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    • 3. 发明申请
    • Gyroscopes Using Surface Electrodes
    • 陀螺仪使用表面电极
    • US20100257934A1
    • 2010-10-14
    • US12421016
    • 2009-04-09
    • Wenhua ZhangPeter George HartwellLennie K. KiyamaRobert G. Walmsley
    • Wenhua ZhangPeter George HartwellLennie K. KiyamaRobert G. Walmsley
    • G01C19/56
    • G01C19/5719
    • Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure.
    • 提供使用表面电极的陀螺仪。 在这方面,代表性的微机电系统(MEMS)陀螺仪等包括顶部基底和底部基底。 顶部基板包括开放和封闭的最外面的结构,以及设置在最外面结构内并包括设置在底面上的第一驱动电极的第一驱动结构。 底部基板设置在顶部基板的下方,并且包括设置在底部基板的顶表面上的第二驱动电极。 第二驱动电极基本上对准第一驱动电极下方,使得能够通过在第一和第二驱动电极之间产生的静电力将力施加到第一驱动结构。 第一和第二驱动电极还被配置为基于第一驱动结构的移动来提供电容信号。
    • 4. 发明授权
    • Gyroscopes using surface electrodes
    • 陀螺仪使用表面电极
    • US08272266B2
    • 2012-09-25
    • US12421016
    • 2009-04-09
    • Wenhua ZhangPeter George HartwellLennie K KiyamaRobert G Walmsley
    • Wenhua ZhangPeter George HartwellLennie K KiyamaRobert G Walmsley
    • G01C19/00G01P3/44G01P9/00G01P15/08
    • G01C19/5719
    • Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure.
    • 提供使用表面电极的陀螺仪。 在这方面,代表性的微机电系统(MEMS)陀螺仪等包括顶部基底和底部基底。 顶部基板包括开放和封闭的最外面的结构,以及设置在最外面结构内并包括设置在底面上的第一驱动电极的第一驱动结构。 底部基板设置在顶部基板的下方,并且包括设置在底部基板的顶表面上的第二驱动电极。 第二驱动电极基本上对准第一驱动电极下方,使得能够通过在第一和第二驱动电极之间产生的静电力将力施加到第一驱动结构。 第一和第二驱动电极还被配置为基于第一驱动结构的移动来提供电容信号。
    • 5. 发明授权
    • Compensating frequency mismatch in gyroscopes
    • 陀螺仪补偿频率失配
    • US08733171B2
    • 2014-05-27
    • US13119928
    • 2008-10-31
    • Wenhua ZhangRobert G. Walmsley
    • Wenhua ZhangRobert G. Walmsley
    • G01C19/56
    • G01C19/5755G01C19/574
    • Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate including an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
    • 提供可以补偿频率不匹配的陀螺仪。 在这方面,代表性的陀螺仪其中包括包括最外面结构的顶部基底,第一驱动结构和第一感测结构。 第一驱动结构和第一感测结构设置在最外面的结构内。 第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。 去除第一感测结构的顶表面上的质量的一部分。 陀螺仪还包括设置在顶部基板下方的底部基板。 底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。
    • 6. 发明申请
    • COMPENSATING FREQUENCY MISMATCH IN GYROSCOPES
    • 补偿频率误差在晶体中
    • US20110179866A1
    • 2011-07-28
    • US13119928
    • 2008-10-31
    • Wenhua ZhangRobert G. Walmsley
    • Wenhua ZhangRobert G. Walmsley
    • G01C19/02H05K13/00
    • G01C19/5755G01C19/574
    • Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate including an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
    • 提供可以补偿频率不匹配的陀螺仪。 在这方面,代表性的陀螺仪其中包括包括最外面结构的顶部基底,第一驱动结构和第一感测结构。 第一驱动结构和第一感测结构设置在最外面的结构内。 第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。 去除第一感测结构的顶表面上的质量的一部分。 陀螺仪还包括设置在顶部基板下方的底部基板。 底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。
    • 7. 发明授权
    • Adjusting the damping level of an encapsulated device
    • 调整封装装置的阻尼水平
    • US07966880B2
    • 2011-06-28
    • US12250089
    • 2008-10-13
    • Wenhua ZhangRobert G. WalmsleyPeter George Hartwell
    • Wenhua ZhangRobert G. WalmsleyPeter George Hartwell
    • G01P1/02
    • G01D11/245G01D11/10
    • Encapsulated devices that can adjust the damping level within are provided. In this regard, a representative encapsulated device, among others, comprises a bottom substrate, a middle substrate that is disposed above the bottom substrate, and a top substrate that is disposed above the middle substrate. The middle substrate comprises an outermost structure and at least one damping device. The at least one damping device is supported to the outermost structure. At least one top gap and a bottom gap are formed between the at least one damping device and the top and bottom substrates, respectively. The at least one top gap has at least one cavity depth that is adapted to adjust the damping level of the encapsulated device.
    • 提供可以调节阻尼水平的封装器件。 在这方面,代表性的封装装置尤其包括底部基板,设置在底部基板上方的中间基板和设置在中间基板上方的顶部基板。 中间基板包括最外面的结构和至少一个阻尼装置。 至少一个阻尼装置被支撑到最外面的结构。 在至少一个阻尼装置和顶部和底部基板之间分别形成至少一个顶部间隙和底部间隙。 所述至少一个顶部间隙具有适于调节所述封装装置的阻尼水平的至少一个腔体深度。