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1. 发明授权

US06908775B2 Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer 失效
标题翻译：用于在半导体晶片上执行不同层中的两个图案的对准测量的方法
公开(公告)号：US06908775B2
公开(公告)日：2005-06-21
申请号：US10713690
申请日：2003-11-14
申请人： Rolf Heine , Sebastian Schmidt , Thorsten Schedel
发明人： Rolf Heine , Sebastian Schmidt , Thorsten Schedel
IPC分类号： G03F7/20 , G03F9/00 , G06T7/00 , H01L21/027 , H01L21/66 , G01R31/26
CPC分类号： G03F7/70633 , G03F9/7046 , G03F9/7076 , G06T7/0002 , G06T7/0004 , G06T7/33 , G06T2207/30148
摘要： In an alignment or overlay measurement of patterns on a semiconductor wafer an error that occurs during the measurement in one of a predefined number of alignment structures in an exposure field of a corresponding predefined set of exposure fields can be handled by selecting an alignment structure in a substitute exposure field. The latter exposure field need not be part of the predefined set of exposure fields, that is, an inter-field change may be effected. The number of alignment measurements on a wafer remains constant and the quality is increased. Alternatively, when using another alignment structure in the same exposure field—by effecting an intra-field change—the method becomes particularly advantageous when different minimum structure sizes are considered for the substitute targets. Due to the different selectivity in, say, a previous CMP process, such targets might not erode and do not cause an error in a measurement, thus providing an increased alignment or overlay quality.
摘要翻译：在半导体晶片上的图案的对准或覆盖测量中，可以通过选择一个对准结构中的一个对准结构来处理在相应的预定曝光区域的曝光区域中的预定数量的对准结构之一中的测量期间发生的误差替代曝光领域。后一曝光场不需要是预定义的一组曝光场的一部分，也就是说可以实现场间变化。晶片上的对准测量数量保持不变，并且质量得到提高。或者，当在相同的曝光场中使用另一对准结构时，通过进行场内变化，当替代目标考虑不同的最小结构尺寸时，该方法变得特别有利。由于在先前的CMP过程中具有不同的选择性，所以这样的目标可能不会被侵蚀，并且不会在测量中引起误差，从而提供更高的对准或覆盖质量。

2. 发明授权

US4157176A Apparatus for precisely stacking textile pieces of sheetlike form 失效
标题翻译：用于精确堆叠薄片状织物的装置
公开(公告)号：US4157176A
公开(公告)日：1979-06-05
申请号：US832770
申请日：1977-09-13
申请人： Albrecht Kaiser , Rolf Heine
发明人： Albrecht Kaiser , Rolf Heine
IPC分类号： A41H43/02 , B65H29/28 , B65H29/60
CPC分类号： A41H43/0214
摘要： A slip plate located at the discharge end of an endless band transport device is provided with apertures on both sides at the end remote from the transport device and a stop located at that edge between the apertures. Alternately operating clamping devices movable at right angles to the direction of movement of the textile pieces of the slip plate convey the textile pieces by clamping at the apertures to stacking tables to the right and left of the slip plate.
摘要翻译：位于环形带传送装置的排放端的滑板在远离传送装置的端部的两侧设置有孔，以及位于孔之间的该边缘处的挡块。与滑动板的纺织片的移动方向成直角移动的替代操作的夹紧装置通过夹紧孔而将织物片传送到滑板的右侧和左侧堆叠台。

3. 发明授权

US4395037A Apparatus for stacking textile fabric sheets on top of one another 失效
标题翻译：用于将织物织物层叠在一起的装置
公开(公告)号：US4395037A
公开(公告)日：1983-07-26
申请号：US265494
申请日：1981-05-20
申请人： Rolf Heine
发明人： Rolf Heine
IPC分类号： D06M17/00 , B29C63/00 , B32B37/00 , B65H31/26 , D04H11/04 , B65H29/70
CPC分类号： B65H31/26
摘要： An apparatus for clamping individual pieces of textile fabric exiting a fusing machine conveyor 13, for withdrawing the fabrics until the trailing edges thereof clear a photocell sensor 42, and for stacking the fabrics with aligned leading edges on a hinged and vertically movable table 19 includes a withdrawable stacking rake 21 and a cooperable, vertically movable clamping plate 20. The rake and plate comprise a plurality of laterlly spaced, longitudinally oriented prongs 38 and rods 37, respectively, which are relatively staggered such that they may be partially interleaved during operation to clamp a piece of fabric therebetween.
摘要翻译：用于夹紧离开定影机输送机13的各个织物的装置，用于抽出织物，直到其后缘清除光电池传感器42，并且将具有对准的前缘的织物堆叠在铰接和可垂直移动的工作台19上，包括：可抽出的堆耙21和可配合的可垂直移动的夹紧板20.耙和板分别包括多个相互间隔开的纵向定向的分支38和杆37，它们相对交错，使得它们在操作期间可以部分交错以夹紧其间的一块织物。

4. 发明授权

US4284462A Automatic stacking apparatus for variable length textile fabrics 失效
标题翻译：用于可变长度纺织品的自动堆垛装置
公开(公告)号：US4284462A
公开(公告)日：1981-08-18
申请号：US99178
申请日：1979-11-30
申请人： Rolf Heine
发明人： Rolf Heine
IPC分类号： B65H29/26 , A41H43/04 , B65H29/34 , B65H31/20 , B65H31/26 , B32B31/00
CPC分类号： A41H43/04 , Y10S414/114
摘要： An apparatus for stacking glued textile fabrics has photocells 43, 44 for controlling the withdrawal movement of a stacking table 25 in dependence on the length of the fabrics. The stacking table moves in the same direction as a fabric piece until the trailing edge of the fabric no longer interrupts a light beam, whereupon the table returns to its original position to receive further pieces of fabric. The apparatus also includes clamping means 37, 38 to firmly hold the already stacked fabrics.
摘要翻译：用于堆叠胶合纺织品的装置具有光电池43,44，用于根据织物的长度控制堆叠台25的取出运动。堆叠台沿与织物片相同的方向移动，直到织物的后缘不再中断光束，于是桌子返回到其原始位置以接收更多的织物。该装置还包括夹紧装置37,38以牢固地保持已堆叠的织物。

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