially on a disc surface of the preselected curvature in opposition to the armature windings, with their unlike poles alternating in polarity along a circular direction.
    • 公开了一种位置控制平台,其可以在圆周方向上大幅度地延伸以进行位置控制,使得其自身在结构中紧凑,允许在清洁环境中以高精度进行工作,并且以便宜的成本进一步生产台阶。 位置控制级具有由次级侧的初级侧和场磁体的电枢绕组构成的车载线性电动机。 电枢绕组各自制成中空矩形,其中绕组匝以平环的形式缠绕,并且沿着预选的曲率以沿圆周方向的径向并置的方式圆形布置在床的盘表面上。 场磁体被制成平面形状并且布置在转台下方,以与电枢绕组相对的径向位于预选曲率的盘表面上的图案,其不同的极性沿着圆形方向极性交替。