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    • 3. 发明授权
    • Complex pierced micromechanical part
    • 复杂穿孔微机械零件
    • US08636050B2
    • 2014-01-28
    • US13365041
    • 2012-02-02
    • Pierre CusinDavid RichardPhilippe Dubois
    • Pierre CusinDavid RichardPhilippe Dubois
    • B22C7/00B22D19/00B22D23/00
    • B81C99/0085B81B2201/035
    • The invention relates to a method of fabricating a micromechanical part made of a single piece material. According to the invention, the method includes the following steps: a) forming a substrate which includes the negative cavity for said micromechanical part to be fabricated; b) forming a sacrificial layer on one portion of the substrate; c) depositing particles on the substrate intended to form a germ ination layer; d) removing the sacrificial layer so as to selectively leave one portion of the substrate free of any particles; e) depositing a layer of material by chemical vapour phase deposition so that the material is exclusively deposited where the particles remain; f) removing the substrate to release the micromechanical part formed in said negative cavity.
    • 本发明涉及一种制造由单片材料制成的微机械部件的方法。 根据本发明,该方法包括以下步骤:a)形成包括用于所要制造的微机械部件的负空腔的基片; b)在衬底的一部分上形成牺牲层; c)在用于形成胚芽层的基底上沉积颗粒; d)去除牺牲层,以便选择性地使衬底的一部分没有任何颗粒; e)通过化学气相沉积沉积一层材料,使得材料被专门沉积在颗粒保留的地方; f)去除衬底以释放形成在所述负腔中的微机械部件。
    • 8. 发明申请
    • BALANCE WITH INERTIA ADJUSTMENT WITH NO INSERTS
    • 与无插入调整的平衡
    • US20120014229A1
    • 2012-01-19
    • US13184903
    • 2011-07-18
    • Daniel MALLETFrédéric TollePhilippe BarthoulotDaniel VicenteEmmanuel GrafPhilomène BergerPierre Cusin
    • Daniel MALLETFrédéric TollePhilippe BarthoulotDaniel VicenteEmmanuel GrafPhilomène BergerPierre Cusin
    • G04B17/06G04B17/20
    • G04B18/006G04B17/063
    • The invention concerns a timepiece balance (1), with inertia adjustment including a hub (2) pivoting about a balance staff (3) and a felloe (5), connected to said hub (2) by a joining surface (6).It is wherein said felloe (5) is made in a single piece with said joining surface (6) and said hub (2) in a micro-machinable material, or silicon, or quartz, or a compound thereof, or an alloy derived from MEMS technology, or an alloy obtained by the “LIGA” method, and in that it includes at least a first resilient arm (40) including coupling means (41) arranged for cooperating, in various coupling positions, with complementary coupling means (42) comprised in said felloe (5) to form, in the coupling position, a closed loop, the inertia of which relative to said balance staff (3) is variable according to said coupling positions.The invention also concerns a sprung balance or a timepiece incorporating a balance of this type.
    • 本发明涉及一种钟表平衡(1),其包括惯性调节,其包括通过接合表面(6)连接到所述轮毂(2)的围绕平衡人员(3)枢转的轮毂(2)。 其特征在于,所述散热片(5)与所述接合表面(6)和所述轮毂(2)以可微加工材料或硅或石英或其化合物或由其衍生的合金制成单件式 MEMS技术或通过“LIGA”方法获得的合金,并且其包括至少第一弹性臂(40),第一弹性臂(40)包括联接装置(41),其布置成在各种联接位置与互补联接装置(42)配合, 包括在所述散热片(5)中,以在耦合位置形成闭合回路,所述闭合回路相对于所述平衡杆(3)的惯性根据所述联接位置是可变的。 本发明还涉及一种结合这种平衡的弹簧平衡或钟表。
    • 10. 发明申请
    • COMPOSITE MICROMECHANICAL COMPONENT AND METHOD OF FABRICATING THE SAME
    • 复合微生物组分及其制备方法
    • US20100308010A1
    • 2010-12-09
    • US12797389
    • 2010-06-09
    • Pierre CusinJean-Philippe Thiebaud
    • Pierre CusinJean-Philippe Thiebaud
    • C23F1/02
    • B81C99/008B81B3/0075B81B2201/035B81C1/00031B81C1/00087B81C1/00119B81C2201/0132B81C2201/032C25D1/003C25D1/20C25D5/022G04B13/022G04B13/026G04D3/0069
    • The invention relates to a method (1) of fabricating a composite micromechanical component (41, 41′) including the following steps: a) providing (10) a substrate (9, 9′) that includes a horizontal top layer (21) and a horizontal bottom layer (23) made of electrically conductive, micromachinable material, and secured to each other by an electrically insulating, horizontal, intermediate layer (22); b) etching at least one pattern (26) in the top layer (21) through to the intermediate layer (22), so as to form at least one cavity (25) in the substrate (9, 9′); c) coating (16) the top part of said substrate with an electrically insulating coating (30); d) directionally etching (18) said coating and said intermediate layer so as to limit the presence thereof exclusively at each vertical wall (51, 52) formed in said top layer; e) performing (5) an electrodeposition by connecting the electrode to the conductive bottom layer (23) of the substrate (9, 9′) to form at least one metal part (33, 43, 43′) of said component; f) releasing the composite component (41, 41′) from the substrate (9, 9′). The invention concerns the field of micromechanical components, particularly for timepiece movements.
    • 本发明涉及一种制造复合微机械部件(41,41')的方法(1),包括以下步骤:a)提供(10)包括水平顶层(21)的衬底(9,9')和 由导电的可微加工材料制成并由电绝缘的水平中间层(22)彼此固定的水平底层(23); b)将顶层(21)中的至少一个图案(26)蚀刻到中间层(22),以在衬底(9,9')中形成至少一个空腔(25); c)用电绝缘涂层(30)涂覆(16)所述基底的顶部; d)定向地蚀刻(18)所述涂层和所述中间层,以限制其在形成在所述顶层中的每个垂直壁(51,52)处的存在; e)通过将电极连接到基板(9,9')的导电底层(23)上来执行(5)电沉积,以形成所述部件的至少一个金属部分(33,43,43'); f)从所述基板(9,9')释放所述复合部件(41,41')。 本发明涉及微机械部件的领域,特别是用于钟表运动。