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    • 7. 发明申请
    • INTEGRATED CIRCUITS COMPRISING RESISTORS HAVING DIFFERENT SHEET RESISTANCES AND METHODS OF FABRICATING THE SAME
    • 包含具有不同表面电阻的电阻的集成电路及其制造方法
    • US20100013026A1
    • 2010-01-21
    • US12173407
    • 2008-07-15
    • Roger Allen Booth, JR.Kangguo ChengTerence B. Hook
    • Roger Allen Booth, JR.Kangguo ChengTerence B. Hook
    • H01L27/02H01L21/22
    • H01L27/0629H01L28/20
    • The fabrication of integrated circuits comprising resistors having the same structure but different sheet resistances is disclosed herein. In one embodiment, a method of fabricating an integrated circuit comprises: concurrently forming a first resistor laterally spaced from a second resistor above or within a semiconductor substrate, the first and second resistors comprising a doped semiconductive material; depositing a dopant receiving material across the first and second resistors and the semiconductor substrate; removing the dopant receiving material from upon the first resistor while retaining the dopant receiving material upon the second resistor; and annealing the first and second resistors to cause a first sheet resistance of the first resistor to be different from a second sheet resistance of the second resistor.
    • 本文公开了包括具有相同结构但具有不同薄层电阻的电阻器的集成电路的制造。 在一个实施例中,一种制造集成电路的方法包括:与半导体衬底之上或之内的第二电阻器横向隔开的第一电阻器同时形成,所述第一和第二电阻器包括掺杂的半导体材料; 在第一和第二电阻器和半导体衬底上沉积掺杂剂接收材料; 在所述第一电阻器上移除所述掺杂剂接收材料,同时将所述掺杂剂接收材料保持在所述第二电阻器上; 以及使所述第一和第二电阻器退火以使所述第一电阻器的第一薄层电阻与所述第二电阻器的第二薄层电阻不同。