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1. 发明申请

US20070215846A1 ULTRAVIOLET-TRANSPARENT ALKANES AND PROCESSES USING SAME IN VACUUM AND DEEP ULTRAVIOLET APPLICATIONS 审中-公开
标题翻译：紫外线透明碱和在真空和深紫外线应用中使用相同的方法
公开(公告)号：US20070215846A1
公开(公告)日：2007-09-20
申请号：US11686612
申请日：2007-03-15
申请人： Roger French , Sheng Peng , Weiming Qiu , Robert Wheland
发明人： Roger French , Sheng Peng , Weiming Qiu , Robert Wheland
IPC分类号： F21V9/12
CPC分类号： G03F7/2041 , G03F7/70341
摘要： The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要翻译：本发明涉及在光耦合剂，光学胶粘剂，光学元件，用于半导体晶片和器件的光学检查介质以及浸没式光刻技术中使用对从约170nm至260nm范围内的UV波长高度透明的烷烃，特别是在 193和248 nm的曝光波长。

2. 发明申请

US20060281028A1 Processes and devices using polycyclic fluoroalkanes in vacuum and deep ultraviolet applications 失效
标题翻译：在真空和深紫外应用中使用多环氟烷烃的方法和装置
公开(公告)号：US20060281028A1
公开(公告)日：2006-12-14
申请号：US11149615
申请日：2005-06-09
申请人： Sheng Peng , Weiming Qiu , Roger French
发明人： Sheng Peng , Weiming Qiu , Roger French
IPC分类号： G03F7/20
CPC分类号： G03F7/2041 , G03F7/11 , G03F7/70341
摘要： Processes and apparatuses using polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycylic fluoroalkanes are useful in a wide variety of applications, including optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要翻译：提供使用对从约190nm至260nm范围内的紫外波长高度透明的多环氟烷烃的方法和装置。多晶氟烷烃可用于各种应用，包括光学偶联剂，光学粘合剂，光学元件，半导体晶片和器件的光学检查介质以及浸渍光刻，特别是在193和248nm的曝光波长。

3. 发明申请

US20060196801A1 Packages for alkanes having ultra-high transparency at 193 nm 失效
标题翻译：在193nm具有超高透明度的烷烃的包装
公开(公告)号：US20060196801A1
公开(公告)日：2006-09-07
申请号：US11070918
申请日：2005-03-02
申请人： Robert Wheland , Curtis Fincher , Roger French , Sheng Peng , Weiming Weiming
发明人： Robert Wheland , Curtis Fincher , Roger French , Sheng Peng , Weiming Weiming
IPC分类号： B65B31/00 , B65B31/02 , B65B1/04 , B65D85/84
CPC分类号： G03F7/2041
摘要： Disclosed are packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelengths of about 193 nm. The packages holding the liquid alkanes can be stored for a period of months or longer with little or no loss of transparency and stability. Also disclosed are methods for preparing the packages.
摘要翻译：公开了在约193nm的波长下保持显示高透明度和光化学稳定性的液体烷烃的包装。保持液体烷烃的包装可以保存几个月或更长时间，几乎没有透明度和稳定性的损失。还公开了制备包装的方法。

4. 发明申请

US20050286031A1 Use of highly purified hydrocarbons in vacuum ultraviolet applications 失效
标题翻译：在真空紫外线应用中使用高度纯化的碳氢化合物
公开(公告)号：US20050286031A1
公开(公告)日：2005-12-29
申请号：US11141285
申请日：2005-09-14
申请人： Roger French , Sheng Peng , Robert Wheland
发明人： Roger French , Sheng Peng , Robert Wheland
IPC分类号： C07C9/14 , G03B27/52 , G03B27/54 , G03C5/00 , G03F7/20
CPC分类号： G03F7/2041
摘要： The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要翻译：本发明涉及在光耦合剂，光学胶粘剂，光学元件，用于半导体晶片和器件的光学检查介质以及浸没式光刻技术中使用对从约170nm至260nm范围内的UV波长高度透明的烷烃，特别是在 193和248 nm的曝光波长。

5. 发明申请

US20070182896A1 Apparatus for recycling alkane immersion liquids and methods of employment 审中-公开
标题翻译：用于回收烷烃浸液的设备和使用方法
公开(公告)号：US20070182896A1
公开(公告)日：2007-08-09
申请号：US11517789
申请日：2006-09-09
申请人： Douglas Adelman , Roger French , Michael Lemon , Sheng Peng , Aaron Shoe , Robert Wheland
发明人： Douglas Adelman , Roger French , Michael Lemon , Sheng Peng , Aaron Shoe , Robert Wheland
IPC分类号： G02F1/1335
CPC分类号： G03F7/70341 , G03F7/2041
摘要： The present invention provides a clean closed loop fluid transport system and methods for recycling low absorbance liquid alkanes. The alkanes can be advantageously employed as immersion liquids in the production of electronic or integrated optical circuit elements by photolithographic methods employing ultraviolet wavelengths.
摘要翻译：本发明提供了一种清洁的闭环流体输送系统和用于再循环低吸收性液体烷烃的方法。烷烃可以有利地用作通过使用紫外线波长的光刻方法生产电子或集成光电路元件的浸液。

6. 发明授权

US07493743B2 Packages for alkanes having ultra-high transparency at 193 nm 失效
标题翻译：在193nm具有超高透明度的烷烃的包装
公开(公告)号：US07493743B2
公开(公告)日：2009-02-24
申请号：US11070918
申请日：2005-03-02
申请人： Robert Clayton Wheland , Curtis R. Fincher , Roger Harquail French , Sheng Peng , Weiming Qiu
发明人： Robert Clayton Wheland , Curtis R. Fincher , Roger Harquail French , Sheng Peng , Weiming Qiu
IPC分类号： B65B31/02
CPC分类号： G03F7/2041
摘要： A method for preparing packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelength of about 193 nm, wherein a sealable vessel is flushed with an inert gas to form an atmosphere of inert gas, a liquid alkane is charged into the vessel in the atmosphere of inert gas, and the charged vessel is sealed.
摘要翻译：一种在约193nm的波长下制备保持显示高透明度和光化学稳定性的液体烷烃的包装的方法，其中用惰性气体冲洗可密封容器以形成惰性气体气氛，在大气中将液体烷烃装入容器中的惰性气体，并且将带电容器密封。

7. 发明授权

US07435528B2 Processes and devices using polycyclic fluoroalkanes in vacuum and deep ultraviolet applications 失效
标题翻译：在真空和深紫外应用中使用多环氟烷烃的方法和装置
公开(公告)号：US07435528B2
公开(公告)日：2008-10-14
申请号：US11149615
申请日：2005-06-09
申请人： Sheng Peng , Weiming Qiu , Roger Harquail French
发明人： Sheng Peng , Weiming Qiu , Roger Harquail French
IPC分类号： G03C1/00 , G03B27/58
CPC分类号： G03F7/2041 , G03F7/11 , G03F7/70341
摘要： Processes and apparatuses using polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycylic fluoroalkanes are useful in a wide variety of applications, including optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要翻译：提供使用对从约190nm至260nm范围内的紫外波长高度透明的多环氟烷烃的方法和装置。多晶氟烷烃可用于各种应用，包括光学偶联剂，光学粘合剂，光学元件，半导体晶片和器件的光学检查介质以及浸渍光刻，特别是在193和248nm的曝光波长。

8. 发明授权

US07084314B1 Polycyclic fluoroalkanes 失效
标题翻译：多环氟烷烃
公开(公告)号：US07084314B1
公开(公告)日：2006-08-01
申请号：US11149635
申请日：2005-06-09
申请人： Roger Harquail French , Weiming Qiu , Sheng Peng
发明人： Roger Harquail French , Weiming Qiu , Sheng Peng
IPC分类号： C07C19/08
CPC分类号： C07C23/46 , C07C22/00 , C07C2603/66 , C07C2603/86
摘要： Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
摘要翻译：提供了对从约190nm到260nm范围内的UV波长高度透明的多环氟烷烃。多环氟烷烃适用于各种应用，特别是在电磁光谱的真空UV和深UV区域。例如，多环氟烷烃可用于光学偶联剂，光学粘合剂，光学元件，用于半导体晶片和器件的光学检查介质以及浸渍光刻，特别是在193和248nm曝光波长下。

9. 发明授权

US07078575B1 Processes for preparing high purity polycyclic fluoroalkanes 失效
标题翻译：制备高纯度多环氟代烷烃的方法
公开(公告)号：US07078575B1
公开(公告)日：2006-07-18
申请号：US11149614
申请日：2005-06-09
申请人： Weiming Qiu , Sheng Peng
发明人： Weiming Qiu , Sheng Peng
IPC分类号： C07C19/08
CPC分类号： C07C22/00 , C07C17/354 , C07C23/46 , C07C2603/86
摘要： Processes for preparing high purity polycyclic fluoroalkanes are provided. The polycyclic fluoroalkanes are useful as solvents, cleaning agents, heat transfer fluids, refrigerants, lubricants, and, in a preferred embodiment, by virtue of high refractive index and high transparency to UV wavelengths, optical applications in the vacuum ultraviolet (VUV).
摘要翻译：提供制备高纯度多环氟代烷烃的方法。多环氟烷烃可用作溶剂，清洁剂，传热流体，制冷剂，润滑剂，并且在优选的实施方案中，由于高折射率和对UV波长的高透明度，真空紫外线（VUV）中的光学应用。

10. 发明授权

US09478868B2 Corrugated horn antenna with enhanced frequency range 有权
标题翻译：具有增强频率范围的瓦楞喇叭天线
公开(公告)号：US09478868B2
公开(公告)日：2016-10-25
申请号：US13370275
申请日：2012-02-09
申请人： Cooper Henry , Sheng Peng , Ronald M. Westerberg , Paul Habeck , Floyd Phelps
发明人： Cooper Henry , Sheng Peng , Ronald M. Westerberg , Paul Habeck , Floyd Phelps
IPC分类号： H01Q13/00 , H01Q13/08 , H01Q1/38
CPC分类号： H01Q13/085 , H01Q1/38
摘要： A radiator element for transmission and reception of RF communications formed of a planar conductive material positioned upon a planar dielectric substrate surface. Two lobes formed of the conductive material have side edges abutting a cavity decreasing in cross section between the lobes. The cavity has a widest point configured to receive RF frequencies at the lowest frequency and a narrowest point configured to receive a highest frequency of the element. The widest and narrowest point may be changed during manufacture to fit the frequency spectrum needed. Opposing pairs of recess cavities formed in the side edges of the lobes along the decreasing edges of the cavity enhance the frequency of operation for frequencies paired to the distance between the pairs of notches. Projections are employable along the side edges to optimize impedance.
摘要翻译：用于发射和接收由位于平面电介质基片表面上的平面导电材料形成的RF通信的散热元件。由导电材料形成的两个凸角具有邻接在凸角之间横截面减小的空腔的侧边缘。空腔具有被配置为以最低频率接收RF频率的最宽点，并且被配置为接收该元件的最高频率的最窄点。在制造过程中，最宽和最窄的点可能会发生变化，以适应所需的频谱。沿着腔的下降边缘形成在凸角的侧边缘中的相对的凹槽对增加了与成对的凹口之间的距离成对的频率的操作频率。投影可以沿侧边使用，以优化阻抗。

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