专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080232021A1 Low Maintenance AC Gas Flow Driven Static Neutralizer and Method 有权
标题翻译：低维护AC气流驱动静态中和器和方法
公开(公告)号：US20080232021A1
公开(公告)日：2008-09-25
申请号：US12049350
申请日：2008-03-16
申请人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
发明人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
IPC分类号： H05F3/00
CPC分类号： H01T23/00
摘要： A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s). The first region may include the second region.
摘要翻译：一种低维护AC气流驱动静电中和器，包括至少一个发射器和至少一个参考电极; 电源，其具有电耦合到发射极的输出端和与所述参考电极电耦合的参考端子，所述参考电极设置成产生通过电晕放电产生离子的输出波形，并且当通过电晕放电产生电场时产生电场，该输出波形被施加到发射极; 设置成产生穿过包括这些产生的离子和发射器的第一区域的气流的气体流动源，气流包括流速; 并且其中，在第一持续时间期间，所述输出波形减小由所述电场产生的电力，使得所述气流能够从所述发射器携带可能位于围绕所述发射器的第二区域内的污染颗粒（ s），并且最小化污染颗粒积聚在发射器上的可能性。第一区域可以包括第二区域。

2. 发明授权

US08009405B2 Low maintenance AC gas flow driven static neutralizer and method 有权
标题翻译：低维护AC气流驱动静态中和器和方法
公开(公告)号：US08009405B2
公开(公告)日：2011-08-30
申请号：US12049350
申请日：2008-03-16
申请人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
发明人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
IPC分类号： H05F3/00 , H05F3/04 , H01T23/00 , H01G7/02
CPC分类号： H01T23/00
摘要： A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s). The first region may include the second region.
摘要翻译：一种低维护AC气流驱动静电中和器，包括至少一个发射器和至少一个参考电极; 电源，其具有电耦合到发射极的输出端和与所述参考电极电耦合的参考端子，所述参考电极设置成产生通过电晕放电产生离子的输出波形，并且当通过电晕放电产生电场时产生电场，该输出波形被施加到发射极; 设置成产生穿过包括这些产生的离子和发射器的第一区域的气流的气体流动源，气流包括流速; 并且其中，在第一持续时间期间，所述输出波形减小由所述电场产生的电力，使得所述气流能够从所述发射器携带可能位于围绕所述发射器的第二区域内的污染颗粒（ s），并且最小化污染颗粒积聚在发射器上的可能性。第一区域可以包括第二区域。

3. 发明申请

US20110299214A1 Low Maintenance AC Gas Flow Driven Static Neutralizer and Method 有权
标题翻译：低维护AC气流驱动静态中和器和方法
公开(公告)号：US20110299214A1
公开(公告)日：2011-12-08
申请号：US13210267
申请日：2011-08-15
申请人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
发明人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
IPC分类号： H05F3/00
CPC分类号： H01T23/00
摘要： A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s). The first region may include the second region.
摘要翻译：一种低维护AC气流驱动静电中和器，包括至少一个发射器和至少一个参考电极; 电源，其具有电耦合到发射极的输出端和与所述参考电极电耦合的参考端子，所述参考电极设置成产生通过电晕放电产生离子的输出波形，并且当通过电晕放电产生电场时产生电场，该输出波形被施加到发射极; 设置成产生穿过包括这些产生的离子和发射器的第一区域的气流的气体流动源，气流包括流速; 并且其中，在第一持续时间期间，所述输出波形减小由所述电场产生的电力，使得所述气流能够从所述发射器携带可能位于围绕所述发射器的第二区域内的污染颗粒（ s），并且最小化污染颗粒积聚在发射器上的可能性。第一区域可以包括第二区域。

4. 发明授权

US08605407B2 Low maintenance AC gas flow driven static neutralizer and method 有权
标题翻译：低维护AC气流驱动静态中和器和方法
公开(公告)号：US08605407B2
公开(公告)日：2013-12-10
申请号：US13210267
申请日：2011-08-15
申请人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
发明人： Peter Gefter , Lawrence Levit , Leslie Partridge , Scott Gehlke
IPC分类号： H01T23/00 , H05F3/00
CPC分类号： H01T23/00
摘要： A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s). The first region may include the second region.
摘要翻译：一种低维护AC气流驱动静电中和器，包括至少一个发射器和至少一个参考电极; 电源，其具有电耦合到发射极的输出端和与所述参考电极电耦合的参考端子，所述参考电极设置成产生通过电晕放电产生离子的输出波形，并且当通过电晕放电产生电场时产生电场，该输出波形被施加到发射极; 设置成产生穿过包括这些产生的离子和发射器的第一区域的气流的气体流动源，气流包括流速; 并且其中，在第一持续时间期间，所述输出波形减小由所述电场产生的电力，使得所述气流能够从所述发射器携带可能位于围绕所述发射器的第二区域内的污染颗粒（ s），并且最小化污染颗粒积聚在发射器上的可能性。第一区域可以包括第二区域。

5. 发明授权

US07813102B2 Prevention of emitter contamination with electronic waveforms 有权
标题翻译：用电子波形防止发射器污染
公开(公告)号：US07813102B2
公开(公告)日：2010-10-12
申请号：US12075967
申请日：2008-03-14
申请人： Peter Gefter , Scott Gehlke , Lawrence Levit
发明人： Peter Gefter , Scott Gehlke , Lawrence Levit
IPC分类号： H05F3/00
CPC分类号： H01T23/00
摘要： An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.
摘要翻译：一种用于最小化在电离器中使用的电晕发射器上的污染物累积的装置和方法。污染积累控制是以电子方式完成的。高压被施加到具有用于将污染物从发射器推出的波形的发射器，而不是将污染物吸引到发射器。结果是更少的清洁周期，清洁周期之间更多的时间和更稳定的电离器操作。

6. 发明申请

US20080225460A1 Prevention of emitter contamination with electronic waveforms 有权
标题翻译：用电子波形防止发射器污染
公开(公告)号：US20080225460A1
公开(公告)日：2008-09-18
申请号：US12075967
申请日：2008-03-14
申请人： Peter Gefter , Scott Gehlke , Lawrence Levit
发明人： Peter Gefter , Scott Gehlke , Lawrence Levit
IPC分类号： H05F3/06
CPC分类号： H01T23/00
摘要： An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.
摘要翻译：一种用于最小化在电离器中使用的电晕发射器上的污染物累积的装置和方法。污染积累控制是以电子方式完成的。高压被施加到具有用于将污染物从发射器推出的波形的发射器，而不是将污染物吸引到发射器。结果是更少的清洁周期，清洁周期之间更多的时间和更稳定的电离器操作。

7. 发明授权

US07697258B2 Air assist for AC ionizers 有权
标题翻译：空气辅助AC电离器
公开(公告)号：US07697258B2
公开(公告)日：2010-04-13
申请号：US11539610
申请日：2006-10-06
申请人： Grigoriy N. Vernitskiy , Peter Gefter , Lawrence Levit
发明人： Grigoriy N. Vernitskiy , Peter Gefter , Lawrence Levit
IPC分类号： H01T23/00 , H05F3/04
CPC分类号： H01T23/00
摘要： At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer effectiveness is enhanced by recovering gas ions that are normally trapped between the nozzles and under a portion of the ionizer from which the nozzles project. Without the orifice properly positioned, the trapped gas ions are lost by recombination or grounding. With the orifice positioned in an area of weak electrostatic forces, more gas ions are available for discharging the charged object. The combined air consumption of nozzles plus at least one orifice is the same or less than nozzles alone would consume for a given discharge time.
摘要翻译：至少一个孔口被添加到具有用于去除静电荷的喷嘴和电离电极的AC电离器。孔口被放置在静电力弱的地方，并且气体离子可以容易地从电离器中提取出来。通过回收通常被捕获在喷嘴之间和喷嘴投射的电离器的一部分之下的气体离子来增强离子发生器的有效性。没有孔适当定位，捕获的气体离子通过重组或接地而损失。当孔口位于弱静电力的区域中时，更多的气体离子可用于对带电物体进行放电。喷嘴加上至少一个孔的组合空气消耗量与给定放电时间单独消耗的喷嘴相同或更小。

8. 发明申请

US20070026691A1 Low-field non-contact charging apparatus for testing substrates 审中-公开
标题翻译：用于测试基板的低场非接触式充电装置
公开(公告)号：US20070026691A1
公开(公告)日：2007-02-01
申请号：US11449260
申请日：2006-06-07
申请人： Lawrence Levit , Peter Gefter , John Menear
发明人： Lawrence Levit , Peter Gefter , John Menear
IPC分类号： H01L21/00
CPC分类号： G01R31/001 , G01R31/14
摘要： An apparatus and method for charging substrates without introducing high electric fields into the work environment. A non-contact charging plate is combined with a source of bipolar air (or gas) ions to effect the charging. This method is useful for studying the effects of static charge in charge sensitive processes. Substrates to be charged include semiconductor wafers, media disks, reticles, and flat panel glasses. In many cases, the shape of the apparatus is similar to industry-standard carriers. Hence, charging can be done robotically.
摘要翻译：一种用于对基板充电而不将高电场引入工作环境的装置和方法。非接触充电板与双极空气（或气体）离子源组合以实现充电。该方法对于研究电荷敏感过程中静电荷的影响是有用的。要充电的衬底包括半导体晶片，介质盘，掩模版和平板玻璃。在许多情况下，设备的形状类似于行业标准的载体。因此，充电可以机器人进行。

9. 发明申请

US20070158578A1 Air Assist for AC Ionizers 有权
标题翻译：空气辅助AC电离器
公开(公告)号：US20070158578A1
公开(公告)日：2007-07-12
申请号：US11539610
申请日：2006-10-06
申请人： Grigoriy Vernitskiy , Peter Gefter , Lawrence Levit
发明人： Grigoriy Vernitskiy , Peter Gefter , Lawrence Levit
IPC分类号： H01J27/00
CPC分类号： H01T23/00
摘要： At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer effectiveness is enhanced by recovering gas ions that are normally trapped between the nozzles and under a portion of the ionizer from which the nozzles project. Without the orifice properly positioned, the trapped gas ions are lost by recombination or grounding. With the orifice positioned in an area of weak electrostatic forces, more gas ions are available for discharging the charged object. The combined air consumption of nozzles plus at least one orifice is the same or less than nozzles alone would consume for a given discharge time.
摘要翻译：至少一个孔口被添加到具有用于去除静电荷的喷嘴和电离电极的AC电离器。孔口被放置在静电力弱的地方，并且气体离子可以容易地从电离器中提取出来。通过回收通常被捕获在喷嘴之间和喷嘴投射的电离器的一部分之下的气体离子来提高离子发生器的有效性。没有孔适当定位，捕获的气体离子通过重组或接地而损失。当孔口位于弱静电力的区域中时，更多的气体离子可用于对带电物体进行放电。喷嘴加上至少一个孔的组合空气消耗量与给定放电时间单独消耗的喷嘴相同或更小。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式