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    • 3. 发明授权
    • Infrared sensor operable without cooling
    • 红外线传感器无需冷却即可
    • US5034608A
    • 1991-07-23
    • US404732
    • 1989-09-08
    • Lee S. TavrowAnita M. FlynnRodney A. Brooks
    • Lee S. TavrowAnita M. FlynnRodney A. Brooks
    • G01J5/34H01L27/148H01L37/02
    • G01J5/34H01L27/14881H01L37/02
    • An infrared sensor operable without cooling and thus usable at room temperature comprises a substrate supporting thin films of pyroelectric material and switched capacitor control circuitry. The control circuitry compares the absolute capacitance of a reference thin film to that of a sensor thin film, thereby sensing infrared radiation without the use of a chopper device. The reference thin film is thermally coupled to the substrate, and the sensor thin film is thermally insulated form the substrate. To increase the fill factor, the sensor thin film is placed directly above the control circuitry. In another apsect, the sensor is adpated to sense visible and infrared light by adding a CCD sensor and appropriate control circuitry to the substrate.
    • 可在不冷却的情况下可操作的红外线传感器可在室温下使用,其包括支撑热电材料薄膜和开关电容器控制电路的基板。 控制电路将参考薄膜的绝对电容与传感器薄膜的绝对电容进行比较,从而在不使用斩波器的情况下感测红外辐射。 参考薄膜热耦合到衬底,并且传感器薄膜与衬底热绝缘。 为了增加填充因子,传感器薄膜直接放置在控制电路的正上方。 在另一个apsect中,传感器适用于通过向基板添加CCD传感器和适当的控制电路来感测可见光和红外光。