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    • 3. 发明授权
    • Method for thinning a sample and sample carrier for performing said method
    • 用于稀释样品和样品载体以执行所述方法的方法
    • US08389955B2
    • 2013-03-05
    • US12026521
    • 2008-02-05
    • Ralf Lehmann
    • Ralf Lehmann
    • G01F23/00G21K5/08G21K5/10
    • H01J37/20H01J37/3056H01J2237/31745
    • A sample carrier (3) for thinning a sample (1) taken from e.g. a semiconductor wafer. The sample carrier comprises a rigid part (5), e.g. made of e.g. copper, with an outer boundary (6), and a supporting film (4), e.g. made of carbon, extending beyond the outer boundary. By placing the sample on the supporting film, the sample can be attached to the rigid structure using e.g. IBID. The supporting film aligns the samples when they are placed onto it. After attaching the sample to the rigid structure the sample can be thinned with e.g. an ion beam, during which thinning the supporting film is locally removed as well. The invention results in better alignment of the sample to the sample carrier, and also in more freedom how the sample is transported from the wafer to the sample carrier, e.g. with the help of an electrically charged glass needle (2). The latter eliminates the attaching/severing steps that are normally associated with the transport of a sample to a sample carrier.
    • 用于使样品(1)变薄的样品载体(3) 半导体晶片。 样品载体包括刚性部分(5),例如 由例如 铜,具有外边界(6)和支撑膜(4),例如。 由碳制成,延伸超出外界。 通过将样品放置在支撑膜上,样品可以使用例如粘附到刚性结构上。 IBID。 当将样品放置在其上时,支撑膜对准样品。 将样品连接到刚性结构后,样品可以用例如稀释剂稀释。 在此期间,局部去除了支撑膜的变薄的离子束。 本发明导致样品与样品载体的更好的对准,以及样品从晶片如何从样品载体转运到样品载体的更自由。 借助于带电的玻璃针(2)。 后者消除了通常与样品运送到样品载体相关联的附着/切断步骤。
    • 7. 发明授权
    • Sensor for measuring a magnetic field
    • 用于测量磁场的传感器
    • US06429498B1
    • 2002-08-06
    • US09763878
    • 2001-02-28
    • Jakob ScheltenRalf Lehmann
    • Jakob ScheltenRalf Lehmann
    • H01L2982
    • G01R33/06H01L43/06
    • The invention relates to a sensor for measuring a magnetic field. The inventive sensor has a high level of measuring sensitivity compared to a Hall probe, comprising several electrically semiconductive layers. The layers are arranged in the form of a power diode connected in the reverse direction, consisting of an anodelayer, a cathode layer and an intrinsically conductive layer enclosed between the two. The anode layer is subdivided by insulation sections into several anode layer areas, these areas being insulated from each other. The cathode layer has an injector area on the areas opposite the insulation sections which is oppositely doped. An electron beam is formed between the injector area and the anode by applying an injection voltage to the injector area. The electron beam is distributed across the areas of the earthed anode layer areas in the form of uniform partial currents. The electron beam is diverted by a magnetic field which forms in the intrinsically conductive layer, resulting in partial currents of different strengths on the earthed anode layer areas. The magnetic field can then be evaluated by measuring these differences in strength between the partial currents.
    • 本发明涉及一种用于测量磁场的传感器。 与霍尔探头相比,本发明的传感器具有高水平的测量灵敏度,其包括几个电半导体层。 这些层以反向连接的功率二极管的形式布置,由阳极层,阴极层和封闭在两者之间的本征导电层组成。 阳极层由绝缘部分划分为多个阳极层区域,这些区域彼此绝缘。 阴极层在与相对掺杂的绝缘部分相对的区域上具有喷射器区域。 通过向喷射器区域施加注入电压,在喷射器区域和阳极之间形成电子束。 电子束以均匀的部分电流的形式分布在接地的阳极层区域的区域上。 电子束通过在本征导电层中形成的磁场转移,导致在接地的阳极层区域上具有不同强度的部分电流。 然后可以通过测量部分电流之间的强度差来评估磁场。