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1. 发明授权

US07923194B2 Sacrificial compositions and methods of fabricating a structure using sacrificial compositions 有权
标题翻译：牺牲组合物和使用牺牲组合物制造结构的方法
公开(公告)号：US07923194B2
公开(公告)日：2011-04-12
申请号：US12273114
申请日：2008-11-18
申请人： Paul A. Kohl , Paul J. Joseph , Hollie K. Reed , Sue Ann Bidstrup-Allen , Celesta E. White , Clifford Henderson
发明人： Paul A. Kohl , Paul J. Joseph , Hollie K. Reed , Sue Ann Bidstrup-Allen , Celesta E. White , Clifford Henderson
IPC分类号： G03F7/00 , G03F7/004 , G03F7/20 , G03F7/26
CPC分类号： B81C1/00476 , B81C2201/0108 , H01L21/7682 , Y10S430/114
摘要： Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
摘要翻译：提供了组合物，其使用方法及其分解方法。一个示例性组合物，其中包括聚合物和催化量的负色调光引发剂。

2. 发明申请

US20100307786A1 Packaging For Micro Electro-Mechanical Systems And Methods Of Fabricating Thereof 有权
标题翻译：微机电系统的包装及其制造方法
公开(公告)号：US20100307786A1
公开(公告)日：2010-12-09
申请号：US12797649
申请日：2010-06-10
申请人： Paul A. Kohl , Farrokh Ayazi , Paul J. Joseph
发明人： Paul A. Kohl , Farrokh Ayazi , Paul J. Joseph
IPC分类号： H05K5/06
CPC分类号： B81C1/00333 , B81C2201/0108 , B81C2203/0136 , B81C2203/0154 , H01L2224/48247 , H01L2224/49171 , H01L2924/1461 , H01L2924/181 , H01L2924/00 , H01L2924/00012
摘要： Embodiments of the present disclosure provide systems and methods for producing micro electro-mechanical device packages. Briefly described, in architecture, one embodiment of the system, among others, includes a micro electro-mechanical device formed on a substrate layer; and a thermally decomposable sacrificial structure protecting at least a portion of the micro electro-mechanical device, where the sacrificial structure is formed on the substrate layer and surrounds a gas cavity enclosing an active surface of the micro electro-mechanical device. Other systems and methods are also provided.
摘要翻译：本公开的实施例提供了用于生产微机电装置包装的系统和方法。简要描述，在架构中，系统的一个实施例包括形成在基底层上的微电子机械装置; 以及可热分解的牺牲结构，其保护所述微机电装置的至少一部分，其中所述牺牲结构形成在所述基底层上并且围绕包围所述微机电装置的有效表面的气体腔。还提供了其他系统和方法。

3. 发明授权

US07847669B2 Micro-electromechanical switched tunable inductor 有权
标题翻译：微机电开关可调谐电感
公开(公告)号：US07847669B2
公开(公告)日：2010-12-07
申请号：US11999527
申请日：2007-12-06
申请人： Farrokh Ayazi , Mina Raieszadeh , Paul A. Kohl
发明人： Farrokh Ayazi , Mina Raieszadeh , Paul A. Kohl
IPC分类号： H01F5/00 , H01F27/28 , H01F21/02 , H01F21/10 , H01G2/00 , H01G5/00
CPC分类号： H01F17/0006 , H01F21/12 , H01F27/022 , H01F2017/0086 , H01F2021/125
摘要： Disclosed is an integrated tunable inductor having mutual micromachined inductances fabricated in close proximity to a tunable inductor that is switched in and out by micromechanical ohmic switches to change the inductance of the integrated tunable inductor. To achieve a large tuning range and high quality factor, silver is preferably used as the structural material to co-fabricate the inductors and micromachined switches, and silicon is selectively removed from the backside of the substrate. Using this method, exemplary tuning of 47% at 6 GHz is achievable for a 1.1 nH silver inductor fabricated on a low-loss polymer membrane. The effect of the quality factor on the tuning characteristic of the integrated inductor is evaluated by comparing the measured result of substantially identical inductors fabricated on various substrates. To maintain the quality factor of the silver inductor, the device may be encapsulated using a low-cost wafer-level polymer packaging technique.
摘要翻译：公开了一种集成的可调电感器，其具有相互微机电感应，其紧密接近可调电感器，该可调谐电感器由微机械欧姆开关导入和切出以改变集成可调电感器的电感。为了实现大的调谐范围和高品质因素，优选使用银作为用于共同制造电感器和微加工开关的结构材料，并且硅从衬底的背面选择性地去除。使用这种方法，在低损耗聚合物膜上制造的1.1nH银电感器可以实现在6GHz下47％的示例性调谐。通过比较在各种衬底上制造的基本相同的电感器的测量结果来评估质量因子对集成电感器的调谐特性的影响。为了保持银电感器的品质因素，可以使用低成本晶圆级聚合物封装技术封装器件。

4. 发明授权

US07799516B2 Polymers, methods of use thereof, and methods of decomposition thereof 有权
标题翻译：聚合物，其使用方法及其分解方法
公开(公告)号：US07799516B2
公开(公告)日：2010-09-21
申请号：US10686697
申请日：2003-10-16
申请人： Paul A. Kohl , SueAnn Bidstrup Allen , Xiaoqun Wu , Clifford Lee Henderson
发明人： Paul A. Kohl , SueAnn Bidstrup Allen , Xiaoqun Wu , Clifford Lee Henderson
IPC分类号： G03F7/40 , G03F7/20 , G03F7/30 , G03F7/36
CPC分类号： G03F7/004 , B81B2201/058 , B81B2203/0338 , B81B2203/0384 , B81C1/00103 , B81C2201/0108 , C08J3/28 , C08K5/0041 , G03F7/40 , Y10T428/24479
摘要： Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.
摘要翻译：提供聚合物，其使用方法及其分解方法。一个示例性聚合物，其中包括具有牺牲聚合物和光引发剂的光可定义聚合物。

5. 发明申请

US20100112277A1 Microstructures and methods of fabrication thereof 有权
标题翻译：微结构及其制造方法
公开(公告)号：US20100112277A1
公开(公告)日：2010-05-06
申请号：US11657769
申请日：2007-01-25
申请人： Paul Jayachandran Joseph , Sue Ann Bidstrup Allen , Paul A. Kohl
发明人： Paul Jayachandran Joseph , Sue Ann Bidstrup Allen , Paul A. Kohl
IPC分类号： B32B3/12 , B81B1/00 , B32B3/14 , B32B27/00
CPC分类号： B32B3/20 , B32B17/064 , B32B25/08 , B32B27/281 , B32B27/285 , B32B27/38 , B32B2363/00 , B32B2371/00 , B32B2379/08 , B81B2201/058 , B81C1/00071 , Y10T428/24149 , Y10T428/24521 , Y10T428/24529 , Y10T428/24537 , Y10T428/24545 , Y10T428/24562 , Y10T428/24612 , Y10T428/24744 , Y10T428/2495
摘要： Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.
摘要翻译：公开了微结构和微结构制造方法。一个示例性微观结构，其中包括基底，设置在基底上的外涂层，在外涂层的至少一部分内的空气区域，以及框架材料层，其与所述外涂层上的空气区域的至少一部分接合在框架材料层的内部并且与框架材料层的外侧上的外涂层接合。

6. 发明授权

US07182875B2 Microstructures and methods of fabrication thereof 有权
标题翻译：微结构及其制造方法
公开(公告)号：US07182875B2
公开(公告)日：2007-02-27
申请号：US10695591
申请日：2003-10-28
申请人： Paul Jayachandran Joseph , Paul A. Kohl , Sue Ann Bidstrup Allen
发明人： Paul Jayachandran Joseph , Paul A. Kohl , Sue Ann Bidstrup Allen
IPC分类号： C23F1/00
CPC分类号： B32B3/20 , B32B17/064 , B32B25/08 , B32B27/281 , B32B27/285 , B32B27/38 , B32B2363/00 , B32B2371/00 , B32B2379/08 , B81B2201/058 , B81C1/00071 , Y10T428/24149 , Y10T428/24521 , Y10T428/24529 , Y10T428/24537 , Y10T428/24545 , Y10T428/24562 , Y10T428/24612 , Y10T428/24744 , Y10T428/2495
摘要： Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.
摘要翻译：公开了微结构和微结构制造方法。一个示例性微观结构，其中包括基底，设置在基底上的外涂层，在外涂层的至少一部分内的空气区域，以及框架材料层，其与所述外涂层上的空气区域的至少一部分接合在框架材料层的内部并且与框架材料层的外侧上的外涂层接合。

7. 发明授权

US6162838A Porous insulating compounds and method for making same 失效
公开(公告)号：US6162838A
公开(公告)日：2000-12-19
申请号：US325977
申请日：1999-06-04
申请人： Paul A. Kohl
发明人： Paul A. Kohl
IPC分类号： C09D5/25 , C09D7/12 , C09D145/00 , C09D183/04 , C09D201/00 , H01L21/312 , H01L21/316 , H01L21/318 , H01L21/76 , H01L21/762 , H01L21/768 , H01L23/498 , H01L23/522 , H01L23/532 , C09J9/02
CPC分类号： H01L21/762 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/3121 , H01L21/316 , H01L21/31695 , H01L21/3185 , H01L23/49894 , H01L23/5222 , H01L23/5329 , H01L2924/0002 , H01L2924/00
摘要： A method of forming a porous insulating composition comprising the steps of (A) providing at least one organic sacrificial material/dielectric material composition comprising at least one organic sacrificial material and at least one dielectric material; and (B) removing the at least one organic sacrificial material in the at least one organic sacrificial material/dielectric material composition, in order to generate pores in the at least one dielectric material. Also disclosed is a composition useful in making a porous insulator, comprising a heat-activated, pore-forming, sacrificial material; and a dielectric material. Alternatively, the composition useful in making a porous insulator, comprises at least one pore-forming, organic sacrificial material; and at least one dielectric material, wherein the at least one pore-forming, material is a norbornene-type polymer.

8. 发明授权

US4576691A Etching optical surfaces on GaAs 失效
标题翻译：蚀刻GaAs上的光学表面
公开(公告)号：US4576691A
公开(公告)日：1986-03-18
申请号：US636177
申请日：1984-07-31
申请人： Paul A. Kohl , Lawrence E. Smith , Harvey S. Trop
发明人： Paul A. Kohl , Lawrence E. Smith , Harvey S. Trop
IPC分类号： C25F3/12 , C25F3/14 , H01L21/3063
CPC分类号： H01L21/30635 , C25F3/12 , C25F3/14
摘要： Photoelectrochemical etching of gallium arsenide in highly alkaline aqueous solution yields optically smooth etched surfaces suitable for many optical devices. Higher optical quality is obtained for lower irradiation energy provided sufficient energy is available to produce holes in the valence band.
摘要翻译：在高碱性水溶液中对砷化镓的光电化学蚀刻产生适合于许多光学器件的光学平滑蚀刻表面。获得较低的照射能量的较高的光学质量，只要有足够的能量可用于产生价带中的空穴。

9. 发明授权

US4377449A Electrolytic silver plating 失效
标题翻译：电解镀银
公开(公告)号：US4377449A
公开(公告)日：1983-03-22
申请号：US312891
申请日：1981-10-19
申请人： Paul A. Kohl
发明人： Paul A. Kohl
IPC分类号： C25D3/46 , C25D
CPC分类号： C25D3/46
摘要： A silver electroplating bath comprising heterocyclic organic additives such as lactones, lactams, cyclic sulfate esters, cyclic imides and cyclic oxazolinones, preferably phenolphthalein.
摘要翻译：包含杂环有机添加剂如内酯，内酰胺，环硫酸酯，环状酰亚胺和环恶唑啉酮，优选酚酞的银电镀浴。

10. 发明授权

US09242243B2 Anion exchange polyelectrolytes 有权
标题翻译：阴离子交换聚电解质
公开(公告)号：US09242243B2
公开(公告)日：2016-01-26
申请号：US13497177
申请日：2010-09-24
申请人： Junfeng Zhou , Paul A. Kohl , Murat Unlu
发明人： Junfeng Zhou , Paul A. Kohl , Murat Unlu
IPC分类号： B01J41/12 , B01J49/00 , C08G59/32 , C08L63/00 , C08L81/06 , H01M8/08 , H01M8/10
CPC分类号： B01J49/00 , C08G59/3218 , C08J5/2262 , C08L63/00 , C08L81/06 , H01M8/083 , H01M8/1027 , H01M8/103 , H01M8/1039 , Y02E60/521
摘要： Provided according to some embodiments of the invention are anion exchange polyelectrolytes that include an at least partially fluorinated polyaromatic polymer backbone; and at least one cationic functional group pendant therefrom. Also provided are anion exchange membranes (AEMs) formed from at least one anion exchange polyelectrolyte according to an embodiment of the invention, and fuel cells including such AEMs.
摘要翻译：根据本发明的一些实施方案提供的是包含至少部分氟化的聚芳族聚合物主链的阴离子交换聚电解质; 和至少一个阳离子官能团。还提供了由根据本发明的一个实施方案的至少一种阴离子交换聚电解质形成的阴离子交换膜（AEM）和包括这种AEM的燃料电池。

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