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1. 发明授权

US5629630A Semiconductor wafer contact system and method for contacting a semiconductor wafer 失效
标题翻译：用于接触半导体晶片的半导体晶片接触系统和方法
公开(公告)号：US5629630A
公开(公告)日：1997-05-13
申请号：US395127
申请日：1995-02-27
申请人： Patrick F. Thompson , William M. Williams , Scott E. Lindsey , Barbara Vasquez
发明人： Patrick F. Thompson , William M. Williams , Scott E. Lindsey , Barbara Vasquez
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , H01L21/66
CPC分类号： G01R1/07314 , G01R31/2831
摘要： A semiconductor wafer contact system includes a base substrate (13) which has an array of raised supports (18). The array of raised supports (18) are distributed in a pattern corresponding to the pattern of electrical contacts (12) on the semiconductor wafer (10), to be contacted. In between the base substrate (13) and the wafer to be contacted (10) is a flexible circuit layer (14) including an array of electrical contacts (15) having the same pattern as the contacts (12) of the wafer and the raised supports (18). The raised supports (18) provide focused and localized force, pressing the membrane test contacts (15) against the wafer electrical contacts (12).
摘要翻译：半导体晶片接触系统包括具有升高的支撑件（18）阵列的基底（13）。凸起支撑件（18）的阵列以对应于半导体晶片（10）上的电触点（12）的图案的图案分布，以被接触。在基底基板（13）和待接触晶片（10）之间的是柔性电路层（14），其包括具有与晶片的触点（12）相同图案的电触头阵列（15），并且凸起支持（18）。凸起的支撑件（18）提供聚焦和局部的力，将膜测试触点（15）压在晶片电触头（12）上。

2. 发明授权

US5773986A Semiconductor wafer contact system and method for contacting a semiconductor wafer 失效
标题翻译：用于接触半导体晶片的半导体晶片接触系统和方法
公开(公告)号：US5773986A
公开(公告)日：1998-06-30
申请号：US416121
申请日：1995-04-03
申请人： Patrick F. Thompson , William M. Williams , Scott E. Lindsey , Barbara Vasquez
发明人： Patrick F. Thompson , William M. Williams , Scott E. Lindsey , Barbara Vasquez
IPC分类号： G01R31/28 , G01R1/073
CPC分类号： G01R31/2886 , H01L2924/01006 , H01L2924/01013 , H01L2924/01033 , H01L2924/01078
摘要： A semiconductor wafer contact system includes a sealed bladder (32) containing incompressible material. The sealed bladder (32) presses against a flexible circuit layer (28) including an array of electrical contacts (30). The bladder (32) forces the array of electrical contacts (30) against a corresponding array of device electrical contacts (12) on die (11) of a semiconductor wafer (10). The bladder (32) adapts in shape to compensate for die level and wafer level irregularities in contact height and non-parallelism. Additionally, bladder (32) ensures a constant force between membrane contacts (30) and die contacts (12), across the entire wafer (10).
摘要翻译：半导体晶片接触系统包括含有不可压缩材料的密封囊（32）。密封的囊（32）压靠包括电触头阵列（30）的柔性电路层（28）。气囊（32）迫使电触点阵列抵靠在半导体晶片（10）的芯片（11）上的相应阵列的器件电触点（12）。囊（32）的形状适应于补偿接触高度和非平行度下的晶片级和晶片级不规则性。另外，囊（32）确保膜接触件（30）和管芯接触件（12）之间跨越整个晶片（10）的恒定的力。

3. 发明申请

US20120113556A1 APPARATUS FOR TESTING ELECTRONIC DEVICES 有权
标题翻译：用于测试电子设备的装置
公开(公告)号：US20120113556A1
公开(公告)日：2012-05-10
申请号：US13353269
申请日：2012-01-18
申请人： Donald P. Richmond, II , Kenneth W. Deboe , Frank O. Uher , Jovan Jovanovic , Scott E. Lindsey , Thomas T. Maenner , Patrick M. Shepherd , Jeffrey L. Tyson , Mark C. Carbone , Paul W. Burke , Doan D. Cao , James F. Tomic , Long V. Vu
发明人： Donald P. Richmond, II , Kenneth W. Deboe , Frank O. Uher , Jovan Jovanovic , Scott E. Lindsey , Thomas T. Maenner , Patrick M. Shepherd , Jeffrey L. Tyson , Mark C. Carbone , Paul W. Burke , Doan D. Cao , James F. Tomic , Long V. Vu
IPC分类号： H02H3/08 , G06F19/00 , G01R31/26
CPC分类号： G01R31/287 , G01R31/003 , G01R31/26 , G01R31/2642 , G01R31/2851 , G01R31/2855 , G01R31/2863 , G01R31/2868 , G01R31/2872 , G01R31/2877 , G01R31/2886 , G01R31/2889 , G01R31/2891 , G01R31/31924 , G06F8/30
摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
摘要翻译：描述了一种用于老化和/或功能测试未调制晶片的微电子电路的装置。可以对晶片上的大量触点进行大量的电源，接地和信号连接。该装置具有允许电通路进入的盒。分配板具有多个接口，其被策略地定位以提供密集配置。这些接口通过柔性附件连接到第一连接器模块的阵列。第一连接器模块中的每一个可以独立地连接到多个第二连接器模块中的相应的一个，从而减少装置的框架上的应力。其他特征包括例如允许对端子施加到晶片的触点上的力的严格控制的活塞。

4. 发明申请

US20110156745A1 ELECTRONICS TESTER WITH A SIGNAL DISTRIBUTION BOARD AND A WAFER CHUCK HAVING DIFFERENT COEFFICIENTS OF THERMAL EXPANSION 有权
标题翻译：具有信号分配板的电子测试仪和具有不同热膨胀系数的散热片
公开(公告)号：US20110156745A1
公开(公告)日：2011-06-30
申请号：US13022803
申请日：2011-02-08
申请人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
发明人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
IPC分类号： G01R31/40 , G01R31/00
CPC分类号： G01R31/2875 , G01R1/0491 , G01R31/2856 , G01R31/2863 , G01R31/2865 , G01R31/2879 , G01R31/2889
摘要： The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
摘要翻译：本发明涉及一种包括便携式支撑结构的测试器装置，该便携式支撑结构用于可移除地保持和测试承载微电子电路的基板。当便携式结构由固定结构保持时，固定结构上的接口连接到第一接口，并且当便携式支撑结构从固定结构移除时与第一接口断开连接。电气测试仪通过接口连接，以便信号可以在电气测试仪和微电子电路之间传输，以测试微电子电路。

5. 发明申请

US20100244866A1 SYSTEM FOR TESTING AN INTEGRATED CIRCUIT OF A DEVICE AND ITS METHOD OF USE 有权
标题翻译：用于测试设备的集成电路的系统及其使用方法
公开(公告)号：US20100244866A1
公开(公告)日：2010-09-30
申请号：US12411233
申请日：2009-03-25
申请人： Scott E. Lindsey , Junjye Yeh , Jovan Jovanovic , Seang P. Malathong
发明人： Scott E. Lindsey , Junjye Yeh , Jovan Jovanovic , Seang P. Malathong
IPC分类号： G01R31/28 , H01R24/00 , G01R31/02
CPC分类号： G01R1/0441 , G01R1/0416 , G01R1/0491 , G01R1/06705 , G01R1/07307 , G01R31/2601 , G01R31/2855 , G01R31/2863 , G01R31/2886 , G01R31/2887
摘要： A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
摘要翻译：描述了一种测试设备的集成电路的方法。允许空气通过流体管线来改变限定在致动器的第一和第二部件之间的体积的尺寸，以相对于设备移动接触器支撑结构，并且将接触器支撑结构上的端子推压到设备上的触点上。当流体管线中的空气压力达到预定值时，空气通过压力释放阀从流体管线自动释放。保持器相对于装置框架移动，以使端子与触头脱离，同时将致动器的第一和第二部件保持在彼此基本上平稳的关系。提供了一种连接装置，其包括具有互补的相互接合结构的第一和第二连接件，其限制接触器基板相对于分配板基板沿切线方向的移动。

6. 发明申请

US20100109696A1 ELECTRONICS TESTER WITH A SIGNAL DISTRIBUTION BOARD AND A WAFER CHUCK HAVING DIFFERENT COEFFICIENTS OF THERMAL EXPANSION 有权
标题翻译：具有信号分配板的电子测试仪和具有不同热膨胀系数的散热片
公开(公告)号：US20100109696A1
公开(公告)日：2010-05-06
申请号：US12684051
申请日：2010-01-07
申请人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
发明人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
IPC分类号： G01R1/067 , G01R31/02 , H01R12/00 , H01R13/62
CPC分类号： G01R31/2875 , G01R1/0491 , G01R31/2856 , G01R31/2863 , G01R31/2865 , G01R31/2879 , G01R31/2889
摘要： The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
摘要翻译：本发明涉及一种包括便携式支撑结构的测试器装置，该便携式支撑结构用于可移除地保持和测试承载微电子电路的基板。当便携式结构由固定结构保持时，固定结构上的接口连接到第一接口，并且当便携式支撑结构从固定结构移除时与第一接口断开连接。电气测试仪通过接口连接，以便信号可以在电气测试仪和微电子电路之间传输，以测试微电子电路。

7. 发明授权

US08506335B2 Apparatus for testing electronic devices 有权
公开(公告)号：US08506335B2
公开(公告)日：2013-08-13
申请号：US13754765
申请日：2013-01-30
申请人： Donald P. Richmond, II , Kenneth W. Deboe , Frank O. Uher , Jovan Jovanovic , Scott E. Lindsey , Thomas T. Maenner , Patrick M. Shepherd , Jeffrey L. Tyson , Mark C. Carbone , Paul W. Burke , Doan D. Cao , James F. Tomic , Long V. Vu
发明人： Donald P. Richmond, II , Kenneth W. Deboe , Frank O. Uher , Jovan Jovanovic , Scott E. Lindsey , Thomas T. Maenner , Patrick M. Shepherd , Jeffrey L. Tyson , Mark C. Carbone , Paul W. Burke , Doan D. Cao , James F. Tomic , Long V. Vu
IPC分类号： H01R4/50
CPC分类号： G01R31/287 , G01R31/003 , G01R31/26 , G01R31/2642 , G01R31/2851 , G01R31/2855 , G01R31/2863 , G01R31/2868 , G01R31/2872 , G01R31/2877 , G01R31/2886 , G01R31/2889 , G01R31/2891 , G01R31/31924 , G06F8/30
摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

8. 发明申请

US20120280704A1 SYSTEM FOR TESTING AN INTEGRATED CIRCUIT OF A DEVICE AND ITS METHOD OF USE 有权
标题翻译：用于测试设备的集成电路的系统及其使用方法
公开(公告)号：US20120280704A1
公开(公告)日：2012-11-08
申请号：US13554722
申请日：2012-07-20
申请人： Scott E. Lindsey , Jovan Jovanovic , David S. Hendrickson , Donald P. Richmond, II
发明人： Scott E. Lindsey , Jovan Jovanovic , David S. Hendrickson , Donald P. Richmond, II
IPC分类号： G01R1/067
CPC分类号： G01R31/2891 , G01R31/287 , G01R31/31908
摘要： A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.
摘要翻译：包括盒框架的盒，在盒框架上的结构，用于将盒框架固定在固定位置到装置框架，接触器支撑结构，接触器支撑结构上的接触器接口，由接触器保持的多个端子支撑结构，用于接触设备上的触点，以及由接触器支撑结构保持的多个导体，将接口连接到端子。

9. 发明授权

US07902846B2 Electronics tester with a signal distribution board and a wafer chuck having different coefficients of thermal expansion 有权
标题翻译：具有信号分配板和具有不同热膨胀系数的晶片卡盘的电子测试仪
公开(公告)号：US07902846B2
公开(公告)日：2011-03-08
申请号：US12684051
申请日：2010-01-07
申请人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
发明人： Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
IPC分类号： G01R31/00
CPC分类号： G01R31/2875 , G01R1/0491 , G01R31/2856 , G01R31/2863 , G01R31/2865 , G01R31/2879 , G01R31/2889
摘要： The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
摘要翻译：本发明涉及一种包括便携式支撑结构的测试器装置，该便携式支撑结构用于可移除地保持和测试承载微电子电路的基板。当便携式结构由固定结构保持时，固定结构上的接口连接到第一接口，并且当便携式支撑结构从固定结构移除时与第一接口断开连接。电气测试仪通过接口连接，以便信号可以在电气测试仪和微电子电路之间传输，以测试微电子电路。

10. 发明授权

US08947116B2 System for testing an integrated circuit of a device and its method of use 有权
标题翻译：用于测试设备集成电路的系统及其使用方法
公开(公告)号：US08947116B2
公开(公告)日：2015-02-03
申请号：US13223319
申请日：2011-09-01
申请人： Scott E. Lindsey , Junyje Yeh , Jovan Jovanovic , Seang P. Malathong
发明人： Scott E. Lindsey , Junyje Yeh , Jovan Jovanovic , Seang P. Malathong
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R1/0441 , G01R1/0416 , G01R1/0491 , G01R1/06705 , G01R1/07307 , G01R31/2601 , G01R31/2855 , G01R31/2863 , G01R31/2886 , G01R31/2887
摘要： A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
摘要翻译：描述了一种测试设备的集成电路的方法。允许空气通过流体管线来改变限定在致动器的第一和第二部件之间的体积的尺寸，以相对于设备移动接触器支撑结构，并且将接触器支撑结构上的端子推压到设备上的触点上。当流体管线中的空气压力达到预定值时，空气通过压力释放阀从流体管线自动释放。保持器相对于装置框架移动，以使端子与触头脱离，同时将致动器的第一和第二部件保持在彼此基本上平稳的关系。提供了一种连接装置，其包括具有互补的相互接合结构的第一和第二连接件，其限制接触器基板相对于分配板基板沿切线方向的移动。

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