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    • 2. 发明授权
    • Gas sensor having zinc oxide nano-structures and method of fabricating the same
    • 具有氧化锌纳米结构的气体传感器及其制造方法
    • US08087151B2
    • 2012-01-03
    • US12373908
    • 2007-04-03
    • Rae-Man ParkSang-Hyeob KimJonghyurk ParkSunglyul Maeng
    • Rae-Man ParkSang-Hyeob KimJonghyurk ParkSunglyul Maeng
    • G01N27/12
    • G01N27/12Y10T29/49002
    • A gas sensor includes zinc oxide nano-structures formed on a substrate, a plurality of metal islands coated on a surface of each zinc oxide nano-structure and separated from one another, a first electrode electrically connected to one end of each zinc oxide nano-structure through the substrate, a second electrode electrically connected to the other end of each zinc oxide nano-structure, and a current variation-measuring unit electrically connected to each of the first electrode and the second electrode so as to measure a variation in the amount of current flowing between the first electrode and the second electrode. In order to form the plurality of metal islands on the zinc oxide nano-structures, a solution of metal components of a metal material is coated on the surface of each zinc oxide nano-structure.
    • 气体传感器包括形成在基板上的氧化锌纳米结构体,涂覆在每个氧化锌纳米结构的表面上且彼此分离的多个金属岛,与每个氧化锌纳米结构的一端电连接的第一电极, 通过基板的结构,与每个氧化锌纳米结构的另一端电连接的第二电极和电连接到第一电极和第二电极中的每一个的电流变化测量单元,以测量量的变化量 的电流在第一电极和第二电极之间流动。 为了在氧化锌纳米结构上形成多个金属岛,金属材料的金属成分溶液涂覆在每个氧化锌纳米结构的表面上。
    • 3. 发明申请
    • GAS SENSOR HAVING ZINC OXIDE NANO-STRUCTURES AND METHOD OF FABRICATING THE SAME
    • 具有氧化锌纳米结构的气体传感器及其制造方法
    • US20100012919A1
    • 2010-01-21
    • US12373908
    • 2007-04-03
    • Rae-Man ParkSang-Hyeob KimJonghyurk ParkSunglyul Maeng
    • Rae-Man ParkSang-Hyeob KimJonghyurk ParkSunglyul Maeng
    • H01L29/12H01L21/34
    • G01N27/12Y10T29/49002
    • Provided are a gas sensor using a plurality of zinc oxide nano-structures on which metal islands are formed, and a method of fabricating the same. The gas sensor comprises zinc oxide nano-structures formed on a substrate, a plurality of metal islands coated on a surface of each zinc oxide nano-structure and separated from one another, a first electrode electrically connected to one end of each zinc oxide nano-structure through the substrate, a second electrode electrically connected to the other end of each zinc oxide nano-structure, and a current variation-measuring unit electrically connected to each of the first electrode and the second electrode so as to measure a variation in the amount of current flowing between the first electrode and the second electrode. In order to form the plurality of metal islands separated from one another on the surface of each zinc oxide nano-structure using a wet process, metal components of a metal material are coated on the surface of each zinc oxide nano-structure using the solution in which the metal material is solved.
    • 提供了使用其上形成金属岛的多个氧化锌纳米结构的气体传感器及其制造方法。 气体传感器包括形成在基板上的氧化锌纳米结构体,涂覆在每个氧化锌纳米结构的表面上并分离的多个金属岛,与每个氧化锌纳米结构的一端电连接的第一电极, 通过基板的结构,与每个氧化锌纳米结构的另一端电连接的第二电极和电连接到第一电极和第二电极中的每一个的电流变化测量单元,以测量量的变化量 的电流在第一电极和第二电极之间流动。 为了使用湿法在每个氧化锌纳米结构的表面上形成彼此分离的多个金属岛,金属材料的金属成分使用溶液涂覆在每个氧化锌纳米结构的表面上 金属材料被解决。