专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20150260504A1 OPTICAL MEASURING METHOD AND MEASURING DEVICE HAVING A MEASURING HEAD FOR CAPTURING A SURFACE TOPOGRAPHY BY CALIBRATING THE ORIENTATION OF THE MEASURING HEAD 有权
标题翻译：具有测量头的光学测量方法和测量装置，用于通过校准测量头的方位来获取表面形貌
公开(公告)号：US20150260504A1
公开(公告)日：2015-09-17
申请号：US14713150
申请日：2015-05-15
申请人： Precitec Optronik GmbH
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fibre array with i fibres of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.
摘要翻译：本发明涉及一种用于获取测量对象的表面形貌的光学测量过程。为此，提供了一种在测量头引导装置中具有测量头的测量装置，用于对表面形貌进行彩色共焦获取或用于对表面形貌的距离进行光谱干涉OCT采集。首先，来自具有i个测量点的i光纤的光纤阵列的光源的光谱宽带光通过公共测量头光学器件引导到测量对象上，形成i个测量点的点阵列。 i i测量通道的反射光谱然后被采集和数字化。最后，通过去除测量头引导装置的系统测量误差和时间相关偏差运动的时间变化来评估数字化反射光谱。

2. 发明授权

US09677871B2 Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head 有权
公开(公告)号：US09677871B2
公开(公告)日：2017-06-13
申请号：US14713150
申请日：2015-05-15
申请人： Precitec Optronik Gmbh
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B9/02 , G01B11/02 , G01B11/24
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fiber array with i fibers of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.

3. 发明授权

US09500471B2 Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object 有权
标题翻译：光学测量装置和用于原位获取物体的支撑体和边缘区域之间的台阶高度的方法
公开(公告)号：US09500471B2
公开(公告)日：2016-11-22
申请号：US14307481
申请日：2014-06-17
申请人： Precitec Optronik Gmbh
发明人： Berthold Michelt , Matthias Kunkel
IPC分类号： G01B11/06 , G01B11/245
CPC分类号： G01B11/0608 , G01B11/0691 , G01B11/245
摘要： The invention relates to an optical measuring device for acquiring in situ a difference in distance between a support and an edge region of an object to be measured. The optical measuring device has a measuring head with dual beam guide which directs a first measuring beam towards the support and a second measuring beam towards the edge region of the object to be measured. Means are provided for acquiring and forming reflection spectra of the first measuring beam which is directed towards the support and the second measuring beam which is directed towards the edge region of the object to be measured. The measuring device has a multi-channel measuring apparatus with one spectrometer line. An evaluation unit for the reflection spectra for acquiring the stage height between the support and the edge region of the object works together with a spectrometer and a display unit.
摘要翻译：本发明涉及一种光学测量装置，用于原位获取待测物体的支撑体与边缘区域之间的距离差。光学测量装置具有测量头，其具有双光束引导件，其将第一测量光束朝向支撑件引导，而第二测量光束朝向待测量物体的边缘区域。提供了用于获取和形成朝向支撑件的第一测量光束的反射光谱的装置和朝向被测量物体的边缘区域的第二测量光束。测量装置具有多通道测量装置，具有一个光谱仪线。用于获取载体和物体的边缘区域之间的台阶高度的反射光谱的评估单元与光谱仪和显示单元一起工作。

4. 发明授权

US09982994B2 Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head 有权
公开(公告)号：US09982994B2
公开(公告)日：2018-05-29
申请号：US15588021
申请日：2017-05-05
申请人： Precitec Optronik Gmbh
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B9/02 , G01B11/24 , G01B11/14
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fibre array with i fibres of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.

5. 发明申请

US20170234678A1 OPTICAL MEASURING METHOD AND MEASURING DEVICE HAVING A MEASURING HEAD FOR CAPTURING A SURFACE TOPOGRAPHY BY CALIBRATING THE ORIENTATION OF THE MEASURING HEAD 审中-公开
公开(公告)号：US20170234678A1
公开(公告)日：2017-08-17
申请号：US15588021
申请日：2017-05-05
申请人： Precitec Optronik Gmbh
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B11/24 , G01B11/14 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fibre array with i fibres of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式