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1. 发明申请

US20110228379A1 Optical Tag 审中-公开
标题翻译：光标
公开(公告)号：US20110228379A1
公开(公告)日：2011-09-22
申请号：US13131673
申请日：2009-11-25
申请人： Paul David Mason , David Arthur Orchard , Andrew Maxwell Scott , Kevin Michael Brunson , Mark Edward McNie
发明人： Paul David Mason , David Arthur Orchard , Andrew Maxwell Scott , Kevin Michael Brunson , Mark Edward McNie
IPC分类号： G02B5/122 , G02B26/00 , C03C27/00 , C03B11/00
CPC分类号： C03B11/08 , C03B2201/86 , C03B2215/40 , C03B2215/41 , C03B2215/50 , G01S17/74 , G02B5/124
摘要： An optical tag (200) comprises a chalcogenide glass corner-cube reflector (202) bonded to a silicon MEMS modulator (206) by means of a glass material (214) having a lower softening temperature than that of the reflector. The tag is provided with AR coatings (210, 212). The invention provides a robust, integrated and compact optical tag having a wide field of view and low manufacturing costs.
摘要翻译：光学标签（200）包括通过具有比反射器的软化温度低的玻璃材料（214）结合到硅MEMS调制器（206）的硫族化物玻璃角立方反射器（202）。该标签设有AR涂层（210,212）。本发明提供了一种具有广阔视野和低制造成本的稳健，集成且紧凑的光学标签。

2. 发明申请

US20080239457A1 Optical Modulation 有权
标题翻译：光调制
公开(公告)号：US20080239457A1
公开(公告)日：2008-10-02
申请号：US12090313
申请日：2006-10-19
申请人： Andrew Maxwell Scott , Mark Edward McNie , Kevin Michael Brunson
发明人： Andrew Maxwell Scott , Mark Edward McNie , Kevin Michael Brunson
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： An optical modulator comprising a spacing-controllable etalon having at least one sprung micro-mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.
摘要翻译：一种光学调制器，其包括间隔可控的标准具，其具有悬挂在衬底上的至少一个弹簧微镜。在微反射镜和基板之间设置至少一个电绝缘止动件，以避免当微镜被施加电压朝向衬底拉动时短路。光检测器检测第一激光脉冲的到达时间。控制电路从此预测下一个入射激光脉冲的到达时间，并且响应于控制信号，将微镜保持在其抵抗绝缘停止的下拉状态或在预测的时间释放微镜以最大化或最小化透过调制器的光。在计算出允许预定数量的机械振荡的时间间隔之后，微镜被拉回到停止点上。

3. 发明授权

US07969639B2 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US07969639B2
公开(公告)日：2011-06-28
申请号：US12278500
申请日：2007-02-06
申请人： Mark Edward McNie , Keith Loder Lewis , Andrew Maxwell Scott , Christopher William Slinger , Kevin Michael Brunson , Gilbert William Smith
发明人： Mark Edward McNie , Keith Loder Lewis , Andrew Maxwell Scott , Christopher William Slinger , Kevin Michael Brunson , Gilbert William Smith
IPC分类号： G02F1/03 , G02B26/00
CPC分类号： G02B26/001 , G02B5/281 , G02B5/284
摘要： A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprising an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.
摘要翻译：一种微电光机电系统（MOEMS）电光调制器（2），其具有电可调光学谐振器，其包括不对称法布里 - 珀罗标准具，其包含相对于基板（13）偏置的反射镜（10）弹性，并且可移动与其之间施加的电压的关系。光调制器（2）能够调制具有多个波长的电磁辐射。调制器适用于调制短波红外辐射（SWIR），中波红外辐射（MWIR）和长波红外辐射（LWIR）以及可见光辐射的透射。具有多个所述MOEMS光学调制器（2）的空间光学调制器。一种寻址所述空间光调制器的方法。

4. 发明授权

US07940446B2 Optical modulation 有权
标题翻译：光调制
公开(公告)号：US07940446B2
公开(公告)日：2011-05-10
申请号：US12090313
申请日：2006-10-19
申请人： Andrew Maxwell Scott , Mark Edward McNie , Kevin Michael Brunson
发明人： Andrew Maxwell Scott , Mark Edward McNie , Kevin Michael Brunson
IPC分类号： G02F1/03
CPC分类号： G02B26/001
摘要： An optical modulator comprising a spacing-controllable etalon having at least one sprung micro-mirror suspended above a substrate. At least one electrically insulating stop is provided between the micro-mirror and the substrate to avoid short-circuit when the micro-mirror is drawn towards the substrate by an applied voltage. An optical detector detects the time of arrival of a first laser pulse. A control circuit predicts from this an arrival time of the next incident laser pulse and, responsive to a control signal, either retains the micro-mirror in its pulled-down state held against the insulating stops or releases the micro-mirror at a time predicted to maximise or minimise the light transmitted through the modulator. After a time interval calculated to permit a predetermined number of mechanical oscillations, the micro-mirror is pulled back down onto the stops.
摘要翻译：一种光学调制器，其包括间隔可控的标准具，其具有悬挂在衬底上的至少一个弹簧微镜。在微反射镜和基板之间设置至少一个电绝缘止动件，以避免当微镜被施加电压朝向衬底拉动时短路。光检测器检测第一激光脉冲的到达时间。控制电路从此预测下一个入射激光脉冲的到达时间，并且响应于控制信号，将微镜保持在其抵抗绝缘停止的下拉状态或在预测的时间释放微镜以最大化或最小化透过调制器的光。在计算出允许预定数量的机械振荡的时间间隔之后，微镜被拉回到停止点上。

5. 发明授权

US07205173B2 Method of fabricating micro-electromechanical systems 失效
标题翻译：制造微机电系统的方法
公开(公告)号：US07205173B2
公开(公告)日：2007-04-17
申请号：US10508129
申请日：2003-03-19
申请人： Kevin Michael Brunson , David James Hamilton , Robert John Tremayne Bunyan , Mark Edward McNie
发明人： Kevin Michael Brunson , David James Hamilton , Robert John Tremayne Bunyan , Mark Edward McNie
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81C2203/0735
摘要： A MEMS incorporating a sensing element and a JFET electrically connected to the sensing element is fabricated by the steps of: forming a first layer of electrically insulating barrier material on a surface of a substrate; patterning the first layer so as to expose a first region of the substrate; doping by ion implantation the first region of the substrate to form a well region of the JFET; forming a second layer of barrier material on the surface of both the first layer and the first region of the substrate; patterning the barrier material so as to expose a part of the first region of the substrate; doping by ion implantation the exposed part of the first region of the substrate to form source and drain contact areas of the JFET; patterning the barrier material so as to expose a second region of the substrate; and doping by ion implantation the second region of the substrate to form gate and substrate contact areas of the JFET in a single implantion step. The monolithic integration of the JFET with the MEMS enables the bond wires for interconnecting the sensing element and the associated sensing electronic circuitry to be provided only after the buffering stage of such circuitry. This means that the bond wires interconnecting the buffering stage and the remainder of the circuitry are connected to a low impedance node which is less sensitive to noise and parasitic capacitive loading. Thus greater detection accuracy can be achieved by virtue of the fact that the parasitic capacitances are reduced to a minimum.
摘要翻译：通过以下步骤制造结合感测元件和电连接到感测元件的JFET的MEMS：在衬底的表面上形成第一层电绝缘阻挡材料; 图案化第一层以暴露衬底的第一区域; 通过离子注入掺杂衬底的第一区域以形成JFET的阱区; 在所述基板的所述第一层和所述第一区域的表面上形成第二层阻挡材料; 图案化所述阻挡材料以暴露所述基板的所述第一区域的一部分; 通过离子注入掺杂衬底的第一区域的暴露部分以形成JFET的源极和漏极接触区域; 图案化阻挡材料以暴露衬底的第二区域; 以及通过离子注入掺杂衬底的第二区域，以在单个注入步骤中形成JFET的栅极和衬底接触区域。 JFET与MEMS的单片集成使得仅在这种电路的缓冲级之后才提供用于将感测元件和相关联的感测电子电路互连的接合线。这意味着将缓冲级和电路的其余部分互连的接合线连接到对噪声和寄生电容负载较不敏感的低阻抗节点。因此，通过将寄生电容减小到最小的事实可以实现更高的检测精度。

6. 发明授权

US06980362B2 Optical filters 失效
标题翻译：光滤波器
公开(公告)号：US06980362B2
公开(公告)日：2005-12-27
申请号：US10433217
申请日：2001-11-23
申请人： Keith Loder Lewis , Gilbert William Smith , Mark Edward McNie
发明人： Keith Loder Lewis , Gilbert William Smith , Mark Edward McNie
IPC分类号： G02B5/28 , G02B6/34 , G02B26/00 , G02B26/02 , G02F1/025 , G02F1/21 , G02B1/10
CPC分类号： G02B26/02 , G02B5/284 , G02B6/29358 , G02B6/29395 , G02B6/29398 , G02B26/001 , G02F1/025 , G02F2001/213
摘要： An optical interference filter (2) is provided by a substrate (1) in which is formed a plurality of parallel slots so as to define layers (slots and substrate laminae) of alternating refractive index. As shown, the filter comprises a central Fabry-Perot resonator slot cavity (3) between two mirror groups (4, 5) of alternating slots and substrate laminae, and is coupled to optical fibers (7) accommodated in V-grooves (6) on either side. For tuning, one mirror group (5) may be movable in the direction of arrow (A), or, where the central resonator is provided by substrate material, by altering its temperature. One or more further Fabry-Perot filters may be formed in the substrate and coupled to the filter (2). The invention encompasses non-resonating filters.
摘要翻译：光学干涉滤光器（2）由衬底（1）提供，其中形成有多个平行的狭缝，以限定交替折射率的层（狭缝和衬底层）。如图所示，滤波器包括位于交替的槽和衬底层的两个反射镜组（4,5）之间的中央法布里 - 珀罗谐振腔，并且耦合到容纳在V形槽（6）中的光纤（7）在任一方为了进行调谐，一个反射镜组（5）可以沿箭头（A）的方向移动，或者中心谐振器由衬底材料提供，通过改变它的温度。可以在衬底中形成一个或多个另外的法布里 - 珀罗滤波器，并耦合到滤波器（2）。本发明包括非谐振滤波器。

7. 发明授权

US07072542B2 Multi-mode interference optical waveguide device 失效
标题翻译：多模干涉光波导器件
公开(公告)号：US07072542B2
公开(公告)日：2006-07-04
申请号：US10502910
申请日：2003-01-29
申请人： Richard Michael Jenkins , Mark Edward McNie
发明人： Richard Michael Jenkins , Mark Edward McNie
IPC分类号： G02B6/26
CPC分类号： G02B6/2813 , G02B2006/12176
摘要： A multi-mode interference (MMI) device, comprising a hollow core multi-mode waveguide optically coupled to at least one hollow core input waveguide, is described in which the internal surfaces of the hollow core waveguides carry a reflective coating. The coating may be a low refractive index material at the wavelength of operation, such as a metal, or a multiple layer dielectric stack. Resonators and optical amplifiers using such (MMI) devices are also described.
摘要翻译：描述了一种多模干涉（MMI）装置，其包括光耦合到至少一个空心芯输入波导的空心多芯波导管，其中中空芯波导的内表面携带反射涂层。涂层可以是操作波长处的低折射率材料，例如金属或多层电介质叠层。还描述了使用这种（MMI）器件的谐振器和光放大器。

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