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    • 2. 发明申请
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US20060023194A1
    • 2006-02-02
    • US10899295
    • 2004-07-27
    • Erik LoopstraLeon LevasierRene Oesterholt
    • Erik LoopstraLeon LevasierRene Oesterholt
    • G03B27/58
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • Lithographic apparatus includes a substrate table and a motion control system for controlling a movement of the substrate table. The motion control system includes at least 3 position detectors constructed for detecting a position of the substrate table. For measuring a position and orientation of the substrate table, each position detector comprises an optical encoder of a single dimensional or multi dimensional type, the optical encoders being arranged for providing together at least 6 position values, at least one position value being provided for each of the 3 dimensions. 3 or more of the at least 3 optical encoders being connected to the substrate table at different locations in the 3 dimensional coordinate system. The motion control system is arranged to calculate the position of the substrate table in the 3 dimensional coordinate system from a subset of at least 3 of the 6 position values and to calculate an orientation of the substrate table with respect to the coordinate system from another subset of at least 3 of the 6 position values. Further, a method for calibrating the position detectors is described.
    • 光刻设备包括用于控制衬底台的移动的衬底台和运动控制系统。 运动控制系统包括构造用于检测衬底台的位置的至少3个位置检测器。 为了测量衬底台的位置和取向,每个位置检测器包括一维或多维类型的光学编码器,光学编码器被布置为一起提供至少6个位置值,为每个位置值提供至少一个位置值 的三维。 所述至少3个光学编码器中的3个或更多个在所述三维坐标系中的不同位置连接到所述基板台。 运动控制系统被布置为从6个位置值中的至少3个的子集计算三维坐标系中的衬底台的位置,并且从另一个子集计算相对于坐标系的衬底台的取向 至少6个位置值中的3个。 此外,描述了用于校准位置检测器的方法。
    • 3. 发明申请
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US20080074681A1
    • 2008-03-27
    • US11902786
    • 2007-09-25
    • Erik LoopstraLeon LevasierRene Oesterholt
    • Erik LoopstraLeon LevasierRene Oesterholt
    • G01B11/14G01B11/00
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at least three position detectors each including a single or multi-dimensional optical encoder to provide at least six position values, the optical encoders being coupled to the object at different locations within a three dimensional coordinate system, wherein at least one position value is provided for each dimension of the three dimensional coordinate system, and wherein the measurement system is configured to calculate the position of the object within the three dimensional coordinate system from a subset of at least three of the six position values and to calculate an orientation of the object with respect to the three dimensional coordinate system from another subset of at least three of the six position values.
    • 被配置为测量光刻设备中的物体的位置的测量系统包括配置成检测物体的位置的至少三个位置检测器,所述至少三个位置检测器包括单个或多维光学编码器以提供在 至少六个位置值,所述光学编码器在三维坐标系内的不同位置处耦合到所述对象,其中为所述三维坐标系的每个维度提供至少一个位置值,并且其中所述测量系统被配置为计算 从六个位置值中的至少三个的子集的三维坐标系中的对象的位置,并且从六个位置中的至少三个的另一子集计算相对于三维坐标系的对象的取向 价值观。
    • 4. 发明申请
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US20070256471A1
    • 2007-11-08
    • US11822633
    • 2007-07-09
    • Erik LoopstraLeon LevasierRene Oesterholt
    • Erik LoopstraLeon LevasierRene Oesterholt
    • G01B21/00G01P21/00
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • Lithographic apparatus includes a substrate table and a motion control system for controlling a movement of the substrate table. The motion control system includes at least 3 position detectors constructed for detecting a position of the substrate table. For measuring a position and orientation of the substrate table, each position detector comprises an optical encoder of a single dimensional or multi dimensional type, the optical encoders being arranged for providing together at least 6 position values, at least one position value being provided for each of the 3 dimensions. 3 or more of the at least 3 optical encoders being connected to the substrate table at different locations in the 3 dimensional coordinate system. The motion control system is arranged to calculate the position of the substrate table in the 3 dimensional coordinate system from a subset of at least 3 of the 6 position values and to calculate an orientation of the substrate table with respect to the coordinate system from another subset of at least 3 of the 6 position values. Further, a method for calibrating the position detectors is described.
    • 光刻设备包括用于控制衬底台的移动的衬底台和运动控制系统。 运动控制系统包括构造用于检测衬底台的位置的至少3个位置检测器。 为了测量衬底台的位置和取向,每个位置检测器包括一维或多维类型的光学编码器,光学编码器被布置为一起提供至少6个位置值,为每个位置值提供至少一个位置值 的三维。 所述至少3个光学编码器中的3个或更多个在所述三维坐标系中的不同位置连接到所述基板台。 运动控制系统被布置为从6个位置值中的至少3个的子集计算三维坐标系中的衬底台的位置,并且从另一个子集计算相对于坐标系的衬底台的取向 至少6个位置值中的3个。 此外,描述了用于校准位置检测器的方法。
    • 5. 发明申请
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US20060023178A1
    • 2006-02-02
    • US11179665
    • 2005-07-13
    • Erik LoopstraLeon LevasierRene Oesterholt
    • Erik LoopstraLeon LevasierRene Oesterholt
    • G03B27/42
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • Lithographic apparatus includes a substrate table and a motion control system for controlling a movement of the substrate table. The motion control system includes at least 3 position detectors constructed for detecting a position of the substrate table. For measuring a position and orientation of the substrate table, each position detector comprises an optical encoder of a single dimensional or multi dimensional type, the optical encoders being arranged for providing together at least 6 position values, at least one position value being provided for each of the 3 dimensions. Some of the optical encoders may be connected to the substrate table at different locations in the 3 dimensional coordinate system. The motion control system is arranged to calculate the position of the substrate table in the 3 dimensional coordinate system from a subset of at least 3 of the 6 position values and to calculate an orientation of the substrate table with respect to the coordinate system from another subset of at least 3 of the 6 position values. Further, a method for calibrating the position detectors is presented.
    • 光刻设备包括用于控制衬底台的移动的衬底台和运动控制系统。 运动控制系统包括构造用于检测衬底台的位置的至少3个位置检测器。 为了测量衬底台的位置和取向,每个位置检测器包括一维或多维类型的光学编码器,光学编码器被布置为一起提供至少6个位置值,为每个位置值提供至少一个位置值 的三维。 一些光学编码器可以在三维坐标系中的不同位置处连接到基板台。 运动控制系统被布置为从6个位置值中的至少3个的子集计算三维坐标系中的衬底台的位置,并且从另一个子集计算相对于坐标系的衬底台的取向 至少6个位置值中的3个。 此外,提出了一种用于校准位置检测器的方法。
    • 7. 发明授权
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US07859686B2
    • 2010-12-28
    • US12426713
    • 2009-04-20
    • Erik Roelof LoopstraLeon Martin LevasierRene Oesterholt
    • Erik Roelof LoopstraLeon Martin LevasierRene Oesterholt
    • G01B11/14
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at least three position detectors each including a single or multi-dimensional optical encoder to provide at least six position values, the optical encoders being coupled to the object at different locations within a three dimensional coordinate system, wherein at least one position value is provided for each dimension of the three dimensional coordinate system, and wherein the measurement system is configured to calculate the position of the object within the three dimensional coordinate system from a subset of at least three of the six position values and to calculate an orientation of the object with respect to the three dimensional coordinate system from another subset of at least three of the six position values.
    • 被配置为测量光刻设备中的物体的位置的测量系统包括配置成检测物体的位置的至少三个位置检测器,所述至少三个位置检测器包括单个或多维光学编码器以提供在 至少六个位置值,所述光学编码器在三维坐标系内的不同位置处耦合到所述对象,其中为所述三维坐标系的每个维度提供至少一个位置值,并且其中所述测量系统被配置为计算 从六个位置值中的至少三个的子集的三维坐标系中的对象的位置,并且从六个位置中的至少三个的另一子集计算相对于三维坐标系的对象的取向 价值观。
    • 9. 发明授权
    • Lithographic apparatus and method for calibrating the same
    • 平版印刷设备及其校准方法
    • US07528965B2
    • 2009-05-05
    • US11902786
    • 2007-09-25
    • Erik Roelof LoopstraLeon Martin LevasierRene Oesterholt
    • Erik Roelof LoopstraLeon Martin LevasierRene Oesterholt
    • G01B11/14
    • G03F7/70775G03F7/70458G03F7/70516G03F9/7011G03F9/7019
    • A measurement system configured to measure a position of an object in a lithographic apparatus, includes at least three position detectors configured to detect the position of the object, the at least three position detectors each including a single or multi-dimensional optical encoder to provide at least six position values, the optical encoders being coupled to the object at different locations within a three dimensional coordinate system, wherein at least one position value is provided for each dimension of the three dimensional coordinate system, and wherein the measurement system is configured to calculate the position of the object within the three dimensional coordinate system from a subset of at least three of the six position values and to calculate an orientation of the object with respect to the three dimensional coordinate system from another subset of at least three of the six position values.
    • 被配置为测量光刻设备中的物体的位置的测量系统包括配置成检测物体的位置的至少三个位置检测器,所述至少三个位置检测器包括单个或多维光学编码器以提供在 至少六个位置值,所述光学编码器在三维坐标系内的不同位置处耦合到所述对象,其中为所述三维坐标系的每个维度提供至少一个位置值,并且其中所述测量系统被配置为计算 从六个位置值中的至少三个的子集的三维坐标系中的对象的位置,并且从六个位置中的至少三个的另一子集计算相对于三维坐标系的对象的取向 价值观。