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    • 7. 发明申请
    • MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件的制造方法
    • US20140179076A1
    • 2014-06-26
    • US14133605
    • 2013-12-18
    • Renesas Electronics Corporation
    • Hirofumi Shinohara
    • H01L27/105
    • H01L21/28273H01L21/823462H01L21/823468H01L27/11573H01L29/42344H01L29/66545H01L29/66833H01L29/792
    • Even when a semiconductor device having field effect transistors driven by relatively different power supply voltages provided over a semiconductor substrate is manufactured by the gate-last process, the breakdown voltage of the transistor on the higher voltage side can be ensured.When forming, over the substrate by the gate-last process, a MOSFET of a core region driven by a first power supply voltage and a MOSFET of a high-voltage region driven by a second power supply voltage higher than the first power supply voltage, the thickness of the hard mask film formed over a dummy gate film of the high-voltage region is made thicker than that of the hard mask film formed over a dummy gate film of the core region, prior to a process of patterning a dummy gate of the MOSFET of the core region and the MOSFET of the high-voltage region. Thereby, the breakdown voltage of MOSFET of the high-voltage region can be ensured.
    • 即使通过栅极最后工艺制造具有由半导体衬底上的相对不同的电源电压驱动的场效应晶体管的半导体器件,也可以确保高电压侧的晶体管的击穿电压。 当通过栅极最后工艺在衬底上形成由第一电源电压驱动的芯区域的MOSFET和由比第一电源电压高的第二电源电压驱动的高电压区域的MOSFET时, 在高电压区域的伪栅极膜之上形成的硬掩模膜的厚度比在芯区域的伪栅极膜上形成的硬掩模膜的厚度厚, 芯区的MOSFET和高压区的MOSFET。 由此,能够确保高电压区域的MOSFET的击穿电压。