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1. 发明申请

US20120128233A1 DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION BETWEEN RULE-BASED AND EXAMPLE-BASED CLASSIFIERS 有权
标题翻译：基于基于规则和基于实例的分类器之间的连接使用分类协议的缺陷分类器
公开(公告)号：US20120128233A1
公开(公告)日：2012-05-24
申请号：US13362181
申请日：2012-01-31
申请人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
发明人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
IPC分类号： G06K9/00
CPC分类号： G06T7/0006 , G06K9/6256 , G06T7/0004 , G06T7/001 , G06T2207/10056 , G06T2207/10061 , G06T2207/30148
摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.
摘要翻译：在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

2. 发明申请

US20110268345A1 DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION BETWEEN RULE-BASED AND EXAMPLE-BASED CLASSIFIERS 有权
标题翻译：基于基于规则和基于实例的分类器之间的连接使用分类协议的缺陷分类器
公开(公告)号：US20110268345A1
公开(公告)日：2011-11-03
申请号：US13183488
申请日：2011-07-15
申请人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
发明人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
IPC分类号： G06K9/00
CPC分类号： G06T7/0006 , G06K9/6256 , G06T7/0004 , G06T7/001 , G06T2207/10056 , G06T2207/10061 , G06T2207/30148
摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.
摘要翻译：在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

3. 发明申请

US20100128970A1 METHOD AND APPARATUS FOR REVIEWING DEFECTS 有权
标题翻译：评估缺陷的方法和装置
公开(公告)号：US20100128970A1
公开(公告)日：2010-05-27
申请号：US12695090
申请日：2010-01-27
申请人： Ryo NAKAGAKI , Toshifumi Honda
发明人： Ryo NAKAGAKI , Toshifumi Honda
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of judging criticality or non-flat state of the defect by use of the estimation result. It becomes possible to establish both of a high-throughput image collecting sequence in which any reference image is not acquired and high-precision defect classification, and then to realize both of a high performance classifying function and a high-throughput image collecting function in a defect reviewing apparatus which automatically collects and classifies images of defects existing on a sample of a semiconductor wafer or the like.
摘要翻译：一种用于检查缺陷的装置，包括具有通过使用缺陷图像来估计存在缺陷的部分的非缺陷状态（参考图像）的功能的图像处理部分（缺陷分类装置部分），以及判断通过使用估计结果，缺陷的关键性或非平坦状态。可以建立不获取任何参考图像的高通量图像采集序列和高精度缺陷分类，然后实现高性能分类功能和高吞吐量图像采集功能缺陷检查装置，其自动地收集和分类存在于半导体晶片等的样本上的缺陷的图像。

4. 发明申请

US20080187212A1 Defect Image Classifying Method and Apparatus and a Semiconductor Device Manufacturing Process Based on the Method and Apparatus 审中-公开
标题翻译：基于方法和装置的缺陷图像分类方法和装置以及半导体器件制造工艺
公开(公告)号：US20080187212A1
公开(公告)日：2008-08-07
申请号：US12030019
申请日：2008-02-12
申请人： Kenji OBARA , Yuji TAKAGI , Ryo NAKAGAKI , Yasuhiro OZAWA , Toshiei KUROSAKI , Seiji ISOGAI
发明人： Kenji OBARA , Yuji TAKAGI , Ryo NAKAGAKI , Yasuhiro OZAWA , Toshiei KUROSAKI , Seiji ISOGAI
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： According to the present invention, techniques including a method and apparatus for classifying and displaying images are provided. In an embodiment of the present invention a defect image classification method using inspected objects is provided. The method includes defect images obtained from at least one inspected object. Next a set of defect images is classified into a specified category, which has a feature. The defect images are arranged for display according to the feature and then displayed. The arranging of the defect images may also be based on an evaluation value for each defect image. Another embodiment provides a defect image classification method using inspected objects. Defect images are obtained from at least one inspected object. Next the defect images are classified into a plurality of categories and at least two information items for example, a defect distribution diagram showing locations of defects in the inspected object, information associated with a category of the plurality of categories, and a defect size distribution, are displayed.
摘要翻译：根据本发明，提供了包括用于分类和显示图像的方法和装置的技术。在本发明的一个实施例中，提供了使用检查对象的缺陷图像分类方法。该方法包括从至少一个检查对象获得的缺陷图像。接下来，一组缺陷图像被分类为具有特征的指定类别。故障图像根据特征进行显示，然后显示。缺陷图像的布置也可以基于每个缺陷图像的评估值。另一实施例提供使用检查对象的缺陷图像分类方法。从至少一个检查对象获得缺陷图像。接下来，将缺陷图像分为多个类别和至少两个信息项，例如，示出被检查对象中的缺陷的位置的缺陷分布图，与多个类别的类别相关联的信息以及缺陷尺寸分布，被显示。

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