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1. 发明授权

US09518814B2 Integrated micro actuator and LVDT for high precision position measurements 有权
标题翻译：集成微型执行器和LVDT，用于高精度位置测量
公开(公告)号：US09518814B2
公开(公告)日：2016-12-13
申请号：US13959943
申请日：2013-08-06
申请人： Roger Proksch , Dan Bocek , Jason Cleveland , Matthew Longmire , Matthew Klonowski
发明人： Roger Proksch , Dan Bocek , Jason Cleveland , Matthew Longmire , Matthew Klonowski
IPC分类号： G01B7/14 , G01Q10/04 , H01F21/04
CPC分类号： G01D5/2291 , G01B7/14 , G01Q10/04 , H01F21/04
摘要： A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
摘要翻译：具有非铁磁压电驱动挠曲件的单个壳体具有不同直径的初级和次级线圈形式，一个同轴地在另一个内部集成在挠曲件中。限定主要和次要的平面的圆柱体在空间上不重叠。次级线圈形式可以沿相反方向缠绕并且被布线以提供变压器装置。可以以高精度差异地检测初级相对于二次管线在线圈中心轴线方向上的运动。

2. 发明授权

US07937991B2 Fully digitally controller for cantilever-based instruments 有权
标题翻译：用于悬臂式仪器的全数字控制器
公开(公告)号：US07937991B2
公开(公告)日：2011-05-10
申请号：US11768854
申请日：2007-06-26
申请人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
IPC分类号： G01B5/28
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/00 , G01Q30/04 , G01Q60/24
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译：用于基于悬臂的仪器的控制器，包括原子力显微镜，分子力探针仪器，高分辨率轮廓仪和化学或生物感测探头。控制器采用非常快速的模拟/数字转换器（ADC）对通常用于检测这些仪器中的悬臂偏转的光电检测器的输出进行采样。然后，利用现场可编程门阵列和数字信号处理器对输出信号产生的数字化表示进行处理，而无需使用模拟电子装置。模拟信号处理固有噪声，而数字计算本质上是“完美的”，因为它们不会对测量的信号添加任何随机噪声。通过现场可编程门阵列和数字信号处理器的处理使控制器的灵活性最大化，因为它可以通过编程手段进行变化，而无需修改控制器硬件。

3. 发明申请

US20100333240A1 Fully Digitally Controller for Cantilever-Based Instruments 有权
标题翻译：基于悬臂的仪器的全数字控制器
公开(公告)号：US20100333240A1
公开(公告)日：2010-12-30
申请号：US12826541
申请日：2010-06-29
申请人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
IPC分类号： G01Q10/00
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/00 , G01Q30/04 , G01Q60/24
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译：用于基于悬臂的仪器的控制器，包括原子力显微镜，分子力探针仪器，高分辨率轮廓仪和化学或生物传感探针。控制器采用非常快速的模拟/数字转换器（ADC）对通常用于检测这些仪器中的悬臂偏转的光检测器的输出进行采样。然后，利用现场可编程门阵列和数字信号处理器对输出信号产生的数字化表示进行处理，而不利用模拟电子装置。模拟信号处理本质上是嘈杂的，而数字计算本质上是“完美的”，因为它们不会对测量的信号增加任何随机噪声。通过现场可编程门阵列和数字信号处理器的处理可以最大限度地提高控制器的灵活性，因为它可以通过编程手段进行变化，而无需修改控制器硬件。

4. 发明授权

US07459904B2 Precision position sensor using a nonmagnetic coil form 有权
标题翻译：精密位置传感器采用非磁性线圈形式
公开(公告)号：US07459904B2
公开(公告)日：2008-12-02
申请号：US11744754
申请日：2007-05-04
申请人： Roger Proksch , Jason Cleveland , Dan Bocek
发明人： Roger Proksch , Jason Cleveland , Dan Bocek
IPC分类号： G01B7/14
CPC分类号： G01Q10/04 , G01D5/2066 , G01D5/2291 , H01F21/04
摘要： A position sensor has a moving coil part that is formed from a first coil form formed of a non ferromagnetic material, and a second coil that also has its form made of non-ferromagnetic material. The coil forms can be formed of non ferromagnetic adhesive. One of the coils moves relative to the other. The stationary coil part sufficiently close to said moving coil part such that magnetic flux from said moving coil part is induced into said stationary coil part. A primary coil is driven with a voltage. The operation senses voltages induced into a plurality of secondary coils, from movement of the primary coil relative to the secondary coils. The sensing can be done using a differential amplifier.
摘要翻译：位置传感器具有由非铁磁材料形成的第一线圈形状的动圈线圈部分和还具有由非铁磁材料制成的形状的第二线圈。线圈形式可以由非铁磁性粘合剂形成。其中一个线圈相对于另一个线圈移动。固定线圈部分足够靠近所述动圈管部分，使得来自所述动圈管部分的磁通量被感应到所述固定线圈部分。初级线圈由电压驱动。该操作通过初级线圈相对于次级线圈的运动来感测感应到多个次级线圈中的电压。感测可以使用差分放大器完成。

5. 发明申请

US20060186876A1 Linear variable differential transformers for high precision position measurements 有权
公开(公告)号：US20060186876A1
公开(公告)日：2006-08-24
申请号：US11401781
申请日：2006-04-10
申请人： Roger Proksch , Jason Cleveland , Dan Bocek
发明人： Roger Proksch , Jason Cleveland , Dan Bocek
IPC分类号： G01B7/30
CPC分类号： G01Q10/04 , G01D5/2066 , G01D5/2291 , H01F21/04
摘要： A linear variable transformer (LVDT) for use in a transducer. The LVDT has a non-ferromagnetic core which may eliminate Barkhausen noise and thereby improve the sensitivity of the resulting measurements. In one aspect, this system may be used in an atomic force microscope.

6. 发明申请

US20120266336A1 Fully Digitally Controller for Cantilever-Based Instruments 有权
标题翻译：基于悬臂的仪器的全数字控制器
公开(公告)号：US20120266336A1
公开(公告)日：2012-10-18
申请号：US13533078
申请日：2012-06-26
申请人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
IPC分类号： G01Q10/00
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/00 , G01Q30/04 , G01Q60/24
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译：用于基于悬臂的仪器的控制器，包括原子力显微镜，分子力探针仪器，高分辨率轮廓仪和化学或生物传感探针。控制器采用非常快速的模拟/数字转换器（ADC）对通常用于检测这些仪器中的悬臂偏转的光检测器的输出进行采样。然后，利用现场可编程门阵列和数字信号处理器对输出信号产生的数字化表示进行处理，而不利用模拟电子装置。模拟信号处理本质上是嘈杂的，而数字计算本质上是完美的，因为它们不会对测量的信号添加任何随机噪声。通过现场可编程门阵列和数字信号处理器的处理可以最大限度地提高控制器的灵活性，因为它可以通过编程手段进行变化，而无需修改控制器硬件。

7. 发明授权

US07234342B2 Fully digital controller for cantilever-based instruments 有权
标题翻译：全数字控制器，用于基于悬臂的仪器
公开(公告)号：US07234342B2
公开(公告)日：2007-06-26
申请号：US10740940
申请日：2003-12-18
申请人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario Viani , Clint Callahan
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario Viani , Clint Callahan
IPC分类号： G12B21/20
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/00 , G01Q30/04 , G01Q60/24
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译：用于基于悬臂的仪器的控制器，包括原子力显微镜，分子力探针仪器，高分辨率轮廓仪和化学或生物传感探针。控制器采用非常快速的模拟/数字转换器（ADC）对通常用于检测这些仪器中的悬臂偏转的光检测器的输出进行采样。然后，利用现场可编程门阵列和数字信号处理器对输出信号产生的数字化表示进行处理，而不利用模拟电子装置。模拟信号处理本质上是嘈杂的，而数字计算本质上是“完美的”，因为它们不会对测量的信号增加任何随机噪声。通过现场可编程门阵列和数字信号处理器的处理可以最大限度地提高控制器的灵活性，因为它可以通过编程手段进行变化，而无需修改控制器硬件。

8. 发明授权

US07233140B2 Position sensing assembly with sychronizing capability 有权
标题翻译：具有同步能力的位置传感组件
公开(公告)号：US07233140B2
公开(公告)日：2007-06-19
申请号：US11402482
申请日：2006-04-11
申请人： Roger Proksch , Jason Cleveland , Dan Bocek
发明人： Roger Proksch , Jason Cleveland , Dan Bocek
IPC分类号： G01B7/14
CPC分类号： G01Q10/04 , G01D5/2066 , G01D5/2291 , H01F21/04
摘要： A linear variable transformer, or LVDT, for use with the transducer, which has a non-ferromagnetic core that can eliminate Barkhausen noise. By eliminating the Barkhausen noise, the sensitivity of the resulting measurements can be improved. The LVDT is formed of multiple coil assemblies which are moved relative to one another, and by using a non-ferromagnetic material, are capable of obtaining 1 μ resolution or better. Circuitry for obtaining a synchronous output is described, allowing a differential amplifier to synchronize one signal to another.
摘要翻译：用于传感器的线性可变变压器或LVDT，其具有能够消除巴克豪森噪声的非铁磁芯。通过消除巴克豪森噪声，可以提高所得测量的灵敏度。 LVDT由相对于彼此移动的多个线圈组件形成，并且通过使用非铁磁材料，能够获得1分辨率或更好的分辨率。描述用于获得同步输出的电路，允许差分放大器将一个信号与另一信号同步。

9. 发明授权

US07084384B2 Diffractive optical position detector in an atomic force microscope having a moveable cantilever 有权
$Diffractive optical position detector in an atomic force microscope having a moveable cantilever$
标题翻译：具有可移动悬臂的原子力显微镜中的衍射光学位置检测器
公开(公告)号：US07084384B2
公开(公告)日：2006-08-01
申请号：US11093187
申请日：2005-03-28
申请人： Roger Proksch , Jason Cleveland , Dan Bocek
发明人： Roger Proksch , Jason Cleveland , Dan Bocek
IPC分类号： G02B7/04
CPC分类号： G01Q20/02 , G01Q70/06 , G02B26/0808
摘要： An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological and chemical sensors and the sample or a probe in surface profilometry. The invention involves the use of one or more diffractive optical elements, including diffraction gratings and holograms, combined with conventional optical elements, to form a plurality of light beams, each with a selectable shape and intensity, from a single light source, reflect the beams off mechanical objects and process the reflected beams, all to the end of measuring the position of such objects with a high degree of precision. The invention may also be used to effect mechanical changes in such objects. Devices with these improvements have numerous applications, including molecular force measurements, atomic force microscopy and manipulation technology, lithographic manufacturing, nanometer scale surface profiling and other aspects of nanotechnology.
摘要翻译：用于光学测量各种物体或物体阵列的位置或角度的装置和方法，包括扫描探针显微镜中的悬臂，微机械生物和化学传感器以及表面轮廓测量中的样品或探针。本发明涉及使用一个或多个衍射光学元件，包括衍射光栅和全息图，与常规光学元件组合，以形成多个光束，每个光束具有来自单个光源的可选择的形状和强度，反射束关闭机械物体并处理反射光束，最终以高精度测量这些物体的位置。本发明也可用于实现这些物体的机械变化。具有这些改进的器件有许多应用，包括分子力测量，原子力显微镜和操作技术，平版印刷制造，纳米级表面分析和纳米技术的其他方面。

10. 发明授权

US08925376B2 Fully digitally controller for cantilever-based instruments 有权
标题翻译：全数字控制器，用于基于悬臂的仪器
公开(公告)号：US08925376B2
公开(公告)日：2015-01-06
申请号：US13533078
申请日：2012-06-26
申请人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario B. Viani , Clint Callahan
IPC分类号： G01B5/28 , G01Q10/06 , G01Q60/24 , G01Q30/04 , B82Y35/00
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q10/00 , G01Q30/04 , G01Q60/24
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
摘要翻译：用于基于悬臂的仪器的控制器，包括原子力显微镜，分子力探针仪器，高分辨率轮廓仪和化学或生物传感探针。控制器采用非常快速的模拟/数字转换器（ADC）对通常用于检测这些仪器中的悬臂偏转的光检测器的输出进行采样。然后，利用现场可编程门阵列和数字信号处理器对输出信号产生的数字化表示进行处理，而不利用模拟电子装置。模拟信号处理本质上是嘈杂的，而数字计算本质上是“完美的”，因为它们不会对测量的信号增加任何随机噪声。通过现场可编程门阵列和数字信号处理器的处理可以最大限度地提高控制器的灵活性，因为它可以通过编程手段进行变化，而无需修改控制器硬件。

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