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    • 1. 发明授权
    • Method of manufacturing cellular electrophysiology sensor chip
    • 细胞生物传感器芯片制造方法
    • US09184048B2
    • 2015-11-10
    • US13713065
    • 2012-12-13
    • Panasonic Corporation
    • Makoto TakahashiMasaya NakataniHiroshi UshioTakeki Yamamoto
    • H01L21/02G01N33/487
    • H01L21/02356G01N33/48728
    • A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties.
    • 细胞电生理学传感器适于测量测试电池的电气变化。 用于传感器的芯片包括隔膜以及在隔膜上主要含有二氧化硅的热氧化膜。 隔膜在硅层的上表面上包括硅层和二氧化硅层。 形成穿过硅层和二氧化硅层的通孔。 通孔具有在二氧化硅层处开口并且适于捕获测试电池的开口。 热氧化膜设置在通孔的内壁表面上,并且在通孔的开口处与二氧化硅层一体化。 这种细胞电生理学传感器芯片可以稳定地捕获测试细胞,并且即使测试细胞具有不同的性质也能稳定地提供gigaseal。