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    • 3. 发明授权
    • Vapor collection method and apparatus
    • 蒸汽收集方法和装置
    • US07971370B2
    • 2011-07-05
    • US11401508
    • 2006-04-11
    • Craig A. MillerNirmal K. JainWilliam Blake Kolb
    • Craig A. MillerNirmal K. JainWilliam Blake Kolb
    • F26B3/00
    • F26B13/10F26B13/005F26B25/006
    • An apparatus and method for treating a moving substrate of indefinite length. The apparatus has a control surface positioned in close proximity to a surface of the substrate to define a control gap between the substrate and the control surface. A first chamber is positioned near the control surface, with the first chamber having a gas introduction device. A second chamber is positioned near the control surface, the second chamber having a gas withdrawal device. The control surface and the chambers together define a region wherein the adjacent gas phases possess an amount of mass. Upon inducement of at least a portion of the mass within the region, the mass flow is controlled to significantly reduce dilution of the gas phase component in the adjacent gas phase. This is accomplished through the introduction of a controlled gas stream thereby reducing the flow of an uncontrolled ambient gas stream due to pressure gradients in the system.
    • 一种用于处理不确定长度的移动基板的装置和方法。 所述设备具有位于所述基板的表面附近的控制表面,以限定所述基板和所述控制表面之间的控制间隙。 第一室位于控制表面附近,第一室具有气体引入装置。 第二室位于控制表面附近,第二室具有气体取出装置。 控制表面和室一起限定了一个区域,其中相邻的气相具有一定的质量。 在区域内至少一部分质量的诱导下,控制质量流量以显着降低相邻气相中气相成分的稀释。 这是通过引入受控气流而实现的,从而由于系统中的压力梯度而降低了不受控制的环境气流的流动。