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1. 发明授权

US07492147B2 Wafer probe station having a skirting component 失效
公开(公告)号：US07492147B2
公开(公告)日：2009-02-17
申请号：US11881571
申请日：2007-07-27
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R31/02
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.

2. 发明授权

US06232788B1 Wafer probe station for low-current measurements 失效
标题翻译：晶圆探针台进行低电流测量
公开(公告)号：US06232788B1
公开(公告)日：2001-05-15
申请号：US08855735
申请日：1997-05-09
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R3102
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A wafer probe station adapted for low-current measurements provides electrically active upper and lower chuck assembly elements where air gaps are provided between a major portion of either a lower or nonlower surface on the upper chuck assembly element and a corresponding conductive surface on or connected to the lower chuck assembly element thereby minimizing leakage currents therebetween. The chuck assembly elements are preferably enclosed by an environment control enclosure having a sidewall portion relative to which the upper chuck assembly element can move laterally. During such movement, the upper chuck assembly remains in constant spacing with a conductive member that laterally surrounds it so as to stabilize electro-magnetic conditions. Concurrently, the sidewall portion is kept motionless relative to the probe holder which keeps contaminants away from the region immediate to the upper chuck assembly element, including any moisture droplets that have condensed during low-temperature testing. Modularity of the chuck assembly elements is preferably facilitated by detachable electrical connections. Preferably, the lower chuck assembly element, the conductive member and an upper guard plate surround the upper chuck assembly element for guarding thereof so as to further minimize leakage currents and reduce settling times.
摘要翻译：适用于低电流测量的晶圆探测台提供了电活动的上部和下部卡盘组件元件，其中气隙设置在上部卡盘组件元件上的下部或不是较低的表面的主要部分和与之相连的下卡盘组件元件从而使其之间的泄漏电流最小化。卡盘组件元件优选由具有侧壁部分的环境控制外壳包围，上侧卡盘组件元件可横向移动。在这种移动过程中，上卡盘组件与横向围绕它的导电构件保持恒定的间隔，以便稳定电磁条件。同时，侧壁部分相对于探头保持器保持不动，这使得污染物远离紧邻上部卡盘组件元件的区域，包括在低温测试期间冷凝的任何水滴。卡盘组件元件的模块化优选通过可拆卸的电连接方式来实现。优选地，下卡盘组件元件，导电构件和上保护板围绕上卡盘组件元件以进行保护，以进一步最小化泄漏电流并减少沉降时间。

3. 发明授权

US5345170A Wafer probe station having integrated guarding, Kelvin connection and shielding systems 失效
标题翻译：晶圆探头具有集成防护，开尔文连接和屏蔽系统
公开(公告)号：US5345170A
公开(公告)日：1994-09-06
申请号：US896853
申请日：1992-06-11
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
IPC分类号： H01L21/66 , A46D1/00 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/687
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.
摘要翻译：探测台配备有集成的防护系统，便于使用站进行低电流测量，以及集成开尔文连接，以消除线路电阻引起的电压损耗。该站具有由至少三个卡盘组件元件组成的卡盘组件。第一个元件支持测试设备，而底层的第二个元件用作防护装置，以减少漏电流。这些元件彼此电绝缘，并且与其下面的支撑结构电绝缘，其是第三元件。准备使用的，可选择性地拆卸的电连接器组件分别提供到第一和第二卡盘组件元件的信号和保护连接以及提供与开尔文的连接。由于提供空气作为主电绝缘体，相应的卡盘组件元件之间的电容极低。用于单独定位探头的独特电气连接器提供保护和开尔文连接能力，以及单独的EMI屏蔽，可以单独与每个探头一致移动。

4. 发明授权

US06492822B2 Wafer probe station for low-current measurements 失效
公开(公告)号：US06492822B2
公开(公告)日：2002-12-10
申请号：US10003948
申请日：2001-10-30
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R1073
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.

5. 发明授权

US5434512A Wafer probe station having integrated guarding, Kelvin connection and shielding systems 失效
标题翻译：晶圆探头具有集成防护，开尔文连接和屏蔽系统
公开(公告)号：US5434512A
公开(公告)日：1995-07-18
申请号：US245581
申请日：1994-05-18
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
IPC分类号： H01L21/66 , A46D1/00 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/687
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.
摘要翻译：探测台配备有集成的防护系统，便于使用站进行低电流测量，以及集成开尔文连接，以消除线路电阻引起的电压损耗。该站具有由至少三个卡盘组件元件组成的卡盘组件。第一个元件支持测试设备，而底层的第二个元件用作防护装置，以减少漏电流。这些元件彼此电绝缘，并且与其下面的支撑结构电绝缘，其是第三元件。准备使用的，可选择性地拆卸的电连接器组件分别提供到第一和第二卡盘组件元件的信号和保护连接以及提供与开尔文的连接。由于提供空气作为主电绝缘体，相应的卡盘组件元件之间的电容极低。用于单独定位探头的独特电气连接器提供保护和开尔文连接能力，以及单独的EMI屏蔽，可以单独与每个探头一致移动。

6. 发明授权

US07330023B2 Wafer probe station having a skirting component 失效
标题翻译：具有踢脚线组件的晶圆探针台
公开(公告)号：US07330023B2
公开(公告)日：2008-02-12
申请号：US11112813
申请日：2005-04-21
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量的跟随第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

7. 发明授权

US06335628B2 Wafer probe station for low-current measurements 失效
公开(公告)号：US06335628B2
公开(公告)日：2002-01-01
申请号：US09784231
申请日：2001-02-13
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R3102
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.

8. 发明授权

US07589518B2 Wafer probe station having a skirting component 失效
标题翻译：具有踢脚线组件的晶圆探针台
公开(公告)号：US07589518B2
公开(公告)日：2009-09-15
申请号：US11056647
申请日：2005-02-11
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R31/02
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量到第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其相应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

9. 发明授权

US06980012B2 Wafer probe station for low-current measurements 失效
标题翻译：晶圆探针台进行低电流测量
公开(公告)号：US06980012B2
公开(公告)日：2005-12-27
申请号：US10678549
申请日：2003-10-02
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： H01L21/66 , A46D1/00 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/687
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电流电流测量期间，每个部件上的电位可以相对于围绕每个元件的外部屏蔽外壳测量的跟随第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

10. 发明授权

US06720782B2 Wafer probe station for low-current measurements 失效
标题翻译：晶圆探针台进行低电流测量
公开(公告)号：US06720782B2
公开(公告)日：2004-04-13
申请号：US10274068
申请日：2002-10-17
申请人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
发明人： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner
IPC分类号： G01R3102
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量到第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其相应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

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