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1. 发明授权

US06292582B1 Method and system for identifying defects in a semiconductor 失效
标题翻译：用于识别半导体缺陷的方法和系统
公开(公告)号：US06292582B1
公开(公告)日：2001-09-18
申请号：US08867154
申请日：1997-05-30
申请人： YouLing Lin , A. Kathleen Hennessey , Ramachandra R. Katragadda , Ramakrishna Pattikonda , Rajasekar Reddy , C. Rinn Cleavelin , Howard V. Hastings, II , Wan S. Wong
发明人： YouLing Lin , A. Kathleen Hennessey , Ramachandra R. Katragadda , Ramakrishna Pattikonda , Rajasekar Reddy , C. Rinn Cleavelin , Howard V. Hastings, II , Wan S. Wong
IPC分类号： G06K900
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/10056 , G06T2207/30148 , H01L23/544 , H01L2223/54466 , H01L2223/5448 , H01L2924/0002 , H01L2924/00
摘要： A system and method allow for associating a descriptive label with an anomaly on a manufactured object, such as a semiconductor wafer. The method includes placing the manufactured device on a moveable stage; capturing and preparing a digital-pixel-based representation of the image; symbolically decomposing the digital-pixel-based representation of the image to create a primitive-based representation of the image; analyzing the primitive-based representation of the image to detect and locate the anomaly; isolating primitives associated with the anomaly; comparing the isolated primitives associated with the anomaly with primitives in a knowledge base to locate a set of primitives in the knowledge base most like the isolated primitives associated with the anomaly; and assigning a label associated with the set of primitives in the knowledge base that was most similar to the isolated primitives associated with the anomaly. Different layers of semiconductor wafer may be analyzed to determine an appropriate label for a defect.
摘要翻译：系统和方法允许将描述性标签与制造对象（例如半导体晶片）上的异常相关联。该方法包括将制造的装置放置在可移动台上; 捕获和准备图像的基于数字像素的表示; 象征性地分解图像的基于数字像素的表示以创建图像的基于图元的表示; 分析图像的基于图元的表示以检测和定位异常; 隔离与异常相关的原语; 将与异常相关联的孤立原语与知识库中的原语进行比较，以定位知识库中的一组原语，最像是与异常相关联的孤立原语; 并且在与所述异常相关联的所述孤立原语最相似的知识库中分配与所述基元集相关联的标签。可以分析不同层的半导体晶片以确定缺陷的适当标签。

2. 发明授权

US06246788B1 System and method of optically inspecting manufactured devices 失效
标题翻译：光学检查制造装置的系统和方法
公开(公告)号：US06246788B1
公开(公告)日：2001-06-12
申请号：US09074301
申请日：1998-05-06
申请人： Ramakrishna Pattikonda , Youling Lin , Kathleen Hennessey
发明人： Ramakrishna Pattikonda , Youling Lin , Kathleen Hennessey
IPC分类号： G06K900
CPC分类号： G01N21/9501 , G06T7/0006 , G06T2207/10152 , G06T2207/30141 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/014 , H01L2924/00
摘要： An apparatus, system, and method of optically inspecting printed circuit boards (PCBs) for defects, that reliably determines the dimensions of components including those having the same color as the background, and which can detect components which are missing, misoriented, misaligned, or not properly seated. The apparatus uses a camera and a coherent primary light source mounted at an angle away from the vertical so as to produce sharply defined PCB component shadows on the top surface of the PCB. An image of the PCB is captured, the shadow edges are symbolically decomposed into primitives from which gradients are produced, and then compared to a previously captured gradient of a defect-free PCB. Differences in the two image gradients, if any, are used to identify missing, misaligned, misoriented, and improperly seated components, and to detect foreign objects and other PCB defects.
摘要翻译：用于光学检查印刷电路板（PCB）的缺陷的装置，系统和方法，其可靠地确定包括具有与背景相同颜色的部件的部件的尺寸，并且其可以检测缺失，取向偏移，未对准的部件或未正确就位该装置使用安装在离垂直方向成一定角度的照相机和相干一次光源，以便在PCB的顶表面上产生明显限定的PCB部件阴影。捕获PCB的图像，阴影边缘被符号分解成从其生成梯度的图元，然后与先前捕获的无缺陷PCB梯度进行比较。两个图像梯度的差异（如果有的话）用于识别缺失的，未对准的，不对齐的，不正确的组件，以及检测异物和其他PCB缺陷。

3. 发明授权

US6014461A Apparatus and method for automatic knowlege-based object identification 失效
标题翻译：自动基于知识的对象识别的装置和方法
公开(公告)号：US6014461A
公开(公告)日：2000-01-11
申请号：US998315
申请日：1997-12-24
申请人： Audrey Kathleen Hennessey , YouLing Lin , Veera V. S. Khaja , Ramakrishna Pattikonda , Rajasekar Reddy , Huitian Lu , Ramachandra Katragadda
发明人： Audrey Kathleen Hennessey , YouLing Lin , Veera V. S. Khaja , Ramakrishna Pattikonda , Rajasekar Reddy , Huitian Lu , Ramachandra Katragadda
IPC分类号： G06K9/62
CPC分类号： G06K9/626
摘要： An apparatus and method for automatic knowledge-based object or anomaly classification is provided by capturing a pixel map of an image and from that generating high level descriptors of the object or anomaly such as size, shape, color and sharpness. These descriptors are compared with sets of descriptors in a knowledge-base to classify the object or anomaly.
摘要翻译：通过捕获图像的像素图和从生成对象或异常的高级描述符（例如大小，形状，颜色和锐度）的方式提供用于自动基于知识的对象或异常分类的装置和方法。将这些描述符与知识库中的描述符集进行比较，以对对象或异常进行分类。

4. 发明授权

US07039228B1 System and method for three-dimensional surface inspection 有权
标题翻译：三维表面检测系统及方法
公开(公告)号：US07039228B1
公开(公告)日：2006-05-02
申请号：US09444034
申请日：1999-11-19
申请人： Ramakrishna Pattikonda , Youling Lin
发明人： Ramakrishna Pattikonda , Youling Lin
IPC分类号： G06K9/00
CPC分类号： G01B11/0608 , G01N21/956 , G06K9/2018 , G06T7/521 , G06T2207/10024 , G06T2207/10152 , G06T2207/30141
摘要： An optical inspection system and method for inspecting a component on a printed circuit board (PCB) which determines three-dimensional information in a single scan. A first visual light source illuminates the PCB surface and component with a green light while a second visual light source illuminates the PCB and component with a blue light. At least one laser light source simultaneously illuminates the surface of the PCB with a narrow coherent red-light laser beam. The laser light source is mounted off vertical on a movable mount which enables the laser beam to be directed over an area of interest on the surface of the PCB. The system also includes a color scan camera mounted vertically above the PCB. The camera has red, green, and blue channels. The green and blue channels capture an image of the illuminated surface of the PCB which is used by a computer to determine two-dimensional information about the component. The red channel captures a path of the laser beam as it strikes the surface of the PCB and the component. The computer uses the path to determine height information for the component.
摘要翻译：用于检查在单次扫描中确定三维信息的印刷电路板（PCB）上的部件的光学检查系统和方法。第一视觉光源用绿光照亮PCB表面和部件，而第二视觉光源用蓝光照亮PCB和部件。至少一个激光光源同时用窄的相干红光激光束照射PCB的表面。激光光源垂直安装在可移动的安装座上，使得激光束能够被引导到PCB表面上的感兴趣区域上。该系统还包括垂直安装在PCB上的彩色扫描照相机。相机具有红色，绿色和蓝色通道。绿色和蓝色通道捕获由计算机用于确定关于组件的二维信息的PCB的照亮表面的图像。红色通道捕获激光束在撞击PCB和元件表面时的路径。计算机使用路径来确定组件的高度信息。

5. 发明授权

US06205239B1 System and method for circuit repair 失效
标题翻译：电路修复的系统和方法
公开(公告)号：US06205239B1
公开(公告)日：2001-03-20
申请号：US08866553
申请日：1997-05-30
申请人： YouLing Lin , A. Kathleen Hennessey , Ramakrishna Pattikonda , Rajasekar Reddy , Veera S. Khaja , C. Rinn Cleavelin
发明人： YouLing Lin , A. Kathleen Hennessey , Ramakrishna Pattikonda , Rajasekar Reddy , Veera S. Khaja , C. Rinn Cleavelin
IPC分类号： G06K900
CPC分类号： G06T7/001 , G01N21/95607 , G06T7/0002 , G06T2207/10056 , G06T2207/30148 , H01L22/20 , H01L2924/014
摘要： A system and method for repairing a defect on a manufactured object, which may be a semiconductor wafer, uses a computer and a repair tool. The method includes placing the manufactured device on a moveable stage; capturing and preparing a digital-pixel-based representation of the image; symbolically decomposing the digital-pixel-based representation of an image to create a primitive-based representation of the image; analyzing the primitive-based representation of the image to detect and locate an anomaly; isolating primitives associated with the anomaly; comparing the isolated primitives associated with the anomaly with primitives in a knowledgebase to locate a set of primitives in the knowledgebase that are most like the isolated primitives associated with the anomaly; assigning a defect-type label associated with the set of primitives in the knowledge base that was most similar to the isolated primitives associated with the anomaly; and using a repair tool to repair the defect based on defect-type label for the anomaly.
摘要翻译：用于修复可以是半导体晶片的制造对象上的缺陷的系统和方法使用计算机和修理工具。该方法包括将制造的装置放置在可移动台上; 捕获和准备图像的基于数字像素的表示; 象征性地分解图像的基于数字像素的表示以创建图像的基于图元的表示; 分析图像的基于图元的表示以检测和定位异常; 隔离与异常相关的原语; 将与异常相关联的孤立原语与知识库中的原语进行比较，以定位知识库中最像是与异常相关联的孤立原语的一组原语; 分配与所述知识库中与所述异常相关联的所述孤立原语最相似的所述原始集合相关联的缺陷类型标签; 并使用维修工具根据异常的缺陷型标签修复缺陷。

6. 发明授权

US6091846A Method and system for anomaly detection 失效
标题翻译：异常检测方法与系统
公开(公告)号：US6091846A
公开(公告)日：2000-07-18
申请号：US867156
申请日：1997-05-30
申请人： YouLing Lin , A. Kathleen Hennessey , Ramakrishna Pattikonda , Veera S. Khaja , Rajasekar Reddy
发明人： YouLing Lin , A. Kathleen Hennessey , Ramakrishna Pattikonda , Veera S. Khaja , Rajasekar Reddy
IPC分类号： G01N21/95 , G01N21/956 , G06T7/00 , H01L21/66 , G06K9/00 , G06K9/52 , G06T7/60
CPC分类号： G01N21/95607 , G01N21/9501 , G06T7/001 , H01L22/20 , G06T2207/10056 , G06T2207/30148 , H01L22/12 , H01L2924/014
摘要： A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.
摘要翻译：用于检测制造的装置上的异常的系统和方法包括或利用用于保持和定位装置的可移动台，用于在舞台上捕获装置的图像的相机，耦合到相机的数字转换器，用于产生数字像素 - 基于图像的表示，以及具有处理器和存储器的计算机。计算机耦合到数字转换器，用于从数字转换器接收基于数字像素的表示，并且耦合到该级，用于选择性地移动该级以对准该器件。计算机被编程为可操作以对图像的基于数字像素的表示进行符号分解以创建图像的基于图元的表示。通过开发角度和长度的直方图并匹配它们以确定旋转位移，图像可以通过计算机相对于图像中的几何对象的旋转而对准。

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