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    • 6. 发明申请
    • VACUUM COATER DEVICE AND MECHANISM FOR SUPPORTING AND MANIPULATING WORKPIECES IN SAME
    • 用于支持和操作其工作的真空涂料装置和机构
    • US20080223291A1
    • 2008-09-18
    • US11685354
    • 2007-03-13
    • Robert William BruceTheodore Robert GrossmanJohn Douglas EvansBrian Harvey Pilsner
    • Robert William BruceTheodore Robert GrossmanJohn Douglas EvansBrian Harvey Pilsner
    • C23C14/00
    • C23C14/30C23C14/50C23C14/505C23C14/568
    • An apparatus for providing a vacuum coating to a workpiece, including: a coating chamber containing a coating material, with the coating chamber being operable at an elevated temperature and a sub-atmospheric pressure; an electron beam gun projecting an electron beam into the coating chamber and onto the coating material, where the electron beam gun is operable to melt the coating material and to evaporate molten coating material; and, a mechanism for supporting manipulating the workpiece in the coating chamber. The supporting mechanism further includes: a coupling device for retaining the workpiece; a joint connected to the coupling device enabling movement of the workpiece in all directions; an intermediate member connecting the coupling device and the joint; and, a device connected to the intermediate member for moving the workpiece in a designated vertical plane. The supporting mechanism may also include a device connected to the intermediate member for moving the workpiece in a designated horizontal plane.
    • 一种用于向工件提供真空涂层的设备,包括:包含涂层材料的涂层室,涂层室可在升高的温度和低于大气压的压力下操作; 电子束枪将电子束投射到涂覆室和涂覆材料上,其中电子束枪可操作以熔化涂层材料并蒸发熔融涂覆材料; 以及用于支撑在涂布室中操作工件的机构。 支撑机构还包括:用于保持工件的联接装置; 连接到联接装置的联接器,其能够使工件在所有方向上移动; 连接所述联接装置和所述接头的中间构件; 以及连接到中间构件的装置,用于在指定的垂直平面中移动工件。 支撑机构还可以包括连接到中间构件的装置,用于在指定的水平面中移动工件。