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1. 发明授权

US5552655A Low frequency mechanical resonator 失效
标题翻译：低频机械谐振器
公开(公告)号：US5552655A
公开(公告)日：1996-09-03
申请号：US450226
申请日：1995-05-25
申请人： Robert B. Stokes , Jay D. Cushman , Drew Cushman
发明人： Robert B. Stokes , Jay D. Cushman , Drew Cushman
IPC分类号： H03H9/05 , H03H9/17 , H03H9/58 , H01L41/08
CPC分类号： H03H9/585 , H03H9/02228 , H03H9/588
摘要： A low frequency mechanical resonator that resonates at relatively low frequencies and can be fabricated as part of an integrated circuit. The resonator includes a piezoelectric structure having a top piezoelectric layer and a bottom piezoelectric layer positioned over a recessed area in a substrate. A top input electrode is positioned on the top surface of the top piezoelectric layer, a middle shield electrode is positioned between the piezoelectric layers, and a bottom output electrode is positioned on the bottom surface of the bottom piezoelectric layer adjacent the recessed area. By applying an appropriate alternating current to the top electrode, the top piezoelectric layer is alternately contracted and expanded. Because the top piezoelectric layer is secured to the bottom piezoelectric layer, the piezoelectric structure will flex up and down in order to relieve stress within the structure. The flexing of the piezoelectric structure causes flexural waves within the piezoelectric structure which resonate at a particular frequency depending on the membrane material, membrane thickness, and the width of the recessed area. The top and bottom electrodes can be replaced with interdigital transducers in order to select particular higher order flexural resonances for higher resonant frequencies.
摘要翻译：低频机械谐振器，其在较低频率下谐振并可作为集成电路的一部分制造。谐振器包括具有位于衬底中的凹陷区域上方的顶部压电层和底部压电层的压电结构。顶部输入电极位于顶部压电层的顶表面上，中间屏蔽电极位于压电层之间，底部输出电极位于邻近凹陷区域的底部压电层的底表面上。通过向顶部电极施加适当的交流电，顶部压电层交替地收缩和膨胀。因为顶部压电层被固定到底部压电层，所以压电结构将上下弯曲以减轻结构内的应力。压电结构的弯曲会导致压电结构内的弯曲波，其根据膜材料，膜厚度和凹陷区域的宽度以特定频率共振。顶部和底部电极可以用叉指式换能器代替，以便为更高的谐振频率选择特定的较高阶弯曲谐振。

2. 发明授权

US5382930A Monolithic multipole filters made of thin film stacked crystal filters 失效
标题翻译：由薄膜堆叠晶体滤波器制成的单片多极滤波器
公开(公告)号：US5382930A
公开(公告)日：1995-01-17
申请号：US993575
申请日：1992-12-21
申请人： Robert B. Stokes , Edward M. Garber , Jay D. Crawford , Drew Cushman
发明人： Robert B. Stokes , Edward M. Garber , Jay D. Crawford , Drew Cushman
IPC分类号： H03H3/04 , H03H9/56 , H03H9/58
CPC分类号： H03H9/588 , H03H3/04 , H03H9/585
摘要： This invention discloses a monolithic multipole stacked crystal filter comprised of a series of cascaded 2-port semiconductor bulk acoustic resonator stacked crystal filters electrically cascaded and a shunt inductor connected between each of the 2-port filters. Each of the 2-port filters including a first and second piezoelectric layer, typically aluminum nitride. A first input electrode is positioned on a top surface of one of the piezoelectric layers and a second output electrode is positioned on a bottom surface of the other of the piezoelectric layers. A ground electrode is positioned between the piezoelectric layers. In this regard, the piezoelectric layers will resonate at a resonant frequency and provide bandpass filter characteristics. The complete monolithic multipole filter provides control of the passband shape which yields highly desirable filter characteristics.
摘要翻译：本发明公开了一种单片多极叠层晶体滤波器，由一系列级联的2端口半导体体声波谐振器和级联的层叠晶体滤波器以及连接在每个2端口滤波器之间的并联电感器组成。每个2端口滤波器包括第一和第二压电层，通常为氮化铝。第一输入电极位于压电层之一的顶表面上，第二输出电极位于另一个压电层的底表面上。接地电极位于压电层之间。在这方面，压电层将以谐振频率谐振并提供带通滤波器特性。完整的单片多极滤波器提供对通带形状的控制，其产生非常期望的滤波器特性。

3. 发明授权

US5446306A Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR) 失效
标题翻译：薄膜电压调谐半导体体声波谐振器（SBAR）
公开(公告)号：US5446306A
公开(公告)日：1995-08-29
申请号：US166338
申请日：1993-12-13
申请人： Robert B. Stokes , Jay D. Crawford , Drew Cushman , Alvin M. W. Kong
发明人： Robert B. Stokes , Jay D. Crawford , Drew Cushman , Alvin M. W. Kong
IPC分类号： H04R17/10 , H01L29/82 , H01L41/04 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H03H9/02 , H03H9/17 , H03H9/58
CPC分类号： H03H9/585 , H03H9/02102 , H03H2009/02196
摘要： Disclosed is a thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR). A piezoelectric film is positioned between a first electrode and a second electrode and positioned adjacent a semiconductor substrate containing a via hole. A variable voltage source applies a DC bias voltage to the electrodes which causes an electric field to be created between the electrodes within the piezoelectric film. The resulting electric field causes the piezoelectric film to resonate at a frequency different than its unbiased resonant frequency. By adjusting the variable voltage source to change the DC bias voltage, the resonant frequency from the thin film semiconductor bulk acoustic resonator (SBAR) can be varied.
摘要翻译：公开了薄膜电压调谐半导体体声波谐振器（SBAR）。压电膜位于第一电极和第二电极之间并且位于邻近包含通孔的半导体衬底上。可变电压源对电极施加DC偏置电压，这导致在压电膜内的电极之间产生电场。所产生的电场使得压电膜以不同于其无偏的共振频率的频率谐振。通过调节可变电压源来改变直流偏置电压，可以改变来自薄膜半导体体声波谐振器（SBAR）的谐振频率。

4. 发明授权

US4716390A Magnetostatic wave channelizer 失效
标题翻译：静电波通道器
公开(公告)号：US4716390A
公开(公告)日：1987-12-29
申请号：US907546
申请日：1986-09-15
申请人： Jeffrey H. Elliott , Robert B. Stokes , David Penunuri , Kuo-Hsiung Yen
发明人： Jeffrey H. Elliott , Robert B. Stokes , David Penunuri , Kuo-Hsiung Yen
IPC分类号： H03H2/00 , H01P1/20 , H01P1/213
CPC分类号： H03H2/001
摘要： A magnetostatic wave (MSW) device for performing spectral analysis of an input signal containing signal components of very high frequency, well in excess of 1 GHz (gigahertz). An input transducer array couples the input signal to a magnetostatic propagating medium, such as a film of yttrium-iron-garnet (YIG), in such a manner that the array effectively provides multiple wave sources spaced along a predetermined arc on the propagating medium, and the waves combine constructively at frequency-dependent points in a focal region of the medium, spaced apart from the input array. Output transducers located at these frequency-dependent points generate output signals indicative of various selected frequency components of the input signal.
摘要翻译：一种用于对含有超过1GHz（千兆赫兹）的非常高频率的信号分量的输入信号进行频谱分析的静磁波（MSW）装置。输入传感器阵列将输入信号耦合到静磁传播介质，例如钇 - 铁 - 石榴石（YIG）的膜，使得阵列有效地提供沿着传播介质上的预定电弧间隔开的多个波源，并且波形在介质的聚焦区域中的频率相关点处构造性地结合，与输入阵列间隔开。位于这些频率相关点处的输出换能器产生指示输入信号的各种选定频率分量的输出信号。

5. 发明授权

US4707631A Isotropic acoustic wave substrate 失效
标题翻译：各向同性声波衬底
公开(公告)号：US4707631A
公开(公告)日：1987-11-17
申请号：US886457
申请日：1986-07-17
申请人： Robert B. Stokes , Kuo-Hsiung Yen , Kei-Fung Lau , Reynold S. Kagiwada , Michael J. Delaney
发明人： Robert B. Stokes , Kuo-Hsiung Yen , Kei-Fung Lau , Reynold S. Kagiwada , Michael J. Delaney
IPC分类号： H03H3/08 , H03H9/02 , H03H9/145 , H01L41/08
CPC分类号： H03H9/1455 , H03H3/08 , H03H9/02559
摘要： A surface acoustic wave (SAW) diffraction-effect or interference-effect device with a highly isotropic substrate having a high coupling coefficient and low attenuation losses. The use of X-propagating rotated-Y-cut lithium niobate as the SAW substrate, with the Y rotation angle selected at 121 degrees, provides a practically isotropic material, with a high coupling coefficient and relatively low attenuation losses.
摘要翻译：具有高耦合系数和低衰减损耗的高均相衬底的表面声波（SAW）衍射效应或干涉效应器件。使用X传播的旋转Y型切割铌酸锂作为SAW基片，其中Y旋转角度选择为121度，提供实际上各向同性的材料，具有高耦合系数和相对低的衰减损耗。

6. 再颁专利

USRE45733E1 MEMS millimeter wave switches 有权
标题翻译： MEMS毫米波开关
公开(公告)号：USRE45733E1
公开(公告)日：2015-10-06
申请号：US13238433
申请日：2011-09-21
申请人： Robert B. Stokes , Alvin M. Kong
发明人： Robert B. Stokes , Alvin M. Kong
IPC分类号： H01P1/10
CPC分类号： H01P1/10 , H01H59/0009 , H01P1/127
摘要： An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.
摘要翻译： RF开关可用于毫米波频率和30 GHz及以上的更高频率。本发明的四个实施例被配置为接地开关。两个接地开关实施例被配置有平面空气桥。这两个实施例都被配置为通过引入接地止动件来在传输线和地之间桥接长度被缩短。另外两个接地开关实施例包括升高的金属跷跷板。在这些实施例中，通过适当的跷跷板结构的尺寸和定位，缩短到地的路径被提供相对较低的电感。最后，宽带电力开关实施例被配置为仅利用空气桥的一小部分来承载信号。相对短的路径长度导致相对低的电感和电阻降低了开关的RF功率损耗，从而增加了开关的RF功率处理能力。

7. 发明授权

US5283458A Temperature stable semiconductor bulk acoustic resonator 失效
标题翻译：温度稳定的半导体体声波谐振器
公开(公告)号：US5283458A
公开(公告)日：1994-02-01
申请号：US859768
申请日：1992-03-30
申请人： Robert B. Stokes , Kei-fung Lau , James Chung-Kei Lau
发明人： Robert B. Stokes , Kei-fung Lau , James Chung-Kei Lau
IPC分类号： H03H9/17 , H01L29/66
CPC分类号： H03H9/172
摘要： This invention discloses a semiconductor bulk acoustic resonator including at least one thin film piezoelectric layer positioned on a semiconductor substrate. The acoustic resonator includes a heating ring positioned around the outer perimeter of the piezoelectric layer in order to heat the piezoelectric layer to a desirable elevated temperature. A heat sensing film fabricated on the piezoelectric layer monitors the temperature of the piezoelectric layer such that the heating ring maintains the piezoelectric layer at a constant temperature. By this, an oscillator circuit using this semiconductor bulk acoustic resonator as the frequency controlling element can maintain a constant frequency over a wide range of temperatures which may affect frequency stability.
摘要翻译：本发明公开了一种半导体体声波谐振器，其包括位于半导体衬底上的至少一个薄膜压电层。声谐振器包括围绕压电层的外周定位的加热环，以便将压电层加热到期望的高温。制造在压电层上的感热膜监测压电层的温度，使得加热环将压电层保持在恒定温度。由此，使用该半导体体声波谐振器作为频率控制元件的振荡电路能够在可能影响频率稳定性的宽温度范围内保持恒定的频率。

8. 发明授权

US5179309A Surface acoustic wave chirp filter 失效
标题翻译：表面声波啁啾滤波器
公开(公告)号：US5179309A
公开(公告)日：1993-01-12
申请号：US152203
申请日：1988-02-04
申请人： Robert B. Stokes , Kuo-Hsiung Yen , Jeffrey H. Elliott
发明人： Robert B. Stokes , Kuo-Hsiung Yen , Jeffrey H. Elliott
IPC分类号： H03H9/145 , H03H9/42
CPC分类号： H03H9/72 , H03H9/14547 , H03H9/14555 , H03H9/14561 , H03H9/14564 , H03H9/44
摘要： A surface acoustic wave (SAW) chirp signal processor having a piezoelectric substrate, an array of input transducers and an array of output transducers. In its chirp compression mode, the device has chirp signals applied in parallel to its input transducers and produces compressed output pulses at its output transducers, corresponding to selected chirp rates. The input transducers are successively offset with respect to a focal point on the array of output transducers, by distances that successively and linearly increase or decrease from transducer to transducer, consistent with the increase or decrease in the wavelength of the chirp signals. The device may also be used in a pulse expansion mode, by inputting a broadband pulse into a selected one of the output transducers. The input transducers then produce a chirp signal having a rate corresponding the selected to output transducer.
摘要翻译：具有压电衬底的表面声波（SAW）线性调频信号处理器，输入换能器阵列和输出换能器阵列。在其啁啾压缩模式下，该装置具有与其输入换能器并联的啁啾信号，并在其输出的换能器处产生对应于所选啁啾率的压缩输出脉冲。输入换能器相对于输出换能器阵列上的焦点，依据线性调频脉冲信号的波长的增加或减小，连续地从换能器到换能器逐渐增加或减少的距离偏移。该装置还可以以脉冲扩展模式使用，通过将宽带脉冲输入到选定的一个输出换能器中。然后，输入换能器产生具有对应于所选输出换能器的速率的啁啾信号。

9. 发明授权

US4926146A Parallel-to-serial signal processor using surface acoustic waves 失效
标题翻译：使用表面声波的并行到串行信号处理器
公开(公告)号：US4926146A
公开(公告)日：1990-05-15
申请号：US161524
申请日：1988-05-09
申请人： Kuo-Hsuing Yen , Reynold S. Kagiwada , Robert B. Stokes , Marshall Y. Huang
发明人： Kuo-Hsuing Yen , Reynold S. Kagiwada , Robert B. Stokes , Marshall Y. Huang
IPC分类号： H03H9/02
CPC分类号： H03H9/02976
摘要： A surface acoustic wave (SAW) device for converting multiple parallel signals to a smaller number of serial signals. The device includes a piezoelectric substrate and a surface acoustic wave (SAW) input transducer for propagating periodic surface acoustic waves across the substrate. The parallel signals are input to the device through an array of acoustic charge transport (ACT) input transducers, which convert the signals into packets of electrical charge that are transported across the device with the surface acoustic waves generated at the SAW input transducer. An ACT output transducer converts the charge packets back into electrical signals, but in serial rather than parallel form. The converter of the invention can be usefully combined with a SAW channelizer or spectrum analyzer, to provide serial outputs from the analyzer.
摘要翻译：一种用于将多个并行信号转换为较少数量的串行信号的表面声波（SAW）装置。该装置包括压电基片和表面声波（SAW）输入换能器，用于在基片上传播周期性表面声波。并行信号通过声电荷传输（ACT）输入传感器的阵列输入到器件，其将信号转换成跨过器件传输的电荷分组，并在SAW输入传感器处产生声表面波。 ACT输出传感器将电荷数据包转换成电信号，但是以串行方式而不是并行形式转换。本发明的转换器可以有效地与SAW通道器或频谱分析仪组合，以提供来自分析仪的串行输出。

10. 再颁专利

USRE45704E1 MEMS millimeter wave switches 有权
公开(公告)号：USRE45704E1
公开(公告)日：2015-09-29
申请号：US11334823
申请日：2006-01-17
申请人： Robert B. Stokes , Alvin M. Kong
发明人： Robert B. Stokes , Alvin M. Kong
IPC分类号： H01P1/10 , H01P1/12
CPC分类号： H01P1/10 , H01H59/0009 , H01P1/127
摘要： An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.

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