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1. 发明申请

US20070242359A1 Zinc-based film manipulation for an optical filter 有权
标题翻译：用于光学滤波器的基于锌的膜操作
公开(公告)号：US20070242359A1
公开(公告)日：2007-10-18
申请号：US11404391
申请日：2006-04-14
申请人： Roland Thielsch , Thomas Boehme , Chris Stoessel , Lee Boman
发明人： Roland Thielsch , Thomas Boehme , Chris Stoessel , Lee Boman
IPC分类号： G02B1/10
CPC分类号： G02B5/284 , C03C17/28 , G02B5/282
摘要： An optical filter is formed of a layer stack that includes metallic layers and dielectric layers, with at least one dielectric layer being defined by more than one zinc-based film. These zinc-based films have different percentages of zinc. The selections of the percentages are based upon the positions of the films within the dielectric layer. An unexpectedly low sheet resistance is available if the zinc-based film that immediately precedes forming a metallic layer has a percentage of zinc in the range of 80 percent to next to 100 percent. Process stabilization and manufacturing cost are provided by placing the percentage of the lower zinc-based film closer to 50 percent (25-75). Process stabilization is further enhanced by providing an indium-based film within the dielectric layer adjacent to the metallic layer.
摘要翻译：滤光器由包括金属层和电介质层的层叠层形成，其中至少一个电介质层由多于一个的锌基膜限定。这些锌基膜具有不同的锌含量。百分比的选择基于介电层内的膜的位置。如果在形成金属层之前的锌基膜的百分比在80％至100％之间的锌的百分比，则可获得意想不到的薄层电阻。通过将下层锌基膜的百分比置于50％（25-75）之间来提供工艺稳定和制造成本。通过在与金属层相邻的电介质层内提供铟基膜来进一步增强工艺稳定性。

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