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1. 发明申请

US20050062363A1 Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement 有权
标题翻译：压电振荡电路，制造方法和滤波器布置
公开(公告)号：US20050062363A1
公开(公告)日：2005-03-24
申请号：US10869817
申请日：2004-06-16
申请人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
发明人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
IPC分类号： H03H3/04 , H03H9/17 , H01B13/00 , H02N2/00
CPC分类号： H03H3/04 , Y10T29/42 , Y10T29/49155 , Y10T29/49156
摘要： In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
摘要翻译：在制造薄膜技术中的压电振荡电路的方法中，其中振荡电路包括预定的固有频率和多层，首先产生压电振荡电路的至少第一层。随后，通过处理第一层，执行频率校正。随后，产生并处理至少第二层的压电振荡电路，以执行第二频率校正。

2. 发明申请

US20050012568A1 BAW resonator 有权
标题翻译： BAW谐振器
公开(公告)号：US20050012568A1
公开(公告)日：2005-01-20
申请号：US10821116
申请日：2004-04-08
申请人： Robert Aigner , Martin Handtmann , Stephan Marksteiner , Winfried Nessler
发明人： Robert Aigner , Martin Handtmann , Stephan Marksteiner , Winfried Nessler
IPC分类号： H03H9/00 , H03H9/17 , H03H9/58 , H03H9/54
CPC分类号： H03H9/583 , H03H9/0095 , H03H9/174 , H03H9/175 , H03H9/176 , H03H9/178 , H03H9/581 , Y10T29/42
摘要： A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer and the second piezoelectric layer are acoustically coupled with each other.
摘要翻译： BAW谐振器包括由朝向第一方向定向的材料制成的第一压电层和由朝向与第一方向相反的第二方向定向的材料制成的第二压电层。第一压电层和第二压电层彼此声学耦合。

3. 发明授权

US06975183B2 BAW resonator having piezoelectric layers oriented in opposed directions 有权
标题翻译： BAW谐振器具有沿相反方向取向的压电层
公开(公告)号：US06975183B2
公开(公告)日：2005-12-13
申请号：US10821116
申请日：2004-04-08
申请人： Robert Aigner , Martin Handtmann , Stephan Marksteiner , Winfried Nessler
发明人： Robert Aigner , Martin Handtmann , Stephan Marksteiner , Winfried Nessler
IPC分类号： H03H9/00 , H03H9/17 , H03H9/58 , H03H9/54 , H03H3/007 , H03H9/56
CPC分类号： H03H9/583 , H03H9/0095 , H03H9/174 , H03H9/175 , H03H9/176 , H03H9/178 , H03H9/581 , Y10T29/42
摘要： A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer and the second piezoelectric layer are acoustically coupled with each other.
摘要翻译： BAW谐振器包括由朝向第一方向定向的材料制成的第一压电层和由朝向与第一方向相反的第二方向定向的材料制成的第二压电层。第一压电层和第二压电层彼此声学耦合。

4. 发明授权

US08365372B2 Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement 有权
标题翻译：压电振荡电路，制造方法和滤波器布置
公开(公告)号：US08365372B2
公开(公告)日：2013-02-05
申请号：US12271530
申请日：2008-11-14
申请人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
发明人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
IPC分类号： H04R17/10 , H05K3/10
CPC分类号： H03H3/04 , Y10T29/42 , Y10T29/49155 , Y10T29/49156
摘要： In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
摘要翻译：在制造薄膜技术中的压电振荡电路的方法中，其中振荡电路包括预定的固有频率和多个层，首先产生压电振荡电路的至少第一层。随后，通过处理第一层，执行频率校正。随后，产生并处理至少第二层的压电振荡电路，以执行第二频率校正。

5. 发明授权

US07455786B2 Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement 有权
标题翻译：压电振荡电路，制造方法和滤波器布置
公开(公告)号：US07455786B2
公开(公告)日：2008-11-25
申请号：US10869817
申请日：2004-06-16
申请人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
发明人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephan Marksteiner , Winfried Nessler , Hans-Joerg Timme
IPC分类号： H02N2/00 , H01B13/00
CPC分类号： H03H3/04 , Y10T29/42 , Y10T29/49155 , Y10T29/49156
摘要： In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
摘要翻译：在制造薄膜技术中的压电振荡电路的方法中，其中振荡电路包括预定的固有频率和多个层，首先产生压电振荡电路的至少第一层。随后，通过处理第一层，执行频率校正。随后，产生并处理至少第二层的压电振荡电路，以执行第二频率校正。

6. 发明申请

US20090064477A1 PIEZOELECTRIC OSCILLATING CIRCUIT, METHOD FOR MANUFACTURING THE SAME AND FILTER ARRANGEMENT 有权
标题翻译：压电振荡电路，其制造方法和滤波器布置
公开(公告)号：US20090064477A1
公开(公告)日：2009-03-12
申请号：US12271530
申请日：2008-11-14
申请人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephen Marksteiner , Winfried Nessler , Hans-Joerg Timme
发明人： Robert Aigner , Lueder Elbrecht , Martin Handtmann , Stephen Marksteiner , Winfried Nessler , Hans-Joerg Timme
IPC分类号： H01L41/22
CPC分类号： H03H3/04 , Y10T29/42 , Y10T29/49155 , Y10T29/49156
摘要： In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
摘要翻译：在制造薄膜技术中的压电振荡电路的方法中，其中振荡电路包括预定的固有频率和多个层，首先产生压电振荡电路的至少第一层。随后，通过处理第一层，执行频率校正。随后，产生并处理至少第二层的压电振荡电路，以执行第二频率校正。

7. 发明申请

US20090096549A1 Apparatus with acoustically coupled BAW resonators and a method for matching impedances 有权
标题翻译：具有声耦合BAW谐振器的装置和用于匹配阻抗的方法
公开(公告)号：US20090096549A1
公开(公告)日：2009-04-16
申请号：US11871665
申请日：2007-10-12
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
IPC分类号： H03H9/58 , H01L41/22
CPC分类号： H03H9/584 , H03H9/0004 , H03H9/0095 , H03H9/60 , Y10T29/42
摘要： An apparatus includes a first bulk acoustic wave (BAW) device including a first impedance and a second BAW device including a second impedance, wherein the first and second impedances are different and the first and second BAW devices are acoustically coupled.
摘要翻译：一种装置包括包括第一阻抗的第一体声波（BAW）装置和包括第二阻抗的第二BAW装置，其中第一和第二阻抗不同，并且第一和第二BAW装置是声学耦合的。

8. 发明授权

US07786826B2 Apparatus with acoustically coupled BAW resonators and a method for matching impedances 有权
标题翻译：具有声耦合BAW谐振器的装置和用于匹配阻抗的方法
公开(公告)号：US07786826B2
公开(公告)日：2010-08-31
申请号：US11871665
申请日：2007-10-12
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
IPC分类号： H03H9/54 , H03H7/38
CPC分类号： H03H9/584 , H03H9/0004 , H03H9/0095 , H03H9/60 , Y10T29/42
摘要： An apparatus includes a first bulk acoustic wave (BAW) device including a first impedance and a second BAW device including a second impedance, wherein the first and second impedances are different and the first and second BAW devices are acoustically coupled.
摘要翻译：一种装置包括包括第一阻抗的第一体声波（BAW）装置和包括第二阻抗的第二BAW装置，其中第一和第二阻抗不同，并且第一和第二BAW装置是声学耦合的。

9. 发明申请

US20100107389A1 METHOD OF FABRICATING AN ELECTRODE FOR A BULK ACOUSTIC RESONATOR 审中-公开
标题翻译：制造用于大容量声学谐振器的电极的方法
公开(公告)号：US20100107389A1
公开(公告)日：2010-05-06
申请号：US12646084
申请日：2009-12-23
申请人： Winfried Nessler , Robert Thalhammer , Thomas Rainer Herzog , Martin Handtmann , Lueder Elbrecht
发明人： Winfried Nessler , Robert Thalhammer , Thomas Rainer Herzog , Martin Handtmann , Lueder Elbrecht
IPC分类号： H04R31/00 , H01L41/083 , H01L41/22
CPC分类号： H03H3/02 , H03H9/171 , H03H9/584 , H03H9/585 , Y10T29/42 , Y10T29/49005 , Y10T29/49156
摘要： In one embodiment, a method of producing a resonator in thin-film technology is described. The resonator comprises a piezoelectric layer arranged at least partially between a lower electrode and an upper electrode, the resonator being formed over a substrate. The method comprises: forming the lower electrode of the resonator over the substrate; depositing and patterning an insulating layer over the substrate, the insulating layer comprising a thickness substantially equal to a thickness of the lower electrode; removing a portion of the insulating layer to partially expose a surface of the lower electrode; removing a portion of the insulating layer over the surface of the lower electrode by chemical mechanical polishing; forming the piezoelectric layer over the lower electrode; and producing the upper electrode on the piezoelectric layer.
摘要翻译：在一个实施例中，描述了一种制造薄膜技术中的谐振器的方法。谐振器包括至少部分地布置在下电极和上电极之间的压电层，所述谐振器形成在衬底上。该方法包括：在衬底上形成谐振器的下电极; 在衬底上沉积和图案化绝缘层，绝缘层包括基本上等于下电极厚度的厚度; 去除所述绝缘层的一部分以部分地暴露所述下电极的表面; 通过化学机械抛光在所述下电极的表面上去除所述绝缘层的一部分; 在下电极上形成压电层; 并在压电层上制造上电极。

10. 发明授权

US07339445B2 BAW duplexer without phase shifter 有权
标题翻译： BAW双工器无移相器
公开(公告)号：US07339445B2
公开(公告)日：2008-03-04
申请号：US11246996
申请日：2005-10-07
申请人： Robert Aigner , Martin Handtmann
发明人： Robert Aigner , Martin Handtmann
IPC分类号： H03H9/70
CPC分类号： H03H9/706
摘要： A duplexer for connection with an antenna comprises an antenna port, a transmitting filter comprising bulk acoustic wave (BAW) resonators having a first antenna side impedance coupled with the antenna port, a receiving filter comprising BAW resonators having a second antenna side impedance coupled with the antenna port, and a shunt inductance coupled between the antenna port and ground. The shunt inductance and the first and second antenna side impedances of the transmitting filter and the receiving filter are selected in such a way that the shunt inductance turns the first and second input impedance in a negative direction in a Smith diagram.
摘要翻译：用于与天线连接的双工器包括天线端口，发射滤波器，包括具有与天线端口耦合的第一天线侧阻抗的体声波（BAW）谐振器，接收滤波器，包括具有与第二天线侧阻抗耦合的第二天线侧阻抗的BAW谐振器天线端口和耦合在天线端口和地之间的并联电感。选择发射滤波器和接收滤波器的并联电感和第一和第二天线侧阻抗，使得并联电感在史密斯图中将负的第一和第二输入阻抗转变成负方向。

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