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    • 1. 发明授权
    • Method for inspecting a photovoltaic substrate
    • 检查光伏基板的方法
    • US08766192B2
    • 2014-07-01
    • US12916694
    • 2010-11-01
    • Ran Shi WangJiangwen DengChung Yan Lau
    • Ran Shi WangJiangwen DengChung Yan Lau
    • G01J5/02
    • G01N21/9505G01N21/359G01N25/72
    • A method for inspecting a substrate having intrinsic heterogeneous patterns for the presence of cracks comprises the steps of providing an optical device and front-side lighting on a first side of the substrate and providing near-infrared lighting on a second side of the substrate opposite to the first side. The near-infrared lighting is operable to penetrate the substrate so as to be detectable by the optical device through the substrate. One or more images are obtained by illuminating the substrate with the front-side lighting and/or the near-infrared lighting from the second side. The one or more images are thereafter processed to distinguish between the heterogeneous patterns on the substrate and any cracks present on the substrate.
    • 用于检查具有固有异质图案的衬底以存在裂缝的方法包括以下步骤:在衬底的第一侧上提供光学器件和前侧照明,并在衬底的与第二侧相对的第二侧上提供近红外线照明 第一面。 近红外照明可操作地穿透基板,以便可以通过基板通过光学装置检测。 利用来自第二面的前侧照明和/或近红外照明照射基板来获得一个或多个图像。 此后处理一个或多个图像以区分基底上的异质图案和存在于基底上的任何裂纹。
    • 3. 发明授权
    • Chromatic confocal scanning apparatus
    • 色共焦扫描仪
    • US08654352B1
    • 2014-02-18
    • US13569413
    • 2012-08-08
    • Jiangwen DengZhuanyun ZhangFang Han ChenWui Fung Sze
    • Jiangwen DengZhuanyun ZhangFang Han ChenWui Fung Sze
    • G01B11/24
    • G01B11/24G01B2210/50
    • A chromatic confocal scanning apparatus comprises a light source for producing light rays comprising a plurality of wavelengths, a first screen having an open elongated slit which allows a strip of light rays produced from the light source to pass through the slit and a cylindrical objective lens both to converge the light rays onto an object surface that is to be measured, and to image light rays reflected from the object surface. An intermediate cylindrical lens set converges a strip of light rays imaged from the cylindrical objective lens to pass through an open elongated slit comprised in a second screen, and a color sensor receives light rays which have passed through the slit of the second screen for determining a plurality of wavelengths of the said strip of light rays, to thereby construct a height profile of at least a portion of the object surface.
    • 彩色共焦扫描装置包括用于产生包括多个波长的光线的光源,具有开口细长狭缝的第一屏幕,其允许从光源产生的光束穿过狭缝和圆柱形物镜两者 以将光线会聚到要测量的物体表面上,并且对从物体表面反射的光线进行成像。 中间圆柱形透镜组会聚从圆柱形物镜成像的光线条,以穿过包含在第二屏幕中的开放细长狭缝,并且彩色传感器接收穿过第二屏幕的狭缝的光线,以确定 所述光线条的多个波长,从而构成物体表面的至少一部分的高度分布。