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1. 发明申请

US20050063051A1 Arrangement for the direct inout coupling of a laser, particularly of a short-pulse laser 审中-公开
标题翻译：用于激光器，特别是短脉冲激光器的直接入射耦合的布置
公开(公告)号：US20050063051A1
公开(公告)日：2005-03-24
申请号：US10888186
申请日：2004-07-09
申请人： Ralph Lange , Stefan Wilhelm , Volker Gerstner , Roland Scheler , Michael Goelles , Joerg-Michael Funk
发明人： Ralph Lange , Stefan Wilhelm , Volker Gerstner , Roland Scheler , Michael Goelles , Joerg-Michael Funk
IPC分类号： G02B21/18 , G02B21/00 , G02B21/06
CPC分类号： G02B21/002 , G02B21/06
摘要： An arrangement for direct input coupling of a laser, preferably of a short-pulse laser, for nonlinear sample excitation which is located outside of the microscope housing, into the beam path of a laser scanning microscope (LSM), comprising a housing in which is integrated an adjusting laser that can be coupled into the microscope beam path by beam splitters, wherein the housing is advantageously integrated so as to be insertable in the scan module of the LSMA, and a beam splitter for the direct coupling laser has high transmission in the direction of the objective and, further, partial transmission for back-reflections of the adjusting laser coming from the specimen for adjusting the overlapping of the adjusting laser and direct coupling laser.
摘要翻译：用于直接输入耦合激光扫描显微镜（LSM）的激光扫描显微镜（LSM）的光束路径中的用于将位于显微镜外壳之外的非线性样品激发的短脉冲激光器的激光直接输入耦合的装置，其中，集成了可以通过分束器耦合到显微镜光束路径中的调节激光器，其中壳体有利地集成以便可插入到LSMA的扫描模块中，并且用于直接耦合激光器的分束器在并且进一步地，用于调整来自测试样品的调节激光器的反射反射的部分透射以调节调节激光器和直接耦合激光器的重叠。

2. 发明授权

US07656583B2 Beam combiner employing a wedge-shaped cross-section 有权
标题翻译：梁组合器采用楔形横截面
公开(公告)号：US07656583B2
公开(公告)日：2010-02-02
申请号：US11783289
申请日：2007-04-06
申请人： Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
发明人： Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
IPC分类号： G02B27/10
CPC分类号： G02B27/144 , G02B21/0064
摘要： A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.
摘要翻译：一种用于组合两个辐射束，优选在至少一个方向上彼此独立的可移动光束以扫描和/或影响样品，优选地操纵系统和成像系统的光束校正器，其中提供了部分反射层用于辐照，其中所述层的厚度在所述光束辐射体的光学有效横截面上被提供优选地一致的倾斜或下降。

3. 发明申请

US20120268749A1 LASER SCANNING MICROSCOPE AND ITS OPERATING METHOD 审中-公开
标题翻译：激光扫描显微镜及其操作方法
公开(公告)号：US20120268749A1
公开(公告)日：2012-10-25
申请号：US13299515
申请日：2011-11-18
申请人： Michael Goelles , Ralf Netz , Frank Hecht , Joerg-Michael Funk
发明人： Michael Goelles , Ralf Netz , Frank Hecht , Joerg-Michael Funk
IPC分类号： G01B11/14
CPC分类号： G01B11/14 , G02B21/0036 , G02B21/008
摘要： Laser scanning microscope and its operating method in which at least two first and second scanning systems activated independently of each other and that can move in at least one direction illuminate a sample with the help of a beam-combining element, and the light is detected by the sample as it comes in, The scanning fields created by the light distributions on the sample mutually overlap to create a reference pattern on the sample with one of the light distributions, which is then captured and used to create the overlap using the second light distribution and/or a reference pattern arranged in the sample plane or in an intermediate image plane is captured by both scanning fields and used to create the overlap and/or structural characteristics of the sample are captured by the two scanning fields as reference pattern and used to create the overlap in which correction values are determined.
摘要翻译：激光扫描显微镜及其操作方法，其中至少两个第一和第二扫描系统彼此独立地激活并且可以在至少一个方向上移动，借助于光束组合元件照射样品，并且光被检测到样品进入，由样品上的光分布产生的扫描场相互重叠，以在样品上产生参考图案，其中一个光分布被捕获并用于使用第二光分布来创建重叠和/或布置在采样平面或中间图像平面中的参考图案由两个扫描场捕获并用于创建样本的重叠和/或结构特征由两个扫描场作为参考图案捕获，并用于创建确定校正值的重叠。

4. 发明申请

US20070159689A1 Tube-type revolver with at least four positions for injecting or extracting light into or from a laser scanning microscope 审中-公开
标题翻译：具有至少四个位置的管式左轮手枪，用于将光从激光扫描显微镜注入或提取
公开(公告)号：US20070159689A1
公开(公告)日：2007-07-12
申请号：US10586137
申请日：2005-03-24
申请人： Dieter Schau , Peter Huehn , Michael Goelles , Joerg-Michael Funk
发明人： Dieter Schau , Peter Huehn , Michael Goelles , Joerg-Michael Funk
IPC分类号： G02B21/00
CPC分类号： G02B21/002 , G02B21/248
摘要： Arrangement for changing the uncoupling of the object beam and/or the coupling of the beam in a Laser Scanning Microscope, whereby a rotatable tube revolver is provided, which has at least four switching positions and each tube position is associated with a separate tube lens as well as deflecting elements for the object beam, whereby the tube positions for at least the LSM operation, LSM/NDD and/or manipulation and/or illumination, camera and visual operation modes are provided.
摘要翻译：用于在激光扫描显微镜中改变物体束的解耦和/或光束的耦合的装置，由此提供可旋转的管旋转枪，其具有至少四个切换位置，并且每个管位置与单独的管透镜相关联以及用于物体光束的偏转元件，由此提供用于至少LSM操作，LSM / NDD和/或操纵和/或照明，照相机和视觉操作模式的管位置。

5. 发明申请

US20090296207A1 Laser scanning microscope and its operating method 审中-公开
标题翻译：激光扫描显微镜及其操作方法
公开(公告)号：US20090296207A1
公开(公告)日：2009-12-03
申请号：US11783255
申请日：2007-04-06
申请人： Michael Goelles , Ralf Netz , Frank Hecht , Joerg-Michael Funk
发明人： Michael Goelles , Ralf Netz , Frank Hecht , Joerg-Michael Funk
IPC分类号： G02B21/06
CPC分类号： G01B11/14 , G02B21/0036 , G02B21/008
摘要： Laser scanning microscope and its operating method in which at least two first and second light distributions activated independently of each other and that can move in at least one direction illuminate a sample with the help of a beam-combining element, and the light is detected by the sample as it comes in, characterized by the fact that the scanning fields created by the light distributions on the sample are made to overlap mutually such that a reference pattern is created on the sample with one of the light distributions, which is then captured and used to create the overlap with the help of the second light distribution (correction values are determined) and/or a reference pattern arranged in the sample plane or in an intermediate image plane is captured by both scanning fields and used to create the overlap (correction values are determined) and/or structural characteristics of the sample are captured by the two scanning fields as reference pattern and used to create the overlap in which correction values are determined.
摘要翻译：激光扫描显微镜及其操作方法，其中至少两个第一和第二光分布彼此独立地激活并且可以在至少一个方向上移动，借助于光束组合元件照射样品，并且光被样品进入，其特征在于使由样品上的光分布产生的扫描场相互重叠，使得在具有一个光分布的样品上产生参考图案，然后被捕获，用于通过第二光分布（校正值被确定）和/或布置在采样平面中或中间图像平面中的参考图案在两个扫描场捕获并用于创建重叠（校正值被确定）和/或样本的结构特征被两个扫描场作为参考图案捕获并用于创建重叠其中确定校正值。

6. 发明申请

US20080130125A1 Corradiator employing a wedge-shaped cross-section 有权
标题翻译： Corradiator采用楔形横截面
公开(公告)号：US20080130125A1
公开(公告)日：2008-06-05
申请号：US11783289
申请日：2007-04-06
申请人： Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
发明人： Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
IPC分类号： G02B27/10
CPC分类号： G02B27/144 , G02B21/0064
摘要： A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.
摘要翻译：一种用于组合两个辐射束，优选在至少一个方向上彼此独立的可移动光束以扫描和/或影响样品，优选地操纵系统和成像系统的光束校正器，其中提供了部分反射层用于辐照，其中所述层的厚度在所述光束辐射体的光学有效横截面上被提供优选地一致的倾斜或下降。

7. 发明申请

US20070121473A1 Laser scanning microscope with a non-descanned detection and/or observation beam path 审中-公开
标题翻译：具有非下行检测和/或观察光束路径的激光扫描显微镜
公开(公告)号：US20070121473A1
公开(公告)日：2007-05-31
申请号：US10577657
申请日：2004-10-20
申请人： Ralph Lange , Ralf Wolleschensky , Michael Goelles
发明人： Ralph Lange , Ralf Wolleschensky , Michael Goelles
IPC分类号： G11B7/135
CPC分类号： G02B21/002
摘要： Laser Scanning Microscope with a non-descanned detection and/or observation beam path, wherein a beam splitter is provided for the separation of the illumination and the detection beam paths. In the direction of the detection, at least one optical arrangement is provided for the regular transmission of the detected light, whereby between the beam splitter and the optical system, an additional optical arrangement is provided for reducing the diameter of the bundle of the beam to be imaged.
摘要翻译：具有非下行检测和/或观察光束路径的激光扫描显微镜，其中提供分束器用于分离照明和检测光束路径。在检测方向上，提供至少一个光学装置用于常规传输检测到的光，由此在光束分离器和光学系统之间，提供了附加的光学装置，用于将光束束的直径减小到成像。

8. 发明申请

US20070076293A1 Optical zoom system for a light scanning electron microscope 有权
标题翻译：用于光扫描电子显微镜的光学变焦系统
公开(公告)号：US20070076293A1
公开(公告)日：2007-04-05
申请号：US10967335
申请日：2004-10-19
申请人： Ralf Wolleschensky , Joerg Steinert , Michael Goelles , Kristina Uhlendorf
发明人： Ralf Wolleschensky , Joerg Steinert , Michael Goelles , Kristina Uhlendorf
IPC分类号： G02B21/06
CPC分类号： G02B21/0032 , G02B15/173 , G02B21/0052
摘要： For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
摘要翻译：对于共焦扫描电子显微镜（1），提供了一种光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍数是可能的，而是另外在照明中产生瞳孔图像光束路径（IB）[BS]，从而使可变成像长度成为可能（原始光瞳（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）），从而使轴向变化的物镜因此可以补偿瞳孔位置。

9. 发明授权

US08497464B2 Detector arrangement having increased sensitivity 有权
标题翻译：检测器布置灵敏度增加
公开(公告)号：US08497464B2
公开(公告)日：2013-07-30
申请号：US12856792
申请日：2010-08-16
申请人： Wolfgang Bathe , Michael Goelles , Mirko Liedtke
发明人： Wolfgang Bathe , Michael Goelles , Mirko Liedtke
IPC分类号： G01D5/30 , H01J3/14 , H01L27/00
CPC分类号： G01J1/04 , G01J1/02 , G01J1/0209 , G01J1/0407 , G01J1/0411 , G01J1/0422 , G01J3/02 , G01J3/0205 , G01J3/0208 , G01J3/0216 , G01J3/0256 , G02B5/045 , G02B21/0064 , G02B21/008 , H01L27/14625 , H01L27/14806 , H01L31/02325
摘要： To increase the sensitivity of detector arrangements, it is known that light deflection elements in the form of a line arrays having spherical elements may be used to focus incident light onto light-sensitive regions of the detector. Manufacturing such line arrays is complex and cost intensive, especially in small lot numbers. The increased sensitivity of the detector array can be achieved easily and inexpensively by using a novel light deflection element. The detector arrangement therefore has a light deflection element having light entrance surfaces, deflecting incident light by refraction onto light-sensitive regions of the detector. Light entrance surfaces of the light deflection element are inclined with respect to one another and are designed as planar surfaces. The detector arrangement is suitable in particular for detection of light emanating from a specimen in a microscope, preferably in a laser-scanning microscope.
摘要翻译：为了提高检测器装置的灵敏度，已知可以使用具有球形元件的线阵列形式的光偏转元件将入射光聚焦到检测器的光敏区域上。制造这样的线阵列是复杂和成本密集的，特别是在很少的批号。通过使用新颖的光偏转元件，可以容易且廉价地实现检测器阵列的增加的灵敏度。因此，检测器装置具有具有光入射表面的光偏转元件，通过折射将入射光偏转到检测器的光敏区域上。光偏转元件的光入射面相对于彼此倾斜并被设计为平面。检测器装置特别适于检测在显微镜中优选在激光扫描显微镜中从样品发出的光。

10. 发明授权

US07888628B2 Optical zoom system for a light scanning microscope 有权
标题翻译：光学扫描显微镜的光学变焦系统
公开(公告)号：US07888628B2
公开(公告)日：2011-02-15
申请号：US12320293
申请日：2009-01-22
申请人： Ralf Wolleschensky , Joerg Steinert , Michael Goelles , Kristina Uhlendorf
发明人： Ralf Wolleschensky , Joerg Steinert , Michael Goelles , Kristina Uhlendorf
IPC分类号： H01J3/14 , G02B21/06
CPC分类号： G02B21/0072 , G02B15/173
摘要： For a confocal scanning microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable image length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
摘要翻译：对于共焦扫描显微镜（1），提供了具有线性扫描的光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍率是可能的，而是另外产生瞳孔图像照明光束路径（IB）[BS]，从而使可变图像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）可以补偿变化的物镜光瞳位置。

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