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1. 发明授权

US4353218A Heat pump/refrigerator using liquid working fluid 失效
标题翻译：热泵/冰箱采用液体工作液
公开(公告)号：US4353218A
公开(公告)日：1982-10-12
申请号：US154173
申请日：1980-05-28
申请人： John C. Wheatley , Douglas N. Paulson , Paul C. Allen , William R. Knight , Paul A. Warkentin
发明人： John C. Wheatley , Douglas N. Paulson , Paul C. Allen , William R. Knight , Paul A. Warkentin
IPC分类号： F25B23/00 , F25B30/00 , F25B9/00
CPC分类号： F25B23/00 , F25B30/00 , F02G2250/12
摘要： A heat transfer device is described that can be operated as a heat pump or refrigerator, which utilizes a working fluid that is continuously in a liquid state and which has a high temperature-coefficient of expansion near room temperature, to provide a compact and high efficiency heat transfer device for relatively small temperature differences as are encountered in heating or cooling rooms or the like. The heat transfer device includes a pair of heat exchangers that may be coupled respectively to the outdoor and indoor environments, a regenerator connecting the two heat exchangers, a displacer that can move the liquid working fluid through the heat exchangers via the regenerator, and a means for alternately increasing and decreasing the pressure of the working fluid. The liquid working fluid enables efficient heat transfer in a compact unit, and leads to an explosion-proof smooth and quiet machine characteristic of hydraulics. The device enables efficient heat transfer as the indoor-outdoor temperature difference approaches zero, and enables simple conversion from heat pumping to refrigeration as by merely reversing the direction of a motor that powers the device.
摘要翻译：描述了可以作为热泵或冰箱操作的传热装置，其利用连续处于液态并且在室温附近具有高温膨胀系数的工作流体，以提供紧凑和高效率传热装置，在加热或冷却室等中遇到的温差相对较小。传热装置包括可分别连接到室外环境的一对热交换器，连接两个热交换器的再生器，能够通过再生器将液体工作流体移动通过热交换器的置换器，用于交替地增加和减小工作流体的压力。液体工作液能够在紧凑的单元中进行有效的热传递，并且可以实现液压系统的防爆平滑和安静的机器特性。该装置能够在室内 - 室外温差接近零时实现有效的热传递，并且仅通过逆转为装置供电的电动机的方向实现从热泵送到制冷的简单转换。

2. 发明授权

US4797696A Beam splitting apparatus 失效
标题翻译：分束装置
公开(公告)号：US4797696A
公开(公告)日：1989-01-10
申请号：US98565
申请日：1987-09-21
申请人： Paul C. Allen , Paul A. Warkentin
发明人： Paul C. Allen , Paul A. Warkentin
IPC分类号： G03F7/20 , G03B41/00 , G02B27/14
CPC分类号： G03F7/704
摘要： An apparatus for splitting radiant energy beams produced by a laser or other light source. The apparatus comprises a plurality of mirrors, each aligned to reflect a beam or plurality of beams from one mirror to the next. Each mirror comprises a glass body with a layer of 50% reflective coating and a layer of anti-reflecting coating on one side of the body. A layer of 100% reflective coating is on the other side of the body. A beam is, thus, 50% reflected from the first reflective layer and allowed 50% to pass through the layer. The remainder of the beam is reflected from the 100% reflective layer.
摘要翻译：一种用于分割由激光或其它光源产生的辐射能束的装置。该装置包括多个反射镜，每个反射镜被对准以将来自一个反射镜的光束或多个光束反射到下一个反射镜。每个反射镜包括具有50％反射涂层的层的玻璃体和在身体一侧的一层抗反射涂层。一层100％的反射涂层位于身体的另一侧。因此，从第一反射层反射50％的光束，并允许光束通过该层50％。光束的剩余部分从100％反射层反射。

3. 发明授权

US4796038A Laser pattern generation apparatus 失效
标题翻译：激光图案生成装置
公开(公告)号：US4796038A
公开(公告)日：1989-01-03
申请号：US178868
申请日：1988-03-28
申请人： Paul C. Allen , Paul A. Warkentin
发明人： Paul C. Allen , Paul A. Warkentin
IPC分类号： G03F7/20 , G03B41/00 , G01D9/42
CPC分类号： G03F7/704
摘要： A laser pattern generation apparatus particularly suited for semiconductor applications. The laser beam is split into a plurality of beams and modulated with acousto-optic modulators. A rotating mirror having a plurality of facets causes the beam to scan the workpiece.
摘要翻译：特别适用于半导体应用的激光图案生成装置。激光束被分成多个光束并用声光调制器调制。具有多个面的旋转镜使光束扫描工件。

4. 发明授权

US6037967A Short wavelength pulsed laser scanner 失效
标题翻译：短波长脉冲激光扫描仪
公开(公告)号：US6037967A
公开(公告)日：2000-03-14
申请号：US769169
申请日：1996-12-18
申请人： Paul C. Allen , Eugene Mirro
发明人： Paul C. Allen , Eugene Mirro
IPC分类号： B23K26/06 , B23K26/08 , G02B26/10 , G02B26/12 , G03F7/20 , H01L21/027 , H01S3/10 , H04N1/40 , B41J2/435
CPC分类号： H04N1/40037 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/08 , B23K26/082 , B23K26/0821 , G02B26/12 , G03F7/2053 , G03F7/704 , H01L21/0275
摘要： A laser pattern generator for semiconductor mask making or direct writing of features on a semiconductor wafer uses a pulsed laser source to achieve high power and short wavelength (e.g. 263 nm or less) radiation, for writing very small-sized features. The laser pulse frequency is either synchronous or asynchronous to the writing grid of the features being written, in various embodiments.
摘要翻译：用于半导体掩模制造或直接写入半导体晶片上的特征的激光图案发生器使用脉冲激光源实现高功率和短波长（例如263nm或更小）辐射，用于写入非常小尺寸的特征。在各种实施例中，激光脉冲频率与被写入的特征的写入网格同步或异步。

5. 发明授权

US06532097B1 Image registration apparatus having an adjustable reflective diffraction grating and method 有权
$Image registration apparatus having an adjustable reflective diffraction grating and method$
标题翻译：具有可调节反射衍射光栅和方法的图像配准装置
公开(公告)号：US06532097B1
公开(公告)日：2003-03-11
申请号：US09976978
申请日：2001-10-11
申请人： Paul C. Allen , Samuel C. Howells
发明人： Paul C. Allen , Samuel C. Howells
IPC分类号： G02F100
CPC分类号： G03F7/70383 , G03F7/70291
摘要： An image registration apparatus has a substrate support capable of supporting a substrate, the substrate support having a support motor capable of moving the substrate support. A radiation beam source is provided that is capable of providing a radiation beam. A beam intensity modulator is also provided that has an adjustable reflective diffraction grating capable of reflectively diffracting the radiation beam to modulate the intensity of the radiation beam. A controller is also provided that is adapted to control the substrate support, radiation beam source, and beam intensity modulator to modulate and scan the radiation beam across the substrate to register an image on the substrate.
摘要翻译：图像配准装置具有能够支撑衬底的衬底支撑件，衬底支撑件具有能够移动衬底支撑件的支撑电动机。提供能够提供辐射束的辐射束源。还提供了一种具有能够反射衍射辐射束以调制辐射束的强度的可调节的反射衍射光栅的光束强度调制器。还提供了一种控制器，其适于控制衬底支撑件，辐射束源和光束强度调制器以调制和扫描穿过衬底的辐射束，以在衬底上注册图像。

6. 发明授权

US06295157B1 Thermally balanced acousto-optic modulator 有权
标题翻译：热平衡声光调制器
公开(公告)号：US06295157B1
公开(公告)日：2001-09-25
申请号：US09379566
申请日：1999-08-23
申请人： Paul C. Allen , Jerry Martyniuk
发明人： Paul C. Allen , Jerry Martyniuk
IPC分类号： G02F111
CPC分类号： G02F1/33 , G02F1/11 , G02F1/113 , G02F1/332 , G02F2203/21
摘要： An acousto-optic modulator for use with a multi-channel laser beam system, for instance, is of conventional structure except that two different RF (radio frequency) signals drive the modulator. These signals each produce at least one output beam as diffracted by the modulator body. These two beams are angularly and spatially separated. One of the sets of beams is incident upon a beam stop, and therefore is not used for writing. Only the other set of beams, driven by the other of the frequencies, performs the actual writing. The optical stop in addition to blocking one of the sets of diffracted beams also blocks the transmission of the zero order (undiffracted) beam. The sum of the load power of the signals at the two frequencies is kept approximately constant, thereby maintaining a constant thermal condition within the modulator.
摘要翻译：例如，与多通道激光束系统一起使用的声光调制器是常规结构，除了两个不同的RF（射频）信号驱动调制器。这些信号各自产生至少一个由调制器体衍射的输出光束。这两个光束在角度和空间上分离。波束组中的一个入射到光束停止处，因此不用于书写。只有由其他频率驱动的另外一组光束执行实际写入。除了阻挡衍射光束之一之外，光学停止还阻挡零级（未衍射）光束的透射。在两个频率处的信号的负载功率的总和保持近似恒定，从而在调制器内保持恒定的热条件。

7. 发明授权

US5739964A Magnification correction for small field scanning 失效
公开(公告)号：US5739964A
公开(公告)日：1998-04-14
申请号：US409251
申请日：1995-03-22
申请人： Paul C. Allen
发明人： Paul C. Allen
IPC分类号： G02B13/08 , G02B15/14 , G02B17/08 , G03F7/20 , H01L21/027 , G02B17/00
CPC分类号： G02B17/0892 , G02B13/08 , G02B15/14 , G02B17/008 , G02B17/08 , G03F7/70225 , G03F7/70258 , G03F7/70358
摘要： Magnification correction for small field scanning of large blanks is provided by adding magnification adjusting elements (lenses) to a double pass Wynne-Dyson lens or other type of one-to-one projection lens. The magnification adjusting optical elements includes two pairs of low power lenses, one associated with each of the input and output prisms of a Wynne-Dyson lens. Movement of the magnification adjusting optics provides positive or negative magnification as needed to correct for any expansion or compaction of the blank relative to the reticle (mask) and hence maintain alignment. Further magnification correction is provided by a small velocity relative movement between the reticle and the blank by means of a secondary stage in the scan direction. This corrects for any alignment error in the scan direction and may be used independently of the optical correction technique with any type of projection lens.

8. 发明授权

US07095037B2 Electron beam lithography system having improved electron gun 失效
公开(公告)号：US07095037B2
公开(公告)日：2006-08-22
申请号：US10803352
申请日：2004-03-18
申请人： Andres Fernadez , Marian Mankos , Jeffrey S. Sullivan , Paul C. Allen
发明人： Andres Fernadez , Marian Mankos , Jeffrey S. Sullivan , Paul C. Allen
IPC分类号： H01J40/06 , H01J37/08 , H01J27/02
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/70375 , H01J37/073 , H01J37/3175 , H01J2237/06333 , H01J2237/31779
摘要： An electron beam lithography system has an electron gun including at least one laser that is operable in a first mode to generate electrons for lithography. The electron beam lithography system is operable in a second mode to regenerate the photocathode of the electron gun by application of the laser. The photocathode includes a layer of cesium telluride.

9. 发明授权

US06731320B1 Laser pattern generator 失效
标题翻译：激光图案发生器
公开(公告)号：US06731320B1
公开(公告)日：2004-05-04
申请号：US09273115
申请日：1999-03-19
申请人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
发明人： Paul C. Allen , Michael J. Bohan , Morris H. Green , Henry Christopher Hamaker
IPC分类号： B41J1514
CPC分类号： G03F7/704
摘要： A scanning system uses a multi-beam brush having a widely separated beams, a modulator that controls intensity of pixels in scan beams, an optical system that minimizes scan line bow at the expense of non-uniform scanning beam velocity, and a timing generator that generates a pixel clock signal having a variable period that compensates for the non-uniformity of pixel velocity. The wide separation of scan beams permits the modulator to turn beams on or off with a direction of brightening or darkening in the cross-section of the beams being opposite to the scanning direction. A novel arrangement of the beams in the brush permits a uniform indexing step size to uniformly expose an image region. In one embodiment, the timing generator includes: a source of pixel period values; a select circuit to select pixel period values for pixels, and a counter that loads a first value from the pixel period value selected for a pixel, counts for a period of time indicated by the first value, and asserts a signal marking an end of the period. An additional delay after the signal from the counter can be shorter than the period of a clock signal to the counter but also controlled by the pixel period value.
摘要翻译：扫描系统使用具有广泛分离的光束的多光束电刷，控制扫描光束中的像素强度的调制器，以牺牲不均匀扫描光束速度最小化扫描线弓的光学系统，以及定时发生器，产生具有补偿像素速度的不均匀性的可变周期的像素时钟信号。扫描光束的宽分离允许调制器在与扫描方向相反的横截面中的亮度或变暗方向打开或关闭光束。刷子中的光束的新颖布置允许均匀的分度步长以均匀地曝光图像区域。在一个实施例中，定时发生器包括：像素周期值的源; 选择用于像素的像素周期值的选择电路，以及从为像素选择的像素周期值加载第一值的计数器，计数由第一值指示的时间段，并且断言标记期。来自计数器的信号之后的附加延迟可以比针对计数器的时钟信号的周期短，而且还受到像素周期值的控制。

10. 发明授权

US06448568B1 Electron beam column using high numerical aperture photocathode source illumination 失效
标题翻译：电子束柱采用高数值孔径光电阴极源照明
公开(公告)号：US06448568B1
公开(公告)日：2002-09-10
申请号：US09365604
申请日：1999-07-30
申请人： Paul C. Allen , Xiaolan Chen , Douglas E. Holmgren , Samuel C. Howells
发明人： Paul C. Allen , Xiaolan Chen , Douglas E. Holmgren , Samuel C. Howells
IPC分类号： H01J4006
CPC分类号： B82Y10/00 , G03F7/70325 , G03F7/70375 , G03F7/70808 , H01J37/073 , H01J2237/3175
摘要： A lithography apparatus including both a laser beam source and an electron beam column, where the electron beam column has a support(in one embodiment a window in the column housing) having an index of refraction n. The support, having a photocathode source material disposed on its remote surface, is located in some embodiments such that the internal angle of the incident laser beam is &thgr; with respect to a line perpendicular to the remote surface. The numerical aperture of the substrate(equal to nsin &thgr;) is greater than one in one embodiment, resulting in a high resolution spot size diameter incident on the photocathode source material at the remote surface. Incident energy from the laser beam thereby emits a corresponding high resolution electron beam from the photocathode source material. Electromagnetic lens components are disposed downstream in the electron beam column to demagnify the electron beam. This apparatus allows the continuously decreasing minimum feature dimension sizes for semiconductor electron beam lithography.
摘要翻译：包括激光束源和电子束列的光刻设备，其中电子束柱具有折射率n的支撑（在一个实施例中为柱壳体中的窗口）。具有设置在其远程表面上的光电阴极源材料的支撑件位于一些实施例中，使得入射激光束的内角相对于垂直于远程表面的线是θ。在一个实施例中，衬底的数值孔径（等于nsinθ）大于一个，导致入射到远端表面的光电阴极源材料上的高分辨率光斑尺寸直径。因此来自激光束的入射能量由此从光电阴极源材料发射出相应的高分辨率电子束。电磁透镜部件设置在电子束列的下游，以使电子束缩小。该装置允许连续减小用于半导体电子束光刻的最小特征尺寸尺寸。

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