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    • 5. 发明申请
    • Gas distribution system for improved transient phase deposition
    • 用于改善瞬态相沉积的气体分配系统
    • US20060113038A1
    • 2006-06-01
    • US11123453
    • 2005-05-04
    • Sudhir GondhalekarRobert DuncanSiamak SalimianMuhammad RasheedHarry WhitesellBruno GeoffrionPadmanabhan KrishnarajRudolf Gujer
    • Sudhir GondhalekarRobert DuncanSiamak SalimianMuhammad RasheedHarry WhitesellBruno GeoffrionPadmanabhan KrishnarajRudolf Gujer
    • H01L21/306C23F1/00
    • C23C16/4558
    • Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber. In one embodiment, a gas distribution system comprises a gas ring including an outer surface and an inner surface, and a gas inlet disposed at the outer surface of the gas ring. The gas inlet is fluidicly coupled with a first channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of gas outlets are distributed over the inner surface of the gas ring, and are fluidicly coupled with a second channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of orifices are fluidicly coupled between the first channel and the second channel. The plurality of orifices are spaced from the gas inlet by a plurality of distances, and have sizes which vary with the distances from the gas inlet as measured along the first channel, such that the size of the orifice increases with an increase in the distance between the orifice and the gas inlet as measured along the first channel.
    • 本发明的实施例涉及一种将气体更均匀地分配到处理室中的气体分配系统。 在一个实施例中,气体分配系统包括包括外表面和内表面的气环,以及设置在气环的外表面处的气体入口。 气体入口与设置在气体环的外表面和内表面之间的第一通道流体耦合。 多个气体出口分布在气环的内表面上,并且与设置在气体环的外表面和内表面之间的第二通道流体连接。 多个孔流体耦合在第一通道和第二通道之间。 多个孔与气体入口间隔多个距离,并且具有随着沿着第一通道测量的与气体入口的距离而变化的尺寸,使得孔的尺寸随着气体入口之间的距离的增加而增加 沿着第一通道测量的孔口和气体入口。
    • 10. 发明授权
    • Process for welding corner cells in fuel assembly grids
    • 在燃料组件网格中焊接角膜电极的工艺
    • US4101752A
    • 1978-07-18
    • US723271
    • 1976-09-15
    • Robert Duncan
    • Robert Duncan
    • B23K11/00G21C3/34B23K11/10
    • B23K11/008G21C3/3424Y02E30/40
    • A process for welding the adjacent ends of frame members peripherally surrounding the interleaved straps of a fuel assembly grid which includes placing the assembled grid and its frame members into a fixture made to substantially the same dimensions as the outside dimensions of the grid. The side members of the frame are arranged such that a space appears at each of the four corners and a special tool placed in each of the four corner cells of the grid is designed to have an opening which corresponds to the openings formed on each corner of the fixture. After the tooling is placed in each of the four corner cells, the assembled grid and fixture is then placed in welding apparatus such that a welding tip thereof is placed in the tool located in a corner cell. Since the opening in the tool and between the plates of the fixture and at each corner are in alignment, the welding tip accordingly moves through the openings and into contact with the overlapping ends of the frame members placed on the peripheral surface of the grid. The upper welding tip is then brought into contact with the other side of the overlapping ends and a spot weld accordingly applied to the frame member overlapping ends.