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1. 发明申请

US20050042136A1 Colorimetric gas detector and windowed process chamber 审中-公开
标题翻译：比色气体检测仪和窗口处理室
公开(公告)号：US20050042136A1
公开(公告)日：2005-02-24
申请号：US10642848
申请日：2003-08-18
申请人： Paul Marganski , Joseph Sweeney , Glenn Tom , Jose Arno , Thomas Baum , Jeffrey Roeder , James Hills
发明人： Paul Marganski , Joseph Sweeney , Glenn Tom , Jose Arno , Thomas Baum , Jeffrey Roeder , James Hills
IPC分类号： G01N21/78 , G01N21/00
CPC分类号： G01N21/783
摘要： A windowed chamber, e.g., a semiconductor manufacturing process chamber such as a scrubber, deposition chamber, thermal reactor, or the like, including a port with a radiation-transmissive window therein. Interiorly disposed within the chamber is (i) a disposable film on an interior surface of the window and/or (ii) a colorimetric medium disposed in viewable relationship to the window, so that a colorimetric change is perceivable through the window, e.g., visually or by optical sensing device, when the colorimetric medium is exposed to target gas species. Also disclosed is a gas detection article including a polymeric material that is colorimetrically responsive to the presence of at least one target gas species, in exposure thereto.
摘要翻译：诸如洗涤器，沉积室，热反应器等半导体制造处理室的窗口化室，包括其中具有辐射透射窗口的端口。内部设置在腔室内的是（i）窗口内表面上的一次性薄膜和/或（ii）以与窗口可视的关系设置的比色介质，使得通过窗口可感知到比色变化，例如，视觉上或通过光学感测装置，当比色介质暴露于目标气体种类时。还公开了一种气体检测制品，其包括在暴露于其中时比色测定至少一种目标气体种类的存在的聚合物材料。

2. 发明申请

US20080006775A1 INFRARED GAS DETECTION SYSTEMS AND METHODS 审中-公开
标题翻译：红外检测系统和方法
公开(公告)号：US20080006775A1
公开(公告)日：2008-01-10
申请号：US11767382
申请日：2007-06-22
申请人： Jose Arno , Paul Marganski , Robert Hillas , Steven Lurcott , Glenn Tom
发明人： Jose Arno , Paul Marganski , Robert Hillas , Steven Lurcott , Glenn Tom
IPC分类号： G01N21/00
CPC分类号： G01N21/05 , G01N21/3504 , G01N2021/178 , G01N2021/317 , G01N2201/0846
摘要： Thermopile-based detection and monitoring/control systems are described, in applications such as inferring concentration of a multicomponent gas by sensing a tracer gas therein, utilizing fiber optic cables to provide multiple sensing paths in a cell, utilizing a modulated IR source switched in on/off cycles, verifying chemical reagent identities, and sensing of effluent following discharge from a contamination removal 8 element or cold trap. A thermopile infrared (TPIR) detector of highly compact character is described for such applications, and permits monitoring of species that may be problematic or otherwise deleterious in such environments. In one implementation, light source modulation and signal processing techniques are employed to improve signal to noise ratio and minimize calibration and complexity of the TPIR detector.
摘要翻译：在基于热电堆检测和监测/控制系统的应用中，例如通过在其中感测示踪气体来推断多组分气体的浓度，利用光纤缆线在单元中提供多个感测路径，利用开启的调制IR源 /关闭循环，验证化学试剂标识，以及从排除污染物8元素或冷阱排出后的污染物检测。对于这种应用描述了具有高度紧密特性的热电堆红外（TPIR）检测器，并且允许监视在这种环境中可能是有问题或其它有害的物种。在一个实施方案中，采用光源调制和信号处理技术来提高信噪比并最小化TPIR检测器的校准和复杂性。

3. 发明申请

US20070284379A1 FLUID STORAGE AND DISPENSING VESSELS HAVING COLORIMETRICALLY VERIFIABLE LEAK-TIGHTNESS, AND METHOD OF MAKING SAME 有权
标题翻译：具有可彩色透明透明度的流体储存和分配容器及其制造方法
公开(公告)号：US20070284379A1
公开(公告)日：2007-12-13
申请号：US11772157
申请日：2007-06-30
申请人： Paul Marganski , Jose Arno , Edward Sturm , Kristy Zaleta
发明人： Paul Marganski , Jose Arno , Edward Sturm , Kristy Zaleta
IPC分类号： B65D79/02 , G01N21/78
CPC分类号： G01N31/22 , B65D79/02 , F17C2205/0338 , F17C2205/0391
摘要： A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.
摘要翻译：一种流体存储和分配容器，其具有与其相关联的比色构件，该比色构件在暴露于容纳在容器中的气体的泄漏时有效地改变颜色。比色构件可以由例如收缩包装性质的膜构成，其包含或以其它方式与在暴露于从容器泄漏的流体的颜色变化中的比色剂相关联。这种收缩包装膜可以施加到易于泄漏的容器的一部分上，或者替代整个容器，使得该膜通过视觉上可察觉的颜色变化来指示泄漏事件的发生是比色的。

4. 发明申请

US20050092761A1 Fluid storage and dispensing vessels having colorimetrically veriflable leak-tightness, and method of making same 有权
标题翻译：液体储存和分配容器具有比色可验证的密封性，以及制造它的方法
公开(公告)号：US20050092761A1
公开(公告)日：2005-05-05
申请号：US10699863
申请日：2003-11-03
申请人： Paul Marganski , Jose Arno , Edward Sturm , Kristy Zaleta
发明人： Paul Marganski , Jose Arno , Edward Sturm , Kristy Zaleta
IPC分类号： B01D20060101 , B65D25/00 , B65D79/02 , G01N31/22
CPC分类号： G01N31/22 , B65D79/02 , F17C2205/0338 , F17C2205/0391
摘要： A chemical storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a calorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is calorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.
摘要翻译：一种化学品储存和分配容器，其具有与其相关联的比色构件，该比色构件有效地在暴露于容器中包含的气体的泄漏时改变颜色。比色构件可以由例如收缩包装性质的膜构成，其包含或者与暴露于从容器泄漏的流体暴露于颜色变化的量热剂相关联。这种收缩保鲜膜可以施加到容易泄漏的容器的一部分上，或者替代整个容器，使得膜的量热有效，以通过视觉上可察觉的颜色变化来指示泄漏事件的发生。

5. 发明申请

US20050061147A1 Chemisorbent system for abatement of effluent species 审中-公开
标题翻译：用于减少流出物种的化学吸附系统
公开(公告)号：US20050061147A1
公开(公告)日：2005-03-24
申请号：US10665870
申请日：2003-09-18
申请人： Paul Marganski , Joseph Sweeney
发明人： Paul Marganski , Joseph Sweeney
IPC分类号： B01D53/02 , B01D53/12 , B01D53/22 , B01D53/68 , B01D59/26 , B01J20060101
CPC分类号： B01D53/685 , B01D2258/0216
摘要： A dry scrubbing system for treatment of effluent from an upstream effluent-generating process. The dry scrubbing system accommodates operation in a process window involving substantial variation in process conditions, e.g., flow rate and/or concentration, of scrubbable gas species in the effluent. Multiple scrubbing media are utilized in the dry scrubbing system, each optimal in a regime of the operating window, and together ensuring at least a predetermined level of removal of scrubbable gas species over the entire operating window. In a specific aspect, gaseous phosphorus in the effluent is abated by use of potassium hydroxide as an active abatement agent.
摘要翻译：一种干洗系统，用于处理上游流出物生成过程的污水。干洗系统适应在工艺窗口中的操作，其涉及流出物中可洗涤气体种类的工艺条件（例如流速和/或浓度）的显着变化。在干洗系统中使用多个洗涤介质，每个洗涤系统在操作窗口的状态下都是最佳的，并且一起确保在整个操作窗口上至少预定水平的可擦除气体物质的去除。在具体方面，通过使用氢氧化钾作为活性消除剂来减少流出物中的气态磷。

6. 发明申请

US20050056148A1 Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream 失效
标题翻译：用于从半导体制造工艺流出物流中减少有毒气体组分的方法和装置
公开(公告)号：US20050056148A1
公开(公告)日：2005-03-17
申请号：US10928977
申请日：2004-08-27
申请人： Joseph Sweeney , Paul Marganski , W. Olander
发明人： Joseph Sweeney , Paul Marganski , W. Olander
IPC分类号： B01D53/04 , B01D53/02
CPC分类号： B01D53/0415 , B01D53/0407 , B01D2253/10 , B01D2253/102 , B01D2253/104 , B01D2253/108 , B01D2253/112 , B01D2253/25 , B01D2253/304 , B01D2253/3425 , B01D2257/202 , B01D2257/2022 , B01D2257/2025 , B01D2257/2027 , B01D2257/204 , B01D2257/2042 , B01D2257/2045 , B01D2257/2047 , B01D2257/206 , B01D2257/302 , B01D2257/406 , B01D2257/553 , B01D2257/70 , B01D2257/706 , B01D2258/0216 , B01D2259/40086 , B01D2259/4143 , B01D2259/4146
摘要： An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for the acid or hydride gas component, a second and discreet sorbent bed material having a high capture rate sorbent affinity for the same gas component, and a flow path joining the process in gas flow communication with the sorbent bed materials such that effluent is flowed through the sorbent beds, to reduce the acid or hydride gas component. The first sorbent bed material preferably comprises basic copper carbonate and the second sorbent bed preferably comprises at least one of, CuO, AgO, CoO, CO3O4, ZnO, MnO2 and mixtures thereof.
摘要翻译：一种用于从源自半导体制造工艺的流出物流中减轻至少一种酸或氢气体组分或其副产物的装置和方法，包括：具有对酸或氢化物气体具有高容量吸附剂亲和性的第一吸附剂床材料组分，具有对相同气体组分的高捕获率吸附剂亲和力的第二和离散的吸附剂床材料，以及将流程连接到与吸附剂床材料气流连通的流路，使得流出物流过吸附剂床，以减少酸或氢气组分。第一吸附剂床材料优选包含碱式碳酸铜，并且第二吸附剂床优选包含CuO，AgO，CoO，CO 3 O 4，ZnO，MnO 2及其混合物中的至少一种。

7. 发明申请

US20050089455A1 Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement 审中-公开
标题翻译：使用气体的设备包括便携式干式洗涤器系统和/或过压控制装置
公开(公告)号：US20050089455A1
公开(公告)日：2005-04-28
申请号：US10693413
申请日：2003-10-24
申请人： Paul Marganski , Joseph Sweeney , Theodore Shreve , W. Olander
发明人： Paul Marganski , Joseph Sweeney , Theodore Shreve , W. Olander
IPC分类号： B01D53/04 , H01L21/00 , F01N3/00 , B32B27/02
CPC分类号： H01L21/67046 , B01D53/0415 , B01D2251/30 , B01D2251/40 , B01D2251/60 , B01D2253/1124 , B01D2257/93 , B01D2258/0216 , B01D2259/40009 , B01D2259/40084 , B01D2259/402 , B01D2259/4525 , B01D2259/4541
摘要： A gas-using facility including a portable dry scrubber system and/or over-pressure control arrangement. The portable dry scrubber system is of a unitary modular form, accommodating transport and ready set-up, take-down, and redeployment in the process facility. The over-pressure control arrangement provides capability for release of over-pressure gas from a compressed gas storage vessel during an over-pressure event, e.g., overheating of a compressed gas cylinder during a semiconductor foundry fire, while avoiding the bulk release of the entire vessel contents that occurs when conventional pressure relief devices are employed.
摘要翻译：包括便携式干式洗涤器系统和/或过压控制装置的气体使用设备。便携式干式洗涤器系统具有单一的模块化形式，可以在过程设施中提供运输和准备安装，拆卸和重新部署。过压控制装置提供了在过压事件期间从压缩气体储存容器释放过压气体的能力，例如在半导体铸造火灾期间压缩气瓶的过热，同时避免了整体的大量释放当使用常规的压力释放装置时发生的容器内容物。

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