会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Method for determining concentrations of additives in acid copper electrochemical deposition baths
    • 确定酸性铜电化学沉积池中添加剂浓度的方法
    • US06709568B2
    • 2004-03-23
    • US10064125
    • 2002-06-13
    • Jianwen HanRonni M. EttermanPeter M. RobertsonRichard BhellaDavid Price
    • Jianwen HanRonni M. EttermanPeter M. RobertsonRichard BhellaDavid Price
    • G01N2742
    • G01N27/4161G01N27/42
    • The present invention relates to a method for determining concentration of brightener and leveler contained in an aqueous acid metal electroplating solution, by firstly determining the concentration of the brightener at a first set of measurement conditions, and secondly determining the concentration of the leveler at a second set of measurement conditions, provided that the first set of measurement conditions differ from the second set of measurement conditions on the rotation speed of a rotating disc electrode used for measuring plating potential of said aqueous acid metal electroplating solution, and optionally, the electroplating duration at which the plating potential of said aqueous acid metal electroplating solution is measured, provided that the first rotation speed is lower than the second rotation speed, and that the first electroplating duration is shorter than the second electroplating duration.
    • 本发明涉及一种通过首先在第一组测量条件下确定增白剂的浓度来确定含酸的酸性金属电镀溶液中所含的增白剂和矫正剂的浓度的方法,其次在第二次测定矫光器的浓​​度 条件是第一组测量条件与第二组测量条件不同,所述第二组测量条件对于用于测量所述酸性金属电镀水溶液的电镀电位的旋转盘电极的旋转速度,以及可选地,电镀持续时间在 测量所述含水酸性金属电镀溶液的电镀电位,条件是所述第一转速低于所述第二转速,并且所述第一电镀持续时间短于所述第二电镀持续时间。
    • 7. 发明授权
    • Electrode assembly and method of using the same
    • 电极组件及其使用方法
    • US06758960B1
    • 2004-07-06
    • US10325379
    • 2002-12-20
    • Peter M. Robertson
    • Peter M. Robertson
    • G01N27403
    • G01N27/38
    • The present invention relates to an electrode assembly that is capable of both solution measurement and in-line self-cleaning. Specifically, such electrode assembly comprises a central electrode and a measurement circuit for solution measurement, and an auxiliary electrode and an auxiliary current sourse for generating gas during intervals between solution measurement cycles, so as to remove any solid or liquid residues that may passivate the central electrode, thereby cleaning and rejuvenating the central electrode and preparing it for the next solution measurement cycle.
    • 本发明涉及能够进行溶液测量和在线自清洁的电极组件。 具体地说,这种电极组件包括中心电极和用于溶液测量的测量电路,以及用于在溶液测量循环之间的间隔期间产生气体的辅助电极和辅助电流源,以便去除可能钝化中心的任何固体或液体残余物 电极,从而清洗和再生中心电极并准备下一个溶液测量循环。
    • 10. 发明授权
    • Apparatus for determination of additives in metal plating baths
    • 用于测定金属电镀浴中添加剂的装置
    • US06495011B2
    • 2002-12-17
    • US09819218
    • 2001-03-28
    • Peter M. Robertson
    • Peter M. Robertson
    • G01N27403
    • G01N27/42G01N27/4161
    • An apparatus and method for the indirect determination of concentrations of additives in metal plating electrolyte solutions, particularly organic additives in Cu-metalization baths for semiconductor manufacturing. The apparatus features a reference electrode housed in an electrically isolated chamber and continuously immersed in the base metal plating solution (without the additive to be measured). An additive concentration determination method comprises electroplating a test electrode at a constant or known current in a mixing chamber wherein the base metal plating solution is mixed with small volumes of the sample and various calibration solutions containing the additive to be measured. Plating potentials between the electrodes are measured and plotted for each of the solution mixtures, and data are extrapolated to determine the concentration of the additive in the sample. A multi-cycle method determines the concentration of both accelerator and suppressor organic additives in Cu plating solution in a single test suite.
    • 用于间接测定金属电镀溶液中添加剂浓度的装置和方法,特别是用于半导体制造的Cu金属化浴中的有机添加剂。 该装置具有一个参考电极,该参比电极容纳在一个电隔离的腔室中,并连续浸没在贱金属镀液中(不含待测量的添加剂)。 添加剂浓度测定方法包括在混合室中以恒定或已知电流电镀测试电极,其中将贱金属电镀溶液与少量样品和包含待测量添加剂的各种校准溶液混合。 对每个溶液混合物测量和绘制电极之间的电位,并且外推数据以确定样品中添加剂的浓度。 多循环方法确定单个试验套件中Cu电镀溶液中促进剂和抑制剂有机添加剂的浓度。