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1. 发明申请

US20120119612A1 MOTION CONTROLLED ACTUATOR 有权
标题翻译：运动控制执行器
公开(公告)号：US20120119612A1
公开(公告)日：2012-05-17
申请号：US12946526
申请日：2010-11-15
申请人： Roman C. Gutierrez , Robert J. Calvet , Ankur Jain , Xiaolei Liu , Guiqin Wang
发明人： Roman C. Gutierrez , Robert J. Calvet , Ankur Jain , Xiaolei Liu , Guiqin Wang
IPC分类号： H02N11/00 , B23P11/00
CPC分类号： H02K5/24 , B81B3/0062 , B81B2203/058 , F16H49/00 , G02B7/005 , G02B26/0841 , G03B3/10 , G03B5/00 , G03B13/34 , G03B2205/0007 , G03B2205/0046 , G03B2205/0084 , H02N1/008 , H04N5/2257 , Y10T29/49826 , Y10T74/18056
摘要： A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.
摘要翻译：设备可以具有外框架和致动器。致动器可以具有可移动框架和固定框架。至少一个扭转挠曲和至少一个铰链挠曲可以协作以在外框架和可移动框架之间提供相对较高的横向刚度，并且可以协作以在外框架和可移动框架之间提供相对较低的旋转刚度。

2. 发明申请

US20120120262A1 ROTATIONALLY DEPLOYED ACTUATORS 有权
标题翻译：旋转执行器
公开(公告)号：US20120120262A1
公开(公告)日：2012-05-17
申请号：US12946646
申请日：2010-11-15
申请人： Roman C. Gutierrez , Guiqin Wang , Xiaolei Liu , Robert J. Calvet , Ankur Jain
发明人： Roman C. Gutierrez , Guiqin Wang , Xiaolei Liu , Robert J. Calvet , Ankur Jain
IPC分类号： H04N5/225 , C23F1/00 , B23K26/00 , H02N11/00 , B23P11/00
CPC分类号： H04N5/2254 , G03B3/10 , G03B2205/0007 , G03B2205/0046 , G03B2205/0069 , H02N1/008 , H04N5/2257 , Y10T29/49826
摘要： A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar actuator device of an electrically conductive material, e.g., a semiconductor, to include an outer frame, a fixed frame coupled to the outer frame for rotational movement relative thereto, a moveable frame coupled to the outer frame for rotational movement relative thereto, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame. The fixed frame is then rotated to a deployed position relative to the outer frame such that the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth, and the position of the fixed frame relative to the outer frame is then fixed at the deployed position.
摘要翻译：制造致动器的方法包括例如使用光刻技术形成例如半导体的导电材料的基本上平面的致动器装置，以包括外框架，联接到外框架的固定框架，用于相对于外框架的旋转运动，联接到所述外框架以用于相对于所述外框架旋转运动的可移动框架，以及包括多个交叉齿的致动器，其固定部分附接到所述固定框架，并且其移动部分附接到所述可移动框架。然后，固定框架相对于外框架旋转到展开位置，使得致动器齿的固定部分相对于致动器齿的移动部分以选定的角度设置，并且固定框架相对于外框然后固定在展开位置。

3. 发明授权

US08430580B2 Rotationally deployed actuators 有权
标题翻译：旋转部署的执行器
公开(公告)号：US08430580B2
公开(公告)日：2013-04-30
申请号：US12946646
申请日：2010-11-15
申请人： Roman C. Gutierrez , Guiqin Wang , Xiaolei Liu , Robert J. Calvet , Ankur Jain
发明人： Roman C. Gutierrez , Guiqin Wang , Xiaolei Liu , Robert J. Calvet , Ankur Jain
IPC分类号： G03B17/00
CPC分类号： H04N5/2254 , G03B3/10 , G03B2205/0007 , G03B2205/0046 , G03B2205/0069 , H02N1/008 , H04N5/2257 , Y10T29/49826
摘要： A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar actuator device of an electrically conductive material, e.g., a semiconductor, to include an outer frame, a fixed frame coupled to the outer frame for rotational movement relative thereto, a moveable frame coupled to the outer frame for rotational movement relative thereto, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame. The fixed frame is then rotated to a deployed position relative to the outer frame such that the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth, and the position of the fixed frame relative to the outer frame is then fixed at the deployed position.
摘要翻译：制造致动器的方法包括例如使用光刻技术形成例如半导体的导电材料的基本上平面的致动器装置，以包括外框架，联接到外框架的固定框架，用于相对于外框架的旋转运动，联接到所述外框架以用于相对于所述外框架旋转运动的可移动框架，以及包括多个交叉齿的致动器，其固定部分附接到所述固定框架，并且其移动部分附接到所述可移动框架。然后，固定框架相对于外框架旋转到展开位置，使得致动器齿的固定部分相对于致动器齿的移动部分以选定的角度设置，并且固定框架相对于外框然后固定在展开位置。

4. 发明授权

US09061883B2 Actuator motion control features 有权
标题翻译：执行器运动控制功能
公开(公告)号：US09061883B2
公开(公告)日：2015-06-23
申请号：US12946624
申请日：2010-11-15
申请人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
发明人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
IPC分类号： G02B7/04 , G03B13/34 , B81B7/00
CPC分类号： B81B7/00 , B81B7/0016 , B81B2201/047 , Y10T29/49002
摘要： A method for making a motion control feature for an actuator device of a type that has a moveable component coupled to an opposing fixed component for out-of-plane rotational movement relative thereto includes forming first and second flaps respectively extending from the moveable and fixed components and toward the opposing component and operable to effect one or more of damping movement of the moveable component relative to the fixed component and/or restraining movement of the moveable component relative to the fixed component in a direction substantially perpendicular to the actuator device.
摘要翻译：一种制造用于致动器装置的运动控制特征的方法，所述致动器装置具有联接到相对的固定部件的可移动部件，用于相对于其相对的固定部件进行平面外旋转运动，所述方法包括形成分别从可移动和固定部件延伸的第一和第二翼片并且朝向相对的部件并且可操作以实现可移动部件相对于固定部件的阻尼运动和/或可移动部件相对于固定部件在大致垂直于致动器装置的方向上的约束运动中的一个或多个。

5. 发明授权

US08604663B2 Motion controlled actuator 有权
标题翻译：运动控制执行器
公开(公告)号：US08604663B2
公开(公告)日：2013-12-10
申请号：US12946526
申请日：2010-11-15
申请人： Roman C. Gutierrez , Robert J. Calvet , Ankur Jain , Xiaolei Liu , Guiqin Wang
发明人： Roman C. Gutierrez , Robert J. Calvet , Ankur Jain , Xiaolei Liu , Guiqin Wang
IPC分类号： H02N11/00
CPC分类号： H02K5/24 , B81B3/0062 , B81B2203/058 , F16H49/00 , G02B7/005 , G02B26/0841 , G03B3/10 , G03B5/00 , G03B13/34 , G03B2205/0007 , G03B2205/0046 , G03B2205/0084 , H02N1/008 , H04N5/2257 , Y10T29/49826 , Y10T74/18056
摘要： A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.
摘要翻译：设备可以具有外框架和致动器。致动器可以具有可移动框架和固定框架。至少一个扭转挠曲和至少一个铰链挠曲可以协作以在外框架和可移动框架之间提供相对较高的横向刚度，并且可以协作以在外框架和可移动框架之间提供相对较低的旋转刚度。

6. 发明申请

US20120119425A1 ACTUATOR MOTION CONTROL FEATURES 有权
标题翻译：执行器运动控制功能
公开(公告)号：US20120119425A1
公开(公告)日：2012-05-17
申请号：US12946624
申请日：2010-11-15
申请人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
发明人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
IPC分类号： F16F13/00 , H05K13/00
CPC分类号： B81B7/00 , B81B7/0016 , B81B2201/047 , Y10T29/49002
摘要： A method for making a motion control feature for an actuator device of a type that has a moveable component coupled to an opposing fixed component for out-of-plane rotational movement relative thereto includes forming first and second flaps respectively extending from the moveable and fixed components and toward the opposing component and operable to effect one or more of damping movement of the moveable component relative to the fixed component and/or restraining movement of the moveable component relative to the fixed component in a direction substantially perpendicular to the actuator device.
摘要翻译：一种制造用于致动器装置的运动控制特征的方法，所述致动器装置具有联接到相对的固定部件的可移动部件，用于相对于其相对的固定部件进行平面外旋转运动，所述方法包括形成分别从可移动和固定部件延伸的第一和第二翼片并且朝向相对的部件并且可操作以实现可移动部件相对于固定部件的阻尼运动和/或可移动部件相对于固定部件在大致垂直于致动器装置的方向上的约束运动中的一个或多个。

7. 发明授权

US08941192B2 MEMS actuator device deployment 有权
标题翻译： MEMS执行机构部署
公开(公告)号：US08941192B2
公开(公告)日：2015-01-27
申请号：US13247888
申请日：2011-09-28
申请人： Robert J. Calvet , Xiaolei Liu , Ankur Jain , Lakshminarayan Hariharan , Roman C. Gutierrez
发明人： Robert J. Calvet , Xiaolei Liu , Ankur Jain , Lakshminarayan Hariharan , Roman C. Gutierrez
IPC分类号： H02N1/00 , G03B17/00 , G03B5/00 , B81B3/00 , G03B3/10
CPC分类号： G03B5/00 , B81B3/0037 , B81B2201/033 , B81B2203/053 , G03B3/10 , G03B2205/0007 , G03B2205/0084 , Y10T29/49826 , Y10T74/18992
摘要： A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
摘要翻译：一种用于制造致动器装置的方法包括形成基本平坦的结构，其具有弹性支撑以在所述结构的平面内移动的台阶;致动器，其联接到所述平台的外周边并且可操作以施加作用在所述平面中的切向和切向地致动器包括固定框架和弹性支撑的运动框架，用于通过运动控制挠曲件相对于固定框架往复运动，以及围绕并支撑平台和致动器的外框架。移动框架被移动到展开位置，该展开位置与固定框架平行并间隔开一定距离，然后移动框架固定在展开位置，以相对于固定框架基本上直线，垂直移动。

8. 发明申请

US20130036592A1 MEMS Deployment Flexures 有权
标题翻译： MEMS部署弯曲
公开(公告)号：US20130036592A1
公开(公告)日：2013-02-14
申请号：US13652159
申请日：2012-10-15
申请人： Robert J. Calvet , Roman C. Gutierrez , Xiaolei Liu , Ankur Jain
发明人： Robert J. Calvet , Roman C. Gutierrez , Xiaolei Liu , Ankur Jain
IPC分类号： B23P17/04
CPC分类号： G02B26/0841 , G02B26/0833 , Y10T29/49826
摘要： A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.
摘要翻译：弯曲组件可以具有通过将挠曲组件附接到壳体而部署到期望位置的台阶。例如，框架可以被配置为通过壳体的一部分保持在适当位置，并且展开垫可以被配置为通过壳体的另一部分保持就位。部署挠曲可以被配置为便于框架和部署垫相对于彼此在平面外的定位。部署弯曲和运动控制弯曲可以促进平台相对于壳体的移动。以这种方式，舞台的位置和舞台的预载由房屋确定。

9. 发明授权

US09352962B2 MEMS isolation structures 有权
公开(公告)号：US09352962B2
公开(公告)日：2016-05-31
申请号：US12946430
申请日：2010-11-15
申请人： Ankur Jain , Roman C. Gutierrez , Shi-Sheng Lee , Robert J. Calvet , Xiaolei Liu
发明人： Ankur Jain , Roman C. Gutierrez , Shi-Sheng Lee , Robert J. Calvet , Xiaolei Liu
IPC分类号： B81B3/00 , B81C1/00 , G03B3/10
CPC分类号： B81B7/0077 , B81B2201/031 , B81B2203/033 , B81C1/00571 , G03B3/10 , G03B2205/0061
摘要： A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.

10. 发明申请

US20120119324A1 MEMS ISOLATION STRUCTURES 有权
标题翻译： MEMS隔离结构
公开(公告)号：US20120119324A1
公开(公告)日：2012-05-17
申请号：US12946430
申请日：2010-11-15
申请人： Ankur Jain , Roman C. Gutierrez , Shi-Sheng Lee , Robert J. Calvet , Xiaolei Liu
发明人： Ankur Jain , Roman C. Gutierrez , Shi-Sheng Lee , Robert J. Calvet , Xiaolei Liu
IPC分类号： H01L29/06 , H01L21/31
CPC分类号： B81B7/0077 , B81B2201/031 , B81B2203/033 , B81C1/00571 , G03B3/10 , G03B2205/0061
摘要： A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.
摘要翻译：器件可以包括由第一半导体材料形成的衬底和形成在衬底中的沟槽。可以在沟槽中形成第二半导体材料。第二半导体材料可以具有相对于彼此隔离并且相对于第一半导体材料隔离的第一和第二部分。

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