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    • 1. 发明授权
    • Pressure sensor with semiconductor pressure measuring transducer
    • 带有半导体压力测量传感器的压力传感器
    • US08511151B2
    • 2013-08-20
    • US13203002
    • 2010-02-02
    • Raimund BecherRalf NurnbergerFred HakerOlaf KrusemarkOlaf Textor
    • Raimund BecherRalf NurnbergerFred HakerOlaf KrusemarkOlaf Textor
    • G01L9/00
    • G01L19/0046G01L19/04
    • A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.
    • 一种压力传感器,包括:半导体压力测量换能器,具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构,其在第一第二开口之间延伸穿过固体。 第一开口由可与压力接触的隔离膜密封,以将待测量的压力引入到液压路径中。 液压通道在第二个开口处打开一个传感器腔室,其中压力测量传感器被布置在该传感器腔室中,并由压力测量传感器的测量膜密封。 液压路径包含转移液体; 填充元件布置在换能器室中,以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。 绝缘板,布置在传感器室中,位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上,或者与所述填充元件实施为一体。
    • 2. 发明申请
    • PRESSURE SENSOR WITH SEMICONDUCTOR PRESSURE MEASURING TRANSDUCER
    • 带半导体压力测量传感器的压力传感器
    • US20110303023A1
    • 2011-12-15
    • US13203002
    • 2010-02-02
    • Raimund BecherRalf NurnbergerFred HakerOlaf KrusemarkOlaf Textor
    • Raimund BecherRalf NurnbergerFred HakerOlaf KrusemarkOlaf Textor
    • G01L1/02
    • G01L19/0046G01L19/04
    • A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.
    • 一种压力传感器,包括:半导体压力测量换能器,具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构,其在第一第二开口之间延伸穿过固体。 第一开口由可与压力接触的隔离膜密封,以将待测量的压力引入到液压路径中。 液压通道在第二个开口处打开一个传感器腔室,其中压力测量传感器被布置在该传感器腔室中,并由压力测量传感器的测量膜密封。 液压路径包含转移液体; 填充元件布置在换能器室中,以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。 绝缘板,布置在传感器室中,位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上,或者与所述填充元件实施为一体。
    • 3. 发明申请
    • Hydraulic pressure intermediary
    • 液压中介
    • US20090301209A1
    • 2009-12-10
    • US11921567
    • 2006-05-10
    • Wolfgang DannhauerRalf NurnbergerAnh Tuan Tham
    • Wolfgang DannhauerRalf NurnbergerAnh Tuan Tham
    • G01L7/08
    • G01L19/0046
    • A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint. Further, the separating-membrane transition region includes an annular moat having a moat outer side, a moat inner side, and a moat transition zone, wherein the moat outer side has a first annular inclined surface, which borders on the separating-membrane edge region, the moat inner side includes a second annular inclined surface, which borders on the separating-membrane central region, and the moat transition zone extends between the first and the second inclined surfaces.
    • 液压中介包括:具有碗状表面的平台,该碗状表面具有环形平台表面边缘区域,相对于平台表面边缘区域凹陷并被平台表面边缘区域包围的平台表面中心区域 以及在其内侧与平台表面中心区域相邻并且在其外侧与平台表面边缘区域相邻的环形平台表面过渡区域; 具有平坦的,环状的分隔膜边缘区域的碗状分离膜,相对于分隔膜边缘区域凹陷的分离膜中心区域和在其内侧边界的环状分离膜过渡区域 ,分离膜中心区域,其外侧为分离膜边缘区域。 分离膜沿着周围的接头与分离膜边缘区域内的平台表面边缘区域连接。 此外,分离膜过渡区域包括具有护城河外侧,护城河内侧和护城河过渡区域的环形护城河,其中护城河外侧具有第一环形倾斜表面,该第一环形倾斜表面邻接在分隔膜边缘区域 护城河内侧包括与分隔膜中心区域相接的第二环形倾斜表面,并且护城河过渡区域在第一和第二倾斜表面之间延伸。