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    • 1. 发明申请
    • PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD
    • 图案形成装置和图案形成方法
    • US20100308485A1
    • 2010-12-09
    • US12728527
    • 2010-03-22
    • Ryoichi INANAMISyunji ArakiTakuya Kono
    • Ryoichi INANAMISyunji ArakiTakuya Kono
    • B29C59/02
    • G03F7/0002B82Y10/00B82Y40/00G03F9/00
    • A pattern is formed by an imprint technique, without decreases in throughput and alignment precision. A pattern forming apparatus includes a substrate holder that holds a substrate to be processed, a template holder that holds a template, a first position measuring device that measures the position of the substrate held by the substrate holder, a second position measuring device that measures the position of the template held by the template holder, and a control device that aligns the substrate with the template, based on transfer position information, calculates misalignments of the substrate and the template caused by a demolding procedure, based on the results of the measurement carried out by the first position measuring device and the second position measuring device, calculates a relative misalignment between the substrate and the template, based on the misalignments of the substrate and the template, and corrects the transfer position information, using the relative misalignment.
    • 通过压印技术形成图案,而不降低生产量和对准精度。 图案形成装置包括保持待处理基板的基板保持件,保持模板的模板保持器,测量由基板保持器保持的基板的位置的第一位置测量装置, 由模板保持器保持的模板的位置和基于转印位置信息将基板与模板对准的控制装置基于所进行的测量结果计算由脱模过程引起的基板和模板的不对准 通过第一位置测量装置和第二位置测量装置,基于基板和模板的不对准来计算基板和模板之间的相对未对准,并且使用相对的未对准来校正转印位置信息。