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1. 发明授权

US07323862B2 Apparatus and method for detecting photon emissions from transistors 有权
公开(公告)号：US07323862B2
公开(公告)日：2008-01-29
申请号：US11380044
申请日：2006-04-25
申请人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
发明人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
IPC分类号： G01R31/28
CPC分类号： G01R31/2656 , G01R31/311
摘要： A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.

2. 发明授权

US06891363B2 Apparatus and method for detecting photon emissions from transistors 有权
标题翻译：用于检测晶体管的光子发射的装置和方法
公开(公告)号：US06891363B2
公开(公告)日：2005-05-10
申请号：US10234231
申请日：2002-09-03
申请人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
发明人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
IPC分类号： G01R31/311 , G01R31/02
CPC分类号： G01R31/2656 , G01R31/311
摘要： A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
摘要翻译：用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。该分析涉及光子发射的空间和/或时间相关性。在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。在一些情况下，重量反映了光子被晶体管发射的可能性。该分析还可以包括自动识别光子发射图像中的晶体管。

3. 发明授权

US07439730B2 Apparatus and method for detecting photon emissions from transistors 有权
标题翻译：用于检测晶体管的光子发射的装置和方法
公开(公告)号：US07439730B2
公开(公告)日：2008-10-21
申请号：US11296888
申请日：2005-12-08
申请人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
发明人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
IPC分类号： G01R31/28
CPC分类号： G01R31/2656 , G01R31/311
摘要： A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
摘要翻译：用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。该分析涉及光子发射的空间和/或时间相关性。在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。在一些情况下，重量反映了光子被晶体管发射的可能性。该分析还可以包括自动识别光子发射图像中的晶体管。

4. 发明授权

US07038442B2 Apparatus and method for detecting photon emissions from transistors 有权
标题翻译：用于检测晶体管的光子发射的装置和方法
公开(公告)号：US07038442B2
公开(公告)日：2006-05-02
申请号：US11040333
申请日：2005-01-20
申请人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
发明人： Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
IPC分类号： G01R31/302
CPC分类号： G01R31/2656 , G01R31/311
摘要： A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
摘要翻译：用于分析光子发射数据以鉴别由晶体管发射的光子和由背景源发射的光子的系统，装置和方法。该分析涉及光子发射的空间和/或时间相关性。在相关之后，分析可进一步涉及获得相关光子由晶体管发射的可能性。在相关之后，分析还可以进一步包括将权重分配给单个光子发射作为相关性的函数。在一些情况下，重量反映了光子被晶体管发射的可能性。该分析还可以包括自动识别光子发射图像中的晶体管。

5. 发明授权

US07042647B2 Scanning optical system 有权
标题翻译：扫描光学系统
公开(公告)号：US07042647B2
公开(公告)日：2006-05-09
申请号：US10677587
申请日：2003-10-02
申请人： William K. Lo
发明人： William K. Lo
IPC分类号： G02B3/00 , G02B7/02 , H01L3/14
CPC分类号： G01N21/9501 , G01N21/8806 , G01N21/956 , G01N2201/0853 , G01N2201/10 , G01N2201/101 , G01N2201/103
摘要： A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.
摘要翻译：用于光学探测应用的扫描光学系统为具有高数值孔径（NA）的物镜（例如固体浸没透镜（SIL））提供了大视场（FOV）。这样可实现用于激光探测，TIVA / LIVA，OBIRCH和光子发射时序分析等半导体器件的高分辨率成像。公开了一种混合扫描光学配置，以在大面积上提供在小区域上的高分辨率成像以及低分辨率成像。

6. 发明授权

US06462814B1 Beam delivery and imaging for optical probing of a device operating under electrical test 失效
标题翻译：用于光电探测的光束传输和成像在电气测试下运行的设备
公开(公告)号：US06462814B1
公开(公告)日：2002-10-08
申请号：US09526979
申请日：2000-03-15
申请人： William K. Lo
发明人： William K. Lo
IPC分类号： G01N2100
CPC分类号： G01R31/311 , G01N21/956
摘要： Methods and apparatus for optically probing an electrical device while the device is operating under control of a tester of the kind that applies test vectors and that has a test head in which the device can be mounted. An optical probe system has a light delivery and imaging module that is configured to be docked to a test head and that has imaging optics and a fine scanner. An optical processing subsystem can generate an incoming beam of light to illuminate the device through an optical fiber to a fiber end in the module. The fiber end is mounted in a fixed position on the optical axis of the imaging optics, and the fiber end and imaging optics are mounted in a fixed position to the platform of the fine scanner. Operating the fine scanner moves the fiber end, the imaging optics, the optical axis, and the focal point as a rigid unit.
摘要翻译：该装置在应用测试矢量的那种测试仪的控制下操作并且具有可安装该装置的测试头时，用于光学探测电气设备的方法和装置。光学探针系统具有光输送和成像模块，其被配置为对接到测试头并具有成像光学元件和精细扫描器。光学处理子系统可以产生入射光束，以将设备通过光纤照射到模块中的光纤端。光纤端被安装在成像光学器件的光轴上的固定位置，并且光纤端和成像光学器件被固定在精细扫描器的平台上。操作精细扫描仪将光纤端，成像光学元件，光轴和焦点作为刚性单元移动。

7. 发明申请

US20100117667A1 Method and means for optical detection of internal-node signals in an integrated circuit device 审中-公开
标题翻译：集成电路器件内部节点信号的光学检测方法和装置
公开(公告)号：US20100117667A1
公开(公告)日：2010-05-13
申请号：US12590507
申请日：2009-11-09
申请人： William K. Lo
发明人： William K. Lo
IPC分类号： G01R31/02
CPC分类号： G01R31/311
摘要： A continuous-wave laser beam is chopped to form pulses synchronized to the activity of a device under testing and/or to acquisition electronics. Chopping the laser beam to reduce the duty-cycle of the beam allows the power delivered to the device during the actual probing time interval to be increased while maintaining a lower average power. Chopping the laser beam improves the signal-to-noise ratio of the continuous-wave laser voltage probing measurements. Chopping the laser beam improves the performance of the continuous-wave laser based laser voltage probing system, which may be used for measuring the internal signals of an operating integrated circuit device.
摘要翻译：连续波激光束被切碎以形成与被测器件和/或采集电子器件的活动同步的脉冲。切割激光束以减小光束的占空比允许在实际探测时间间隔期间递送到设备的功率增加，同时保持较低的平均功率。切割激光束可以提高连续波激光电压探测测量的信噪比。切割激光束可提高基于连续波激光的激光电压探测系统的性能，该系统可用于测量操作集成电路器件的内部信号。

8. 发明授权

US06496261B1 Double-pulsed optical interferometer for waveform probing of integrated circuits 失效
标题翻译：用于集成电路波形探测的双脉冲光干涉仪
公开(公告)号：US06496261B1
公开(公告)日：2002-12-17
申请号：US09500757
申请日：2000-02-08
申请人： Kenneth R. Wilsher , William K. Lo
发明人： Kenneth R. Wilsher , William K. Lo
IPC分类号： G01B902
CPC分类号： G01R31/311
摘要： Optical interferometery is used to probe an integrated circuit device under test (DUT). During each cycle of a repetitive electrical test pattern applied to the DUT a reference pulse is provided at a fixed time relative to the test pattern, and a probe pulse is provided at a time scanned through the test pattern in the manner of equivalent time sampling. The probe and reference light pulses are each split to provide at least a second probe pulse and a second reference pulse. One probe pulse and one reference pulse interact with the DUT at the same physical location, but at displaced times with respect to each other. The second probe pulse and the second reference pulse travel an optical delay path with length controlled to compensate for motions of the DUT. The probe pulses are recombined and detected to provide a probe interference signal. The reference pulses are recombined and detected to provide a reference interference signal. For each cycle, electrical activity in the DUT is detected by preparing a ratio of the probe interference signal and the reference interference signal.
摘要翻译：光学干涉仪用于探测被测集成电路器件（DUT）。在施加到DUT的重复电测试图案的每个周期期间，在相对于测试图案的固定时间提供参考脉冲，并且以等效时间采样的方式在扫描的测试图案上提供探针脉冲。探针和参考光脉冲被分开以提供至少第二探针脉冲和第二参考脉冲。一个探针脉冲和一个参考脉冲在相同的物理位置与DUT相互作用，但相对于彼此移位。第二探针脉冲和第二参考脉冲行进光学延迟路径，其长度被控制以补偿DUT的运动。探测脉冲被重组和检测以提供探测干扰信号。参考脉冲被重组和检测以提供参考干扰信号。对于每个周期，通过准备探头干扰信号和参考干扰信号的比率来检测DUT中的电活动。

9. 发明授权

US5920073A Optical system 失效
标题翻译：光学系统
公开(公告)号：US5920073A
公开(公告)日：1999-07-06
申请号：US841413
申请日：1997-04-22
申请人： Chiwoei Wayne Lo , William K. Lo
发明人： Chiwoei Wayne Lo , William K. Lo
IPC分类号： G21K1/00 , H01J37/04 , H01J37/09
CPC分类号： H01J37/09 , H01J2237/045
摘要： An optical system for a particle beam device such as an electron microscope, e-beam device or FIB device, including a particle beam column having an optical axis along which a beam of particles is projected and an apertured plate positioned in the column having an aperture which is coaxial with the optical axis, the plate being moveable in a direction which is parallel to the optical axis.
摘要翻译：一种用于诸如电子显微镜，电子束装置或FIB装置的粒子束装置的光学系统，包括具有沿着该粒子束投射的光轴的粒子束列和位于该柱中的孔径的孔，该孔具有孔径其与光轴同轴，所述板可在平行于光轴的方向上移动。

10. 发明授权

US5905577A Dual-laser voltage probing of IC's 失效
标题翻译： IC的双激光电压探测
公开(公告)号：US5905577A
公开(公告)日：1999-05-18
申请号：US818345
申请日：1997-03-15
申请人： Kenneth R. Wilsher , Suresh N. Rajan , William K. Lo
发明人： Kenneth R. Wilsher , Suresh N. Rajan , William K. Lo
IPC分类号： G01R31/302 , G01R31/311 , H01L21/66 , G01R31/265
CPC分类号： G01R31/311
摘要： A probe beam is used to sample the waveform on an IC device under test (DUT) during each cycle of a test pattern applied to the DUT. A reference laser beam is also used to sample the DUT. For each cycle of the test pattern, the reference and probe beams sample the DUT at the same physical location, but at displaced times with respect to each other. Each reference measurement is made at a fixed time relative to the test pattern while the probe measurements are scanned through the test-pattern time portion of interest, in the manner normal to equivalent time sampling, to reconstruct the waveform. For each test cycle, the ratio of these two measurements is taken. The fluctuations of these ratios due to noise is greatly reduced as compared to fluctuations of the probe measurements taken alone. Thus, a smaller number of averages is required to reconstruct the waveform.
摘要翻译：在施加到DUT的测试图案的每个周期期间，使用探针光束对待测IC器件（DUT）上的波形进行采样。参考激光束也用于对DUT进行采样。对于测试图案的每个周期，参考和探针光束在相同的物理位置上对DUT进行采样，但是在相对于彼此的位移时间。每个参考测量在相对于测试图案的固定时间进行，同时以与等效时间采样垂直的方式扫描探测器测量值以通过感兴趣的测试图案时间部分来重建波形。对于每个测试周期，采用这两个测量的比率。与单独进行的探头测量的波动相比，由噪声引起的这些比率的波动大大降低。因此，需要较小数量的平均值来重构波形。

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