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    • 9. 发明授权
    • Methods and apparatus for laser scribing wafers
    • 激光划片晶圆的方法和装置
    • US08364304B2
    • 2013-01-29
    • US12836448
    • 2010-07-14
    • Robert StarkstonAndrew ProctorSteve Terry
    • Robert StarkstonAndrew ProctorSteve Terry
    • H01L21/301H01L21/304
    • H01L21/78B23K26/364B23K26/40B23K2101/40B23K2103/50
    • A method for singulating dies from a wafer includes laser scribing a continuous line on each side of the die, and laser ablating an area adjacent the laser scribed continuous line on each side of the die. The laser ablations in the area adjacent the laser scribed continuous line on each side of the die being spaced from one another. The method also includes sawing the laser abated area adjacent the continuous line. A method for singulating dies from a wafer includes laser scribing a first continuous line, laser scribing a second continuous line spaced apart from the first continuous line, and laser scribing a third continuous line. The third continuous line positioned between the first continuous line and the second continuous line. The third continuous line overlaps the second continuous line and the third continuous line.
    • 用于从晶片上分离晶片的方法包括在模具的每一侧划分连续线的激光划线,以及在模具的每一侧上激光烧蚀邻近激光划线连续线的区域。 在与模具的每一侧相邻的激光划线连续线上的区域中的激光烧蚀彼此间隔开。 该方法还包括锯切邻近连续线的激光衰减区域。 用于从晶片上分离晶片的方法包括激光刻划第一连续线,激光刻划与第一连续线间隔开的第二连续线,以及激光刻划第三条连续线。 位于第一连续线和第二连续线之间的第三连续线。 第三连续线与第二连续线和第三连续线重叠。
    • 10. 发明授权
    • Methods for laser scribing wafers
    • 激光划片晶圆的方法
    • US07772090B2
    • 2010-08-10
    • US10674960
    • 2003-09-30
    • Robert StarkstonAndrew ProctorSteve Terry
    • Robert StarkstonAndrew ProctorSteve Terry
    • H01L21/301
    • H01L21/78B23K26/364B23K26/40B23K2101/40B23K2103/50
    • A method for singulating dies from a wafer includes laser scribing a continuous line on each side of the die, and laser ablating an area adjacent the laser scribed continuous line on each side of the die. The laser ablations in the area adjacent the laser scribed continuous line on each side of the die being spaced from one another. The method also includes sawing the laser abated area adjacent the continuous line. A method for singulating dies from a wafer includes laser scribing a first continuous line, laser scribing a second continuous line spaced apart from the first continuous line, and laser scribing a third continuous line. The third continuous line positioned between the first continuous line and the second continuous line. The third continuous line overlaps the second continuous line and the third continuous line.
    • 用于从晶片上分离晶片的方法包括在模具的每一侧划分连续线的激光划线,以及在模具的每一侧上激光烧蚀邻近激光划线连续线的区域。 在与模具的每一侧相邻的激光划线连续线上的区域中的激光烧蚀彼此间隔开。 该方法还包括锯切邻近连续线的激光衰减区域。 用于从晶片上分离晶片的方法包括激光刻划第一连续线,激光刻划与第一连续线间隔开的第二连续线,以及激光刻划第三条连续线。 位于第一连续线和第二连续线之间的第三连续线。 第三连续线与第二连续线和第三连续线重叠。