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    • 5. 发明申请
    • Nand memory arrays
    • Nand存储器阵列
    • US20050281092A1
    • 2005-12-22
    • US11209301
    • 2005-08-23
    • Roger Lindsay
    • Roger Lindsay
    • H01L21/60H01L21/8247H01L27/115G11C7/10
    • H01L27/11521H01L21/76897H01L27/115
    • A NAND memory array has a substrate, a source select gate formed on the substrate, and a drain select gate formed on the substrate. A string of floating-gate memory cells is formed on the substrate and is connected in series between the source select gate and the drain select gate. A drain contact has a head connected substantially perpendicularly to a stem. The head is aligned with the drain select gate and overlies a dielectric layer formed on the drain select gate. The stem overlies a polysilicon plug formed on the substrate. A bit line contact is in direct electrical contact with the head.
    • NAND存储器阵列具有衬底,形成在衬底上的源极选择栅极和形成在衬底上的漏极选择栅极。 在衬底上形成一串浮栅存储单元,并串联连接在源选择栅极和漏极选择栅极之间。 漏极接触头具有基本垂直于杆的连接头。 磁头与漏极选择栅极对准,并覆盖形成在漏极选择栅极上的电介质层。 茎覆盖形成在基底上的多晶硅塞。 位线接触器与头部直接电接触。