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    • 5. 发明授权
    • Arrangement for the automatic adjustment of at least one object
    • 用于自动调整至少一个物体的布置
    • US4496970A
    • 1985-01-29
    • US293038
    • 1981-08-14
    • Adelbrecht SchorchtDietmar KlingenfeldReiner HesseRainer DastisVolker Linz
    • Adelbrecht SchorchtDietmar KlingenfeldReiner HesseRainer DastisVolker Linz
    • H01L21/30G03F9/00G05D3/12H01L21/027H04N7/18
    • G03F9/7088
    • An arrangement for the automatic adjustment of at least one object, for instance a semiconductor disc and a template vis-a-vis a photoelectric measuring and scanning system, and of two objects in relation to each other in step-wise projection lithography for the manufacture of semiconductor structures.The purpose of this invention is to provide a highly accurate and at the same time quickly adjustable means for the adjustment of two objects, under the selective utilization of the different adjustment marks presently used, based on the thereby influenced light currents as well as their structure.An image of the adjustment marks of both objects is produced by means of an optical reproduction system in the scanning plane of a photoelectric measuring and scanning system, symmetrical to a stationary axis of this system.For obtaining the image, two image segments are situated on the stationary axis and separated by an intermediary rod, which the image segments being produced with the aid of electronical or mechanical means. There is thus produced a two-beam process. Image scanning is effected by means of a television camera tube or movable slotted carriers, wherein the two image segments can be alternately employed for producing the image by channel switching.The video signals are processed by a computer which releases control signals to the final control elements for adjustment of the two objects.
    • 一种用于自动调整至少一个物体(例如半导体盘和模板相对于光电测量和扫描系统)的装置,以及用于制造的逐步投影光刻中的两个物体彼此相关的装置 的半导体结构。 本发明的目的是提供一种高度精确的,同时快速调节的装置,用于在选择性地利用目前使用的不同调节标记的基础上,基于受影响的光电流以及它们的结构来调节两个物体 。 通过在该系统的静止轴对称的光电测量和扫描系统的扫描平面中的光学再现系统产生两个对象的调整标记的图像。 为了获得图像,两个图像段位于固定轴上并由中间杆隔开,该中间杆借助电子或机械方式产生图像段。 因此产生了双光束过程。 图像扫描通过电视摄像机管或可移动的狭槽载体进行,其中可以交替地使用两个图像段来通过频道切换产生图像。 视频信号由计算机处理,该计算机向最终控制元件释放控制信号以调整两个物体。