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1. 发明授权

US4053334A Method for independent control of volatile dopants in liquid phase epitaxy 失效
标题翻译：挥发性物质在液相外延中独立控制的方法
公开(公告)号：US4053334A
公开(公告)日：1977-10-11
申请号：US707274
申请日：1976-07-21
申请人： Roger S. Ehle , Walter Garwacki
发明人： Roger S. Ehle , Walter Garwacki
IPC分类号： C30B19/06 , C30B19/10 , H01L21/208
CPC分类号： C30B19/062 , C30B19/106 , H01L21/02392 , H01L21/02461 , H01L21/02543 , H01L21/02576 , H01L21/02579 , H01L21/02581 , H01L21/02625 , H01L21/02628 , Y10S438/925
摘要： A method for independent control of a plurality of volatile dopants in liquid phase epitaxial fabrication of doped layers of semiconductors upon a semiconductor substrate, utilizes spatially separated sources of each dopant, each source being independently temperature controlled. One dopant source is located in a melt of a carrier metal and of the elements required to form the desired semiconductor material and has the saturation concentration thereof determined by the temperature of the melt, while the remaining dopant is vaporized to create a partial pressure thereof over the melt, with control of the source temperature controlling partial pressure and therefore concentration, which is less than or equal to the solubility of the remaining dopant at the melt temperature, in the melt.

2. 发明授权

US4563584A Solid state detector 失效
标题翻译：固态检测器
公开(公告)号：US4563584A
公开(公告)日：1986-01-07
申请号：US454469
申请日：1982-12-29
申请人： David M. Hoffman , Jack D. Kingsley , Roger S. Ehle
发明人： David M. Hoffman , Jack D. Kingsley , Roger S. Ehle
IPC分类号： G01T1/20 , G01T1/202
CPC分类号： G01T1/2002 , G01T1/2018 , G01T1/202
摘要： A solid state detector in which each scintillator is optimally configured and coupled with its associated sensing diode in a way which exploits light piping effects to enhance efficiency. Preferably, the detector is modular in nature. Each scintillator is a crystal having an index of refraction which differs as a function of direction through the crystal lattice, with the lowest index of refraction being parallel to the cleavage plane. The sides of each scintillator bar conform with the cleavage plane and are highly polished to light pipe photons created in the scintillator to the rear face for collection by an associated photodiode. The rear face is roughened to de-trap light, allowing transfer from the scintillator to the diode. Optical coupling means join the scintillators to their associated diodes to further enhance light transfer.
摘要翻译：一种固态检测器，其中每个闪烁体被最佳地配置并且以其利用光管效应来提高效率的方式与其相关联的感测二极管耦合。优选地，检测器本质上是模块化的。每个闪烁体是具有通过晶格的方向的函数而不同的折射率的晶体，其中折射率平行于解理面。每个闪烁体条的侧面与解理平面一致，并且被高度抛光到在闪烁体中产生的光管光子到后面，以便由相关的光电二极管收集。后面被粗糙化以去除光，从闪烁体转移到二极管。光耦合装置将闪烁体连接到其相关联的二极管以进一步增强光传输。

3. 发明授权

US5401668A Method for fabrication solid state radiation imager having improved scintillator adhesion 失效
标题翻译：具有改善的闪烁体附着力的固态辐射成像仪的制造方法
公开(公告)号：US5401668A
公开(公告)日：1995-03-28
申请号：US115084
申请日：1993-09-02
申请人： Robert F. Kwasnick , Roger S. Ehle , Richard J. Saia
发明人： Robert F. Kwasnick , Roger S. Ehle , Richard J. Saia
IPC分类号： G01T1/20 , H01L21/28 , H01L31/0216 , H01L31/0232 , H01L2/302
CPC分类号： H01L31/02161 , H01L31/02322 , Y10S438/974
摘要： A method of fabricating a radiation imager with strong structural integrity and adhesion between the scintillator and photosensor array includes the steps of forming a photosensor array on a substrate; depositing a barrier layer over the photosensor array, the barrier layer having an upper surface of silicon nitride; treating the silicon nitride upper surface of the barrier layer to prepare the surface for the deposition of material thereover; and depositing a scintillator material over the treated upper surface of the barrier layer. The silicon nitride upper surface of the barrier layer is typically treated by etching the surface, such as in a reactive ion etch, for a selected amount of time, with less than about 500 .ANG. of material being removed from the surface.
摘要翻译：一种制造具有强烈的结构完整性和闪烁体与光电传感器阵列之间的粘附性的辐射成像仪的方法包括以下步骤：在衬底上形成光电传感器阵列; 在所述光电传感器阵列上沉积阻挡层，所述阻挡层具有氮化硅的上表面; 处理阻挡层的氮化硅上表面以制备其上沉积材料的表面; 以及在所述被处理的所述阻挡层的上表面上沉积闪烁体材料。阻挡层的氮化硅上表面通常通过在表面上蚀刻表面，例如在反应离子蚀刻中处理选定的时间，其中小于约500的材料从表面上除去。

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