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1. 发明授权

US08279407B2 Stage system and lithographic apparatus comprising such stage system 有权
标题翻译：包括这种舞台系统的舞台系统和光刻设备
公开(公告)号：US08279407B2
公开(公告)日：2012-10-02
申请号：US12408936
申请日：2009-03-23
申请人： Ramidin Izair Kamidi , Henrikus Herman Marie Cox , Emiel Jozef Melanie Eussen , Ronald Casper Kunst , Engelbertus Antonius Fransiscus Van Der Pasch , Marcel François Heertjes , Mark Constant Johannes Baggen
发明人： Ramidin Izair Kamidi , Henrikus Herman Marie Cox , Emiel Jozef Melanie Eussen , Ronald Casper Kunst , Engelbertus Antonius Fransiscus Van Der Pasch , Marcel François Heertjes , Mark Constant Johannes Baggen
IPC分类号： G03B27/58 , G03B27/42
CPC分类号： G03F7/70775
摘要： A stage system includes a movable stage, at least two encoder heads each constructed to provide an encoder signal representative of a position of the movable stage with respect to an encoder target structure, and a controller to control a position of the stage. The controller is provided with the encoder signals of each of the encoder heads. The controller is arranged to apply a weighting function to the encoder signals and to derive a position of the stage from the weighted encoder signals.
摘要翻译：舞台系统包括可移动舞台，至少两个编码器头，每个编码器头被构造成提供代表可移动平台相对于编码器目标结构的位置的编码器信号，以及控制器来控制舞台的位置。控制器具有每个编码器头的编码器信号。控制器被布置为对编码器信号应用加权函数并且从加权的编码器信号导出级的位置。

2. 发明申请

US20090279067A1 Stage System and Lithographic Apparatus Comprising Such Stage System 有权
标题翻译：包括这种舞台系统的舞台系统和平版印刷设备
公开(公告)号：US20090279067A1
公开(公告)日：2009-11-12
申请号：US12408936
申请日：2009-03-23
申请人： Ramidin Izair KAMIDI , Henrikus Herman Marie Cox , Emiel Jozef Melanie Eussen , Ronald Casper Kunst , Engelbertus Antonius Fransiscus Van Der Pasch , Marcel François Heertjes , Mark Constant Johannes Baggen
发明人： Ramidin Izair KAMIDI , Henrikus Herman Marie Cox , Emiel Jozef Melanie Eussen , Ronald Casper Kunst , Engelbertus Antonius Fransiscus Van Der Pasch , Marcel François Heertjes , Mark Constant Johannes Baggen
IPC分类号： G03B27/58 , G03B27/32
CPC分类号： G03F7/70775
摘要： A stage system includes a movable stage, at least two encoder heads each constructed to provide an encoder signal representative of a position of the movable stage with respect to an encoder target structure, and a controller to control a position of the stage. The controller is provided with the encoder signals of each of the encoder heads. The controller is arranged to apply a weighting function to the encoder signals and to derive a position of the stage from the weighted encoder signals.
摘要翻译：舞台系统包括可移动舞台，至少两个编码器头，每个编码器头被构造成提供代表可移动平台相对于编码器目标结构的位置的编码器信号，以及控制器来控制舞台的位置。控制器具有每个编码器头的编码器信号。控制器被布置为对编码器信号应用加权函数并且从加权的编码器信号导出级的位置。

3. 发明授权

US08014881B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US08014881B2
公开(公告)日：2011-09-06
申请号：US11706422
申请日：2007-02-15
申请人： Mark Constant Johannes Baggen , Petrus Marinus Christianus Maria Van Den Biggelaar , Yin Tim Tso , Marcel François Heertjes , Ramidin Izair Kamidi , Dennis Andreas Petrus Hubertina Houben , Constant Paul Marie Jozef Baggen , Marinus Jacobus Gerardus Van De Molengraft
发明人： Mark Constant Johannes Baggen , Petrus Marinus Christianus Maria Van Den Biggelaar , Yin Tim Tso , Marcel François Heertjes , Ramidin Izair Kamidi , Dennis Andreas Petrus Hubertina Houben , Constant Paul Marie Jozef Baggen , Marinus Jacobus Gerardus Van De Molengraft
IPC分类号： G05B13/02 , B41F1/18 , C11D7/26 , H03L7/00 , G03B27/72 , G03C1/06
CPC分类号： G05B5/01 , G03F7/70725 , G05B13/0265
摘要： In a lithographic apparatus, a feedforward transfer function of a control system is determined by: a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.
摘要翻译：在光刻设备中，通过以下步骤来确定控制系统的前馈传递函数：a）通过针对给定设定点信号的迭代学习控制迭代地学习控制系统的前馈输出信号; b）确定所学习的前馈输出信号和设定点信号之间的关系; 和c）应用该关系作为控制系统的前馈传递函数。已经学习的一个或多个特定设定点信号的学习前馈可以被适配成提供一个设定点信号相关的前馈输出信号。学习的前馈可以使设定值变化更加鲁棒。

4. 发明授权

US07453228B2 Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device 有权
标题翻译：用于控制定位装置，定位装置和设置有定位装置的光刻设备的方法
公开(公告)号：US07453228B2
公开(公告)日：2008-11-18
申请号：US11399589
申请日：2006-04-07
申请人： Marcel François Heertjes , Yin Tim Tso , Ramidin Izair Kamidi , Dennis Andreas Petrus Hubertina Houben
发明人： Marcel François Heertjes , Yin Tim Tso , Ramidin Izair Kamidi , Dennis Andreas Petrus Hubertina Houben
IPC分类号： G05B5/01
CPC分类号： G05B19/19 , G05B2219/41029 , G05B2219/42249 , G05B2219/45031
摘要： In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.
摘要翻译：在一种用于控制定位装置的方法中，所述定位装置具有定子和移动器，所述动子可相对于所述定子移动; 位置传感器，被配置为产生指示所述动子相对于所述定子的位置的位置信号; 控制器，被配置为接收所述位置信号，将其与设定点信号进行比较以获得误差信号，并且基于所述位置信号的信号分量，所述控制器具有可变增益来生成移动器控制信号。定位装置，包括位置传感器和控制器，定义一个控制回路。对于具有预定范围内的幅度的误差信号，增益被选择性地设置为高于具有在该范围之外的幅度的误差信号的值的值。

5. 发明授权

US07774287B2 System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method 有权
标题翻译：通过设定点曲线移动组件的系统和方法，光刻设备和设备制造方法
公开(公告)号：US07774287B2
公开(公告)日：2010-08-10
申请号：US11374416
申请日：2006-03-14
申请人： Marcel François Heertjes , Yin-Tim Tso , Edwin Teunis Van Donkelaar
发明人： Marcel François Heertjes , Yin-Tim Tso , Edwin Teunis Van Donkelaar
IPC分类号： G06F15/00 , G06F17/00
CPC分类号： G05B19/371 , G05B2219/41451
摘要： A system to move a component in accordance with a setpoint profile including a plurality of target states of the component, each of the plurality of target states to be substantially attained at one of a corresponding sequence of target times, is presented. The system includes a displacement device to move the component according to the setpoint profile; a storage device containing a library of feedforward data; a signal generating part configured to identify a plurality of time segments of the setpoint profile that correspond to entries in the library of feedforward data, and access the entries in order to construct a feedforward signal; and a feedforward control system to control the operation of the displacement device by reference to the feedforward signal constructed by the signal generating part.
摘要翻译：呈现了根据包括组件的多个目标状态的设定曲线移动组件的系统，其中多个目标状态中的每一个基本上在相应的目标时间序列之一上实现。该系统包括一个移动装置，用于根据设定点轮廓移动该部件; 一个包含前馈数据库的存储设备; 信号产生部件，被配置为识别与所述前馈数据库中的条目相对应的所述设定点简档的多个时间段，并且访问所述条目以构造前馈信号; 以及前馈控制系统，通过参照由信号产生部构成的前馈信号来控制位移装置的动作。

6. 发明授权

US08452442B2 Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device 有权
标题翻译：用于定位装置的控制器，用于控制定位装置的方法，定位装置和设置有定位装置的光刻设备
公开(公告)号：US08452442B2
公开(公告)日：2013-05-28
申请号：US13369163
申请日：2012-02-08
申请人： Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
发明人： Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
IPC分类号： G06F19/00
CPC分类号： G06F19/00 , G03F7/70725 , G03F9/7092
摘要： A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
摘要翻译：用于定位装置的控制器被构造和布置成接收指示定位装置的位置的位置信号，将位置信号与指示定位装置的期望位置的设定点信号进行比较以获得误差信号，选择性地基于误差信号的幅度和频率内容修改误差信号，以获得修正的误差信号，根据修正的误差信号产生控制定位装置的控制信号。可以应用控制器来控制光刻设备中的定位装置。

7. 发明授权

US08135488B2 Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device 有权
标题翻译：用于定位装置的控制器，用于控制定位装置的方法，定位装置和设置有定位装置的光刻设备
公开(公告)号：US08135488B2
公开(公告)日：2012-03-13
申请号：US12331829
申请日：2008-12-10
申请人： Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
发明人： Marcel François Heertjes , Wilhelmus Franciscus Johannes Simons , Dennis Andreas Petrus Hubertina Houben , Jeffrey Hendrikus Peter Maria Goossens
IPC分类号： G06F19/00
CPC分类号： G06F19/00 , G03F7/70725 , G03F9/7092
摘要： A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
摘要翻译：用于定位装置的控制器被构造和布置成接收指示定位装置的位置的位置信号，将位置信号与指示定位装置的期望位置的设定点信号进行比较以获得误差信号，选择性地基于误差信号的幅度和频率内容修改误差信号，以获得修正的误差信号，根据修正的误差信号产生控制定位装置的控制信号。可以应用控制器来控制光刻设备中的定位装置。

8. 发明授权

US07817243B2 Vibration isolation system 有权
标题翻译：隔振系统
公开(公告)号：US07817243B2
公开(公告)日：2010-10-19
申请号：US10822139
申请日：2004-04-12
申请人： Marcel François Heertjes , Jan-Gerard Cornelis Van Der Toorn
发明人： Marcel François Heertjes , Jan-Gerard Cornelis Van Der Toorn
IPC分类号： G03B27/42
CPC分类号： F16F15/02 , G03F7/709
摘要： A vibration isolation system isolates a body from its surroundings with respect to vibrations. The vibration isolation system includes active isolator devices that isolate and damp the body in unstable directions. However, such active isolators may exert damping forces not only in the unstable direction, but simultaneously in other stable directions due to mechanical coupling of the stable and unstable directions. As a result the damping and isolation in the other stable directions may be deteriorated due to the active isolation and damping. Employing modal decoupling, i.e. decomposing any vibration into independent directions, and isolating and damping in the independent directions, enables compensation of any vibration in an unstable direction without influencing the isolation and damping performance in any other, possibly stable, direction.
摘要翻译：振动隔离系统将身体与其周围环境相隔离。隔振系统包括主动隔离装置，可在不稳定的方向隔离和潮湿身体。然而，这种有源隔离器不仅可以在不稳定的方向施加阻尼力，而且可以由于稳定和不稳定方向的机械耦合而在其它稳定的方向上施加阻尼力。结果，由于主动隔离和阻尼，其它稳定方向的阻尼和隔离可能会恶化。采用模态去耦，即将任何振动分解为独立的方向，以及在独立方向上进行隔离和阻尼，可以补偿不稳定方向上的任何振动，而不会影响任何其他可能稳定的方向的隔离和阻尼性能。

9. 发明授权

US08373849B2 Lithographic apparatus and control system 有权
标题翻译：平版印刷设备和控制系统
公开(公告)号：US08373849B2
公开(公告)日：2013-02-12
申请号：US12580328
申请日：2009-10-16
申请人： Marcel François Heertjes
发明人： Marcel François Heertjes
IPC分类号： G03B27/58 , G03B27/62 , G03B27/42 , G03B27/32
CPC分类号： G03F7/70758 , G03F7/70525
摘要： A control system to control a position quantity of a movable object in dependency of signals provided by a sensor representing an actual position quantity of the moveable object, the control system being configured to provide a drive signal to an actuator which is able to apply forces to the moveable object, the control system including a set-point generator to provide a reference signal; a subtractor to provide an error signal, the error signal being the difference between the reference signal and the signals provided by the sensor; a control unit to provide a drive signal to the actuator in dependency of the error signal, wherein the control unit comprises a nonlinear controller to improve a low-frequency disturbance suppression, and wherein the control unit further includes a compensator to at least partially compensate the deterioration of the high-frequency behavior caused by the nonlinear controller.
摘要翻译：一种控制系统，用于根据表示可移动物体的实际位置量的传感器提供的信号来控制可移动物体的位置量，所述控制系统被配置为向能够施加力的致动器提供驱动信号所述可移动物体，所述控制系统包括设定点发生器以提供参考信号; 提供误差信号的减法器，误差信号是参考信号和由传感器提供的信号之间的差; 控制单元，用于根据所述误差信号向所述致动器提供驱动信号，其中所述控制单元包括非线性控制器以改善低频干扰抑制，并且其中所述控制单元还包括补偿器，以至少部分地补偿由非线性控制器引起的高频行为的恶化。

10. 发明授权

US08891063B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US08891063B2
公开(公告)日：2014-11-18
申请号：US13335212
申请日：2011-12-22
申请人： Marcus Joseph Elisabeth Godfried Breukers , Marcel François Heertjes , Niels Johannes Maria Bosch
发明人： Marcus Joseph Elisabeth Godfried Breukers , Marcel François Heertjes , Niels Johannes Maria Bosch
IPC分类号： G03B27/32 , G03B27/42 , G03B27/58 , G03F7/20
CPC分类号： G03F7/70725 , G03F7/70733
摘要： A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.
摘要翻译：光刻设备包括用于接收物体的物体表，用于移动物体表的致动器和用于将物体传送到物体表的处理器。该设备设置有可操作地与致动器和/或处理器连接的控制器。控制器被编程和/或布置成驱动致动器和处理器，以便使物件台和处理器在物体的传送方向上或之间基本上沿着与传送方向垂直的方向彼此跟随对象表。

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