会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • IC layout parsing for multiple masks
    • IC布局解析多个掩码
    • US08713483B2
    • 2014-04-29
    • US11758510
    • 2007-06-05
    • Alexander TritchkovEmile Y. SahouriaLe Hong
    • Alexander TritchkovEmile Y. SahouriaLe Hong
    • G06F17/50
    • G03F1/70G03F1/26
    • A method for separating features in a target layout into different mask layouts for use in a photolithographic process. Features of a target layer are searched for features having a predefined shape. In one embodiment, portions of the feature having the predefined shape divided into two or more sub-features and at least one sub-feature are not considered when separating the features into two or more mask layouts. In another embodiment, features having a predefined shape are cut to form two or more sub-features and all features and sub-features are considered when separating the features of the target layout into the two or more mask layouts.
    • 用于将目标布局中的特征分离成用于光刻工艺的不同掩模布局的方法。 搜索具有预定义形状的特征的目标层的特征。 在一个实施例中,当将特征分成两个或更多个掩模布局时,不考虑具有划分为两个或更多个子特征和至少一个子特征的预定形状的特征的部分。 在另一个实施例中,切割具有预定形状的特征以形成两个或更多个子特征,并且当将目标布局的特征分成两个或更多个掩模布局时,考虑所有特征和子特征。
    • 3. 发明申请
    • EDGE FRAGMENT CORRELATION DETERMINATION FOR OPTICAL PROXIMITY CORRECTION
    • 用于光学近似校正的边缘片段相关确定
    • US20130198698A1
    • 2013-08-01
    • US13363343
    • 2012-01-31
    • Junjiang LeiLe HongMei Fang ShenYi Ning Pan
    • Junjiang LeiLe HongMei Fang ShenYi Ning Pan
    • G06F17/50
    • G03F1/36G03F1/68G03F1/70
    • Aspects of the invention relate to techniques for determining edge fragment correlation information. With various implementations of the invention, image intensity slope information for edge fragments in a layout design is determined. The image intensity slope information comprises information describing how image intensity for each of the edge fragments changes with its position. Image amplitude sensitivity information for the edge fragments is also determined. The image amplitude sensitivity information comprises information describing how image amplitude for each of the edge fragments changes with positions of neighboring edge fragments. Based on the image intensity slope information and the image amplitude sensitivity information, edge fragment correlation information for the edge fragments is determined. Using the edge fragment correlation information, the layout design may be processed by using, for example, OPC techniques. This OPC process may be performed on the whole layout design or problematic layout regions identified by a conventional OPC process.
    • 本发明的方面涉及用于确定边缘片段相关信息的技术。 通过本发明的各种实现,确定了布局设计中的边缘片段的图像强度斜率信息。 图像强度斜率信息包括描述每个边缘片段的图像强度如何随其位置而变化的信息。 还确定了边缘片段的图像幅度敏感度信息。 图像振幅敏感度信息包括描述每个边缘片段的图像幅度如何随着相邻边缘片段的位置而变化的信息。 基于图像强度斜率信息和图像振幅敏感度信息,确定边缘片段的边缘片段相关信息。 使用边缘片段相关信息,可以通过使用例如OPC技术来处理布局设计。 该OPC处理可以在由常规OPC过程识别的整个布局设计或有问题的布局区域上执行。
    • 4. 发明授权
    • Edge fragment correlation determination for optical proximity correction
    • 光学邻近校正的边缘片段相关性确定
    • US08539391B2
    • 2013-09-17
    • US13363343
    • 2012-01-31
    • Junjiang LeiLe HongMei-Fang ShenYiNing Pan
    • Junjiang LeiLe HongMei-Fang ShenYiNing Pan
    • G06F17/50
    • G03F1/36G03F1/68G03F1/70
    • Aspects of the invention relate to techniques for determining edge fragment correlation information. With various implementations of the invention, image intensity slope information for edge fragments in a layout design is determined. The image intensity slope information comprises information describing how image intensity for each of the edge fragments changes with its position. Image amplitude sensitivity information for the edge fragments is also determined. The image amplitude sensitivity information comprises information describing how image amplitude for each of the edge fragments changes with positions of neighboring edge fragments. Based on the image intensity slope information and the image amplitude sensitivity information, edge fragment correlation information for the edge fragments is determined. Using the edge fragment correlation information, the layout design may be processed by using, for example, OPC techniques. This OPC process may be performed on the whole layout design or problematic layout regions identified by a conventional OPC process.
    • 本发明的方面涉及用于确定边缘片段相关信息的技术。 通过本发明的各种实现,确定了布局设计中的边缘片段的图像强度斜率信息。 图像强度斜率信息包括描述每个边缘片段的图像强度如何随其位置而变化的信息。 还确定了边缘片段的图像幅度敏感度信息。 图像振幅敏感度信息包括描述每个边缘片段的图像幅度如何随着相邻边缘片段的位置而变化的信息。 基于图像强度斜率信息和图像振幅敏感度信息,确定边缘片段的边缘片段相关信息。 使用边缘片段相关信息,可以通过使用例如OPC技术来处理布局设计。 该OPC处理可以在由常规OPC过程识别的整个布局设计或有问题的布局区域上执行。
    • 6. 发明申请
    • IC LAYOUT PARSING FOR MULTIPLE MASKS
    • 用于多个屏蔽的IC布局分配
    • US20080307381A1
    • 2008-12-11
    • US11758510
    • 2007-06-05
    • Alexander TritchkovEmile Y. SahouriaLe Hong
    • Alexander TritchkovEmile Y. SahouriaLe Hong
    • G06F9/455
    • G03F1/70G03F1/26
    • A method for separating features in a target layout into different mask layouts for use in a photolithographic process. Features of a target layer are searched for features having a predefined shape. In one embodiment, portions of the feature having the predefined shape divided into two or more sub-features and at least one sub-feature are not considered when separating the features into two or more mask layouts. In another embodiment, features having a predefined shape are cut to form two or more sub-features and all features and sub-features are considered when separating the features of the target layout into the two or more mask layouts.
    • 用于将目标布局中的特征分离成用于光刻工艺的不同掩模布局的方法。 搜索具有预定义形状的特征的目标层的特征。 在一个实施例中,当将特征分成两个或更多个掩模布局时,不考虑具有划分为两个或更多个子特征和至少一个子特征的预定形状的特征的部分。 在另一个实施例中,切割具有预定形状的特征以形成两个或更多个子特征,并且当将目标布局的特征分成两个或更多个掩模布局时,考虑所有特征和子特征。